Pellicle, pellicle support, and method for manufacturing pellicle

Abstract

The present invention addresses the problem of providing a pellicle capable of improving impact resistance and suppressing generation of foreign matter. A pellicle assembly (100) is provided with a pellicle (10), a support body (30) having a frame section (31) and an opening section (32), and a first reinforcing layer (40) which is a region where the pellicle (10) overlaps the support body (30) when the pellicle (10) supported by the support body (30) is viewed in plan, and which is disposed between the pellicle (10) and the support body (30). And a first reinforcing layer (40) that contains one or more materials selected from the group consisting of carbon nanotubes, graphene, silicon carbide, silicon nitride, and boron nitride, and that, when the first reinforcing layer (40) contains carbon nanotubes, the carbon nanotubes are oriented in the vertical direction with respect to the support surface (34).

Description

Technical Field

[0001] This invention relates to a protective pellicle assembly, a protective pellicle support, and a method for manufacturing the protective pellicle assembly. Background Technology

[0002] In the manufacturing process of semiconductor devices, for example, by applying a photoresist to a substrate such as a semiconductor wafer, and then using a photomask to irradiate light on the substrate coated with the photoresist to remove the photoresist, a target circuit pattern can be formed on the substrate.

[0003] When light is irradiated with foreign matter attached to a photomask, the foreign matter can sometimes interfere with the circuit patterns formed on the substrate. Therefore, to suppress foreign matter adhesion to the photomask, a protective film assembly with a pellicle film for trapping foreign matter is sometimes used. The protective film assembly is positioned above the photomask at a distance where the protective film does not contact the photomask.

[0004] In recent years, the use of extreme ultraviolet (EUV) light has been researched to create finer circuit patterns. EUV refers to light with wavelengths greater than 1 nm and less than 100 nm. Specifically, EUV light with wavelengths around 13.5 nm ± 0.3 nm is currently being used. When EUV irradiates a protective film, although the EUV passes through, a portion of the irradiated EUV is absorbed by the film. By converting the absorbed EUV light energy into heat energy, the temperature of the protective film rises. Therefore, protective films require EUV transmittance, heat resistance, and durability.

[0005] For example, Patent Document 1 describes how the strength of a protective film can be improved by heat treatment (annealing).

[0006] In addition, Patent Document 2 describes a protective film assembly for photolithography, which consists of a protective film and a protective film frame, wherein the protective film is disposed on the upper end face of the protective film frame by an adhesive or bonding agent.

[0007] Existing technical documents

[0008] Patent documents

[0009] Patent Document 1: Japanese Patent Application Publication No. 2020-91314

[0010] Patent Document 2: Japanese Patent Application Publication No. 2020-98227 Summary of the Invention

[0011] The problem that the invention aims to solve

[0012] Although a method for improving the strength of the protective film is described in Patent Document 1, a technique is still required to further improve the impact resistance of the protective film assembly.

[0013] Furthermore, in the protective film assembly of Patent Document 2, the protective film is fixed to the support (protective film frame) by an adhesive or bonding agent. Since adhesives and bonding agents are not materials with excellent heat resistance, they may decompose and become foreign matter if exposed to high-energy light such as EUV.

[0014] The purpose of this invention is to provide a protective film assembly and a protective film support that can improve impact resistance and suppress the generation of foreign objects, and to provide a method for manufacturing the protective film assembly.

[0015] Problem Solving Methods [1].

[0017] A protective membrane assembly comprising:

[0018] Protective film

[0019] A support having a frame portion and an opening surrounded by the frame portion, and supporting the protective film, and

[0020] The first reinforcing layer of the protective film is enhanced.

[0021] The frame portion has a supporting surface opposite to the protective film.

[0022] The protective film has a first protective film surface opposite to the support and a second protective film surface opposite to the first protective film surface.

[0023] The first reinforcing layer is located in the area where the protective film overlaps with the support when viewed from above, and is disposed on the side of the first protective film and between the protective film and the support.

[0024] The first reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

[0025] When the first reinforcing layer contains carbon nanotubes, the carbon nanotubes in the first reinforcing layer are oriented in a vertical direction relative to the support surface of the frame portion. [2].

[0027] According to the protective film assembly described in [1], wherein,

[0028] The protective film is an inorganic film or an organic film. [3].

[0030] According to the protective film assembly described in [1] or [2], wherein,

[0031] The protective film contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. [4].

[0033] The protective film assembly according to any one of [1] to [3], wherein,

[0034] The protective film contains carbon nanotubes. [5].

[0036] The protective film assembly according to any one of [1] to [4], wherein,

[0037] The material of the protective film is the same as that of the first reinforcing layer. [6].

[0039] The protective film assembly according to any one of [1] to [5] further comprises a second reinforcing layer disposed on the surface side of the second protective film. [7].

[0041] According to the protective film assembly described in [6], wherein,

[0042] The second reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. [8].

[0044] According to the protective film assembly described in [6] or [7], wherein,

[0045] The second reinforcing layer comprises carbon nanotubes.

[0046] The carbon nanotubes in the second reinforcing layer are oriented in a parallel direction relative to the supporting surface of the frame. [9].

[0048] A protective film support for supporting a protective film.

[0049] The protective film support has a frame portion and an opening surrounded by the frame portion.

[0050] The frame portion has a support surface that is opposite to the protective film when supporting the protective film.

[0051] A first reinforcing layer is disposed on the outer periphery of the opening and on the support surface of the frame.

[0052] The first reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

[0053] When the first reinforcing layer contains carbon nanotubes, the carbon nanotubes in the first reinforcing layer are oriented in a vertical direction relative to the support surface of the frame portion.

[10]

[0055] A method for manufacturing a protective film assembly, which is a method for manufacturing a protective film assembly using the protective film support described in [9], the method comprising:

[0056] The process of attaching the protective film to the support surface side of the frame portion in a manner that covers the opening and is supported by the first reinforcing layer.

[11] .

[0058] According to the manufacturing method of the protective film assembly described in

[10] , wherein,

[0059] Before the step of attaching the protective film to the protective film support, the procedure includes: depositing a second reinforcing layer on a second protective film surface opposite to the first protective film surface opposite to the protective film support.

[0060] The process of configuring the second reinforcing layer is to configure the second reinforcing layer at the position where the protective film, the protective film support, and the first reinforcing layer overlap when the protective film is viewed from above after it has been pasted onto the protective film support.

[12] .

[0062] The method for manufacturing the protective film assembly according to

[10] further includes:

[0063] The process of distributing a second reinforcing layer in a region on the second protective film surface opposite to the first protective film surface opposite to the protective film support, wherein the region is the area where the protective film and the protective film support overlap when viewed from above.

[13] .

[0065] According to the manufacturing method of the protective film assembly described in

[11] or

[12] , wherein,

[0066] The second reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

[14] .

[0068] According to the manufacturing method of the protective film assembly described in

[13] , wherein,

[0069] The second reinforcing layer comprises carbon nanotubes.

[0070] The second reinforcing layer is formed such that the carbon nanotubes in the second reinforcing layer are oriented in a parallel direction relative to the surface of the protective film.

[0071] According to one aspect of the present invention, a protective membrane assembly and a protective membrane support capable of improving impact resistance and suppressing foreign matter generation can be provided, and a method for manufacturing the protective membrane assembly can also be provided. Attached Figure Description

[0072] Figure 1 A top view is shown to schematically illustrate an example of the protective film assembly of the first embodiment.

[0073] Figure 2 To show Figure 1 A cross-sectional view of section II-II.

[0074] Figure 3 A top view is shown to schematically illustrate an example of the protective film assembly of the second embodiment.

[0075] Figure 4 To show Figure 3 A cross-sectional view of section IV-IV.

[0076] Figure 5A A top view of the protective film assembly is shown to schematically illustrate the strength of the protective film.

[0077] Figure 5B A side view of the protective film assembly is shown to schematically illustrate the strength of the protective film.

[0078] Figure 6 An illustrative diagram illustrating the strength evaluation of the protective membrane.

[0079] Symbol Explanation

[0080] 10··· Protective film

[0081] 10W Protective Film

[0082] 11···First protective membrane surface

[0083] 12···Second protective membrane

[0084] 13···Edge

[0085] 20W··· Adhesive components

[0086] 30···Support

[0087] 30A··· Protective membrane support

[0088] 30W Support

[0089] 31···Frame

[0090] 32···Opening

[0091] 32W···Opening

[0092] 34···Support Surface

[0093] 40···First Enhancement Layer

[0094] 40W... First Enhancement Layer

[0095] 50···Second Enhancement Layer

[0096] 100··· Protective membrane assembly

[0097] 110··· Protective membrane assembly

[0098] B··· Plate-shaped members

[0099] BP···Substrate

[0100] E1···First end

[0101] E2···Second end

[0102] S···stop block

[0103] T···Taiwan

[0104] WK··· Protective Membrane Components Detailed Implementation

[0105] [First Embodiment]

[0106] (Protective membrane assembly)

[0107] The protective film assembly of the first embodiment includes: a protective film, a support for supporting the protective film, and a first reinforcing layer for reinforcing the protective film.

[0108] It should be noted that in this specification, ordinal numbers such as "first" and "second" are added to statements to distinguish components, etc., and are not added to statements to specifically specify the order. In this specification, when ordinal numbers are added to specifically specify the order, their intention will be clearly stated separately. Therefore, for example, "first" and "second" in "first reinforcing layer" and "second reinforcing layer" (refer to the second embodiment) are added to the statement "reinforcing layer" to distinguish multiple reinforcing layers when multiple different reinforcing layers are provided in the protective film assembly.

[0109] It should be noted that, in this specification, since the first reinforcing layer is disposed on the inner side of the protective film, the first reinforcing layer can also be referred to as the inner reinforcing layer, and since the second reinforcing layer is disposed on the outer side of the protective film, the second reinforcing layer can also be referred to as the outer reinforcing layer.

[0110] Hereinafter, an example of the protective film assembly according to the first embodiment will be described with reference to the accompanying drawings. The present invention is not limited to the protective film assembly shown in the drawings. It should be noted that some parts in the drawings shown in this specification have been enlarged or reduced for ease of explanation.

[0111] exist Figure 1 and Figure 2 In the example of the first embodiment, a protective film assembly 100 is shown. Figure 1 The image shows a top view of the protective film assembly 100, viewed from the side where the protective film 10 is attached. Figure 2 It shows Figure 1 The protective membrane assembly 100 shown is a cross-sectional view.

[0112] The protective film assembly 100 includes a protective film 10, a support 30 for supporting the protective film 10, and a first reinforcing layer 40 for reinforcing the protective film 10.

[0113] (Support structure)

[0114] The support 30 has a frame portion 31 and an opening portion 32 surrounded by the frame portion 31.

[0115] The frame portion 31 has a support surface 34 opposite to the protective film 10. Specifically, the support surface 34 faces the first protective film surface 11 of the protective film 10 when supporting the protective film 10. Sometimes, the support body 30 on which the first reinforcing layer 40 is disposed is referred to as a protective film support body 30A. The opening 32 extends from one side of the support body 30 to the other side. Both the frame portion 31 and the opening 32 are rectangular. In this embodiment, the four corners of the frame portion 31 are rounded, but the shape of the frame portion 31 is not limited to this shape.

[0116] The material used for the support 30 can be a known material, such as resin materials (polyethylene, etc.), metal materials (aluminum, aluminum alloy, magnesium alloy, stainless steel, titanium, titanium alloy and Invar, etc.), ceramic materials (SiC and SiN, etc.), quartz, and fiber-reinforced plastic materials (carbon fiber reinforced plastic and glass fiber reinforced plastic, etc.).

[0117] (First Enhancement Layer)

[0118] The first reinforcing layer 40 is the area where the protective membrane 10 overlaps with the support body 30 when viewed from above, and it is disposed on the side of the first protective membrane surface 11 and between the protective membrane 10 and the support body 30. The first reinforcing layer 40 is disposed along the edge portion 13 of the protective membrane 10. Preferably, the first reinforcing layer 40 is disposed in direct contact with the support surface 34.

[0119] Within the range that does not interfere with development (the range that does not block the exposure light required for development), in a top view of the protective film assembly 100, the first reinforcing layer 40 can protrude toward the opening 32 of the support 30. Additionally, as... Figure 2 As shown, the inner end of the first reinforcing layer 40 (the end on the side of the opening 32) can be formed aligned with the inner end face of the frame portion 31 (the end face on the side of the opening 32). In addition, within the range that does not impair the support and reinforcement of the protective film 10, the inner end of the first reinforcing layer 40 can be formed in a manner that is located further inward than the inner end face of the frame portion 31.

[0120] Preferably, the thickness of the first reinforcing layer 40 is greater than the thickness of the protective film 10. From the viewpoint of easily obtaining impact resistance, it is preferably 0.05 μm or more, and more preferably 0.1 μm or more. In addition, from the viewpoint of productivity and suppressing the generation of foreign matter caused by heating, the thickness of the first reinforcing layer 40 is preferably 1 μm or less, and more preferably 0.5 μm or less.

[0121] The first reinforcing layer 40 preferably contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. By including these materials in the first reinforcing layer 40, the protective film assembly 100 can function stably against heat during exposure and has excellent durability. Furthermore, it is less likely to generate particles (microparticles with a size of hundreds of nm to tens of nm) from the first reinforcing layer 40. The content of these materials (reinforcing materials) in the first reinforcing layer 40 is preferably 60% by mass or more, or 70% by mass or more, or 80% by mass or more, or 90% by mass or more, or 95% by mass or more, or 98% by mass or more. The first reinforcing layer 40 more preferably contains one or more materials selected from carbon nanotubes, graphene, silicon carbide, silicon nitride, and boron nitride. The first reinforcing layer 40 is further preferably formed of carbon nanotubes or graphene. Nanoscale carbon raw materials such as carbon nanotubes and graphene have excellent heat resistance. The content of nano-carbon raw materials in the first reinforcing layer 40 is preferably 60% or more by mass, or 70% or more by mass, or 80% or more by mass, or 90% or more by mass, or 95% or more by mass, or 98% or more by mass.

[0122] When the first reinforcing layer 40 contains carbon nanotubes, the carbon nanotubes in the first reinforcing layer 40 are oriented in a vertical direction relative to the support surface 34 of the frame portion 31. The first reinforcing layer 40 is also preferably a carbon nanotube forest. A carbon nanotube forest is a growth body obtained by growing a large number of carbon nanotubes on a support or substrate in a manner in which carbon nanotubes are oriented in a vertical direction relative to the surface of the support or substrate, and is sometimes also called an "array". By oriented the carbon nanotubes in the first reinforcing layer 40 in a vertical direction, the impact absorption of the first reinforcing layer 40 is improved.

[0123] In this specification, "orientation in a vertical direction" means orienting approximately perpendicular to the surface of the support or substrate. "Approximately perpendicular" means that the angle of the orientation direction of the material (such as carbon nanotubes) in the first reinforcing layer relative to the surface of the support or substrate is 90 degrees ± 20 degrees (more than 70 degrees and less than 110 degrees).

[0124] The first reinforcing layer 40 more preferably contains carbon nanotubes, and even more preferably is substantially composed solely of carbon nanotubes. Here, "substantially composed solely of carbon nanotubes" means that, apart from the metal catalyst used in the manufacture of the carbon nanotubes, 98% by mass or more of the first reinforcing layer 40 is composed of carbon nanotubes. That is, "substantially composed solely of carbon nanotubes" means that, relative to the total mass of the first reinforcing layer 40 after subtracting the mass of the metal catalyst used in the manufacture of the carbon nanotubes, i.e., the mass of the metal catalyst contained in the first reinforcing layer 40, the percentage of the mass of carbon nanotubes is 98% by mass or more. When the first reinforcing layer 40 is substantially composed solely of carbon nanotubes, unavoidable impurities that are intentionally not added to the first reinforcing layer 40 and are mixed in during the raw materials or manufacturing process may or may not be included in the first reinforcing layer 40.

[0125] When the first reinforcing layer 40 contains carbon nanotubes, the type of carbon nanotubes contained in the first reinforcing layer 40 is not particularly limited, but is preferably selected from at least one of multi-walled carbon nanotubes (MWCNTs), few-walled carbon nanotubes (FWCNTs), double-walled carbon nanotubes (DWCNTs), and single-walled carbon nanotubes (SWCNTs).

[0126] (Protective film)

[0127] The protective film 10 has a first protective film surface 11 opposite to the support 30 and a second protective film surface 12 opposite to the first protective film surface 11. The edge portion 13 of the protective film 10 is fixed to a portion of the support surface 34 of the frame portion 31, covering the opening 32 of the support 30. In the protective film assembly 100, it is preferable that the protective film 10 is in direct contact with the first reinforcing layer 40.

[0128] The protective film 10 is preferably an inorganic film or an organic film.

[0129] The protective film 10 preferably contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

[0130] The protective film 10 preferably contains carbon nanotubes, and more preferably is substantially composed solely of carbon nanotubes. Here, "substantially composed solely of carbon nanotubes" means that, apart from the metal catalyst used in the manufacture of the carbon nanotubes, the protective film comprises 98% or more by mass of carbon nanotubes. That is, "substantially composed solely of carbon nanotubes" means that, relative to the total mass of the protective film 10 after subtracting the mass of the metal catalyst used in the manufacture of the carbon nanotubes, i.e., the mass of the metal catalyst contained in the protective film 10, the percentage of carbon nanotube mass is 98% or more. When the protective film 10 is substantially composed solely of carbon nanotubes, unavoidable impurities that are intentionally not added to the protective film 10 and are mixed in during the raw materials or manufacturing process may or may not be included in the protective film 10.

[0131] The carbon nanotubes contained in the protective film 10 are not particularly limited, but are preferably selected from at least one of multi-walled carbon nanotubes, oligo-walled carbon nanotubes, double-walled carbon nanotubes and single-walled carbon nanotubes.

[0132] In this embodiment, multi-walled carbon nanotubes are, for example, carbon nanotubes having 4 or more but less than 20 concentric layers and a diameter of 4 nm or more but less than 100 nm. Oligo-walled carbon nanotubes are, for example, carbon nanotubes having 2 or 3 concentric layers and a diameter of 2 nm or more but less than 8 nm. Single-walled carbon nanotubes are, for example, single-layered carbon nanotubes with a diameter of 0.2 nm or more but less than 5 nm.

[0133] Carbon nanotubes can be obtained by methods such as chemical vapor deposition, laser ablation, or arc discharge.

[0134] In this embodiment, the length of the carbon nanotubes is preferably, for example, 0.1 μm or more and 1000 μm or less.

[0135] In this embodiment, the length of the carbon nanotubes is more preferably 0.5 μm or more, and even more preferably 1 μm or more.

[0136] In this embodiment, the length of the carbon nanotubes is more preferably 600 μm or less, and even more preferably 400 μm or less.

[0137] In this embodiment, the cross-sectional diameter of the carbon nanotubes is preferably 0.2 nm or more and 50 nm or less.

[0138] In this embodiment, the cross-sectional diameter of the carbon nanotubes is more preferably 0.5 nm or more, and even more preferably 1 nm or more.

[0139] In this embodiment, the cross-sectional diameter of the carbon nanotubes is more preferably 30 nm or less, and even more preferably 20 nm or less.

[0140] From the viewpoint of improving transparency to exposed light, the protective film of this embodiment preferably has self-supporting properties. Self-supporting properties mean that the protective film itself is in a self-supporting state; it indicates that the protective film has self-supporting retention properties (also called a self-supporting film). In other words, a self-supporting protective film is one that can maintain its shape even in the absence of a substrate or the like.

[0141] In the protective film assembly 100, the material of the protective film 10 and the material of the first reinforcing layer 40 can be the same or different. For example, it is preferable that both the material of the protective film 10 and the material of the first reinforcing layer 40 are carbon nanotubes. By forming the protective film 10 and the first reinforcing layer 40 with the same material, the adhesion between the protective film 10 and the first reinforcing layer 40 can be improved.

[0142] The thickness of the protective film in this embodiment is not particularly limited, but is preferably 3 nm or more and 1000 nm or less. The thickness of the protective film is preferably 10 nm or more, more preferably 20 nm or more, and even more preferably 30 nm or more. The thickness of the protective film is preferably 600 nm or less, more preferably 300 nm or less. If the thickness of the protective film is, for example, 3 nm or more and 1000 nm or less, the strength of the protective film is further improved, and EUV transmittance is easily ensured.

[0143] (Manufacturing method of protective film components)

[0144] Next, a method for manufacturing the protective film assembly according to the first embodiment (hereinafter, sometimes referred to as the manufacturing method of the first embodiment) will be described. The manufacturing method of the first embodiment includes a step of manufacturing a protective film assembly using a protective film support 30A. More specifically, the manufacturing method of the first embodiment includes the following step (P1).

[0145] Process (P1) is a process of attaching the protective film 10 to the support surface 34 side of the frame portion 31 of the protective film support 30A in a manner that covers the opening 32 and is supported by the first reinforcing layer 40.

[0146] The manufacturing method of the first embodiment may include, before step P1, a step of manufacturing a protective film support 30A and a step of manufacturing a protective film 10.

[0147] (Manufacturing method of protective membrane support)

[0148] The method for manufacturing the protective film support 30A includes a step (PS1) of forming a first reinforcing layer 40 on the support surface 34 of the support 30.

[0149] The first reinforcing layer 40 can be formed using a material appropriately selected based on the material of the protective film 10 and the area supporting the protective film 10. The method for forming the first reinforcing layer 40 can be appropriately selected based on the material used.

[0150] When the first reinforcing layer 40 is a carbon nanotube layer (CNT layer), the CNT layer can be formed by, for example, chemical vapor deposition (CVD), laser ablation, or arc discharge. The CNT layer can be formed directly on the support surface 34 of the support 30 using CVD, or it can be formed on the substrate and then transferred to the support surface 34. Alternatively, the substrate with the CNT layer can be fixed to the support surface 34.

[0151] Because the first reinforcing layer 40 is formed within a range that does not interfere with development (a range that does not block the exposure light required for development), the carbon nanotube content in the first reinforcing layer 40 can be increased (e.g., the mass of carbon nanotubes per unit area of ​​the film) compared to the protective film 10. As a result, the strength of the first reinforcing layer 40 is improved, and the impact resistance of the protective film 10 is also improved.

[0152] When the first reinforcing layer 40 is a carbon nanotube forest, the carbon nanotube forest can be formed by directly growing a large number of carbon nanotubes in a direction perpendicular to the support surface 34 of the support 30. Alternatively, the carbon nanotube forest can be formed on a substrate and the substrate can be fixed to the support surface 34.

[0153] When a CNT layer is formed on a substrate, a known substrate can be used as the substrate, such as at least one selected from plastic substrates, glass substrates, silicon substrates, and metal substrates (including substrates of metals such as iron and copper or their alloys (e.g., stainless steel)). A silicon dioxide film can be laminated on the surface of these substrates. The substrate on which the CNT layer as the first reinforcing layer 40 is formed can be fixed to the support surface 34 by an adhesive member (e.g., double-sided tape).

[0154] The carbon nanotubes grown on the substrate by chemical vapor deposition are preferably selected from at least one of multi-walled carbon nanotubes, oligo-walled carbon nanotubes and single-walled carbon nanotubes, or they may be a mixture formed by multiple types of carbon nanotubes.

[0155] When the first reinforcing layer 40 is a graphene-containing layer (graphene layer), the graphene layer serving as the first reinforcing layer 40 can also be formed by CVD. For example, the graphene layer can be formed directly on the support surface 34 of the support 30 by CVD, or the graphene layer can be formed on a metal foil (e.g., Ni foil or Cu foil) substrate by CVD and then transferred to the support surface 34. The graphene layer serving as the first reinforcing layer 40 can be a single-layer structure formed by one layer, or, from the viewpoint of improving the effect of reinforcing the protective film, it can be a multilayer structure formed by two or more layers. Since the first reinforcing layer 40 is formed within a range that does not interfere with development, the graphene layer will not interfere with development even if it is a multilayer structure. When the graphene layer is a multilayer structure, the graphene layer can be formed as multiple layers in advance and then transferred to the support surface 34.

[0156] Alternatively, the material contained in the first reinforcing layer 40 (reinforcing material) can be dispersed in a solvent to prepare a reinforcing material dispersion. This reinforcing material dispersion is then coated onto the support surface 34 of the support 30, and the solvent is evaporated to form a film made of the reinforcing material as the first reinforcing layer 40.

[0157] (Manufacturing method of protective film)

[0158] There are no particular limitations on the manufacturing method of the protective film 10, and it can be appropriately selected according to the materials used.

[0159] An example of a preferred manufacturing method for a protective film containing carbon nanotubes includes: a step of dispersing carbon nanotubes (PE1); a step of settling and depositing the dispersed carbon nanotubes onto a breathable member to obtain a membrane of carbon nanotubes in a pad-like form on the breathable member (PE2); and a step of removing the breathable member from the membrane of carbon nanotubes to obtain a protective film (PE3).

[0160] First, in step PE1, carbon nanotubes are dispersed in a liquid to prepare a carbon nanotube dispersion. The liquid is preferably a water-containing liquid. The carbon nanotube dispersion may contain only carbon nanotubes, or it may contain various additives such as dispersants to disperse the carbon nanotubes.

[0161] Next, in step PE2, the dispersed carbon nanotubes are allowed to settle and accumulate on a breathable component. For example, the carbon nanotube dispersion prepared in step PE1 is filtered using a filter membrane, which serves as the breathable component, causing the carbon nanotubes to settle and accumulate, forming a pad-like membrane of carbon nanotubes on the filter membrane. A membrane filter, for example, is preferably used as the filter membrane.

[0162] Next, in process (PE3), a protective membrane containing carbon nanotubes is obtained by removing the filter membrane from the membrane compound formed as a pad-like structure. A drying process can be included as needed, either before or after removing the filter membrane from the membrane compound formed as a pad-like structure. The resulting protective membrane is a self-supporting membrane.

[0163] The protective film assembly 100 can be used as a dust cover, for example, in the manufacture of semiconductor devices, IC packages, printed circuit boards, liquid crystal displays, or organic EL displays. The protective film assembly 100 is used, for example, in a configuration where the first protective film surface 11 faces the photomask, and is disposed above the photomask and separate from it. By using the protective film assembly 100, the adhesion of foreign matter to the photomask can be suppressed.

[0164] (Effects of the first embodiment)

[0165] According to the protective film assembly and protective film support of the first embodiment, since a first reinforcing layer 40 is disposed between the protective film 10 and the support 30, the protective film 10 is not easily damaged, and the impact resistance of the protective film assembly 100 is improved.

[0166] In the protective film assembly and protective film support of the first embodiment, the first reinforcing layer 40 is not an adhesive layer or a bonding agent layer, but is formed of a material with excellent heat resistance, so it is not easily decomposed even when exposed to high-energy light such as EUV. Therefore, compared with a protective film assembly in which the protective film is fixed to the support by an adhesive layer or a bonding agent layer, the protective film assembly and protective film support according to the first embodiment can suppress the generation of foreign matter.

[0167] In the protective film assembly and protective film support of the first embodiment, when the first reinforcing layer 40 is a CNT layer with carbon nanotubes oriented in the vertical direction (e.g., a carbon nanotube forest), when comparing reinforcing layers using the same mass of carbon nanotubes, the impact resistance of the CNT layer with carbon nanotubes oriented in the vertical direction is further improved compared to the CNT layer with carbon nanotubes oriented in the horizontal direction.

[0168] In the protective film assembly and protective film support of the first embodiment, since the area where the first reinforcing layer 40 is disposed is the area where the protective film 10 overlaps with the support 30 when viewed from above the protective film assembly 100, the transparency of the first reinforcing layer 40 can be low. Therefore, the options for materials that can be used in the first reinforcing layer 40 are expanded, and the content of reinforcing material in the first reinforcing layer 40 (e.g., the mass of reinforcing material (e.g., carbon nanotubes) per unit area of ​​the film) can be increased compared to the protective film 10. As a result, the strength of the first reinforcing layer 40 is improved, and the impact resistance of the protective film assembly 100 is also improved.

[0169] According to the protective film assembly and protective film support of the first embodiment, since the impact resistance is improved, the number of times the protective film assembly needs to be replaced is reduced, which can improve the productivity of the manufacturing process of the protective film assembly (e.g., the manufacturing process of semiconductor devices).

[0170] According to the manufacturing method of the first embodiment, a protective film assembly with improved impact resistance can be manufactured.

[0171] [Second Implementation]

[0172] (Protective membrane assembly)

[0173] Next, the structure of the protective film assembly according to the second embodiment will be described. In the description of the second embodiment, the same components as those in the first embodiment are labeled with the same symbols and names, and their descriptions are omitted or simplified. In addition, in the second embodiment, for structures and materials not specifically described, the same structures and materials as those described in the first embodiment may be used.

[0174] The protective film assembly of the second embodiment differs from the protective film assembly of the first embodiment in that it further includes a second reinforcing layer disposed on the surface of the second protective film. Otherwise, it is the same as the first embodiment.

[0175] That is, in the second embodiment, the protective film is reinforced by having its edge sandwiched between the first reinforcing layer and the second reinforcing layer, and is supported by the support body.

[0176] Hereinafter, an example of the protective film assembly according to the second embodiment will be described with reference to the accompanying drawings. The present invention is not limited to the protective film assembly shown in the drawings.

[0177] As an example of the second implementation method Figure 3 and Figure 4 The protective membrane assembly 110 is shown in the figure. Figure 3 The image shows a top view of the protective membrane assembly 110, viewed from the side on which the protective membrane 10 is mounted. Figure 4 It shows Figure 3The cross-sectional view of the protective membrane assembly 110 shown.

[0178] The protective film assembly 110 includes: a protective film 10, a support 30 for supporting the protective film 10, and a first reinforcing layer 40 and a second reinforcing layer 50 for reinforcing the protective film 10.

[0179] (Second Reinforcement Layer)

[0180] The second reinforcing layer 50 is disposed on the side of the second protective membrane 12. The second reinforcing layer 50 is disposed along the edge portion 13 of the protective membrane 10.

[0181] Preferably, the second reinforcing layer 50 is disposed in the area where the protective membrane 10, supported by the support body 30, overlaps with the support body 30 when viewed from above. In the protective membrane assembly 110, the protective membrane 10 is preferably in direct contact with the second reinforcing layer 50.

[0182] Preferably, the thickness of the second reinforcing layer 50 is greater than the thickness of the protective film 10. From the viewpoint of easily obtaining impact resistance, it is preferably 0.05 μm or more, and more preferably 0.1 μm or more. In addition, from the viewpoint of productivity and suppressing the generation of foreign matter caused by heating, the thickness of the second reinforcing layer 50 is preferably 1 μm or less, and more preferably 0.5 μm or less.

[0183] The second reinforcing layer 50 may also protrude toward the opening 32 of the support 30 in a top view of the protective film assembly 110, within a range that does not interfere with development (a range that does not block the exposure light required for development). Additionally, as... Figure 4 As shown, the inner end of the second reinforcing layer 50 can be formed aligned with at least one of the inner end face of the frame portion 31 and the inner end of the first reinforcing layer 40. In addition, the inner end of the second reinforcing layer 50 can be formed in a manner that is located further inside than the inner end of the frame portion 31 within the range that does not impair the reinforcement of the protective film 10.

[0184] The second reinforcing layer 50 preferably contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. By including these materials in the second reinforcing layer 50, the protective film assembly 110 can function stably under heat during exposure and exhibits excellent durability. Furthermore, it is less likely to generate particles from the second reinforcing layer 50. The content of these materials (reinforcing materials) in the second reinforcing layer 50 is preferably 60% by mass or more, or 70% by mass or more, or 80% by mass or more, or 90% by mass or more, or 95% by mass or more, or 98% by mass or more. The second reinforcing layer 50 preferably contains one or more materials selected from carbon nanotubes, graphene, silicon carbide, silicon nitride, and boron nitride. The second reinforcing layer 50 is further preferably formed of carbon nanotubes or graphene. Nanocarbon raw materials such as carbon nanotubes and graphene have excellent heat resistance, thus improving the heat resistance of the second reinforcing layer 50 containing nanocarbon raw materials. The content of nano-carbon raw materials in the second reinforcing layer 50 is preferably 60% by mass or more, or 70% by mass or more, or 80% by mass or more, or 90% by mass or more, or 95% by mass or more, or 98% by mass or more. In the protective film assembly 110, the materials of the first reinforcing layer 40 and the second reinforcing layer 50 may be the same or different.

[0185] The second reinforcing layer 50 more preferably contains carbon nanotubes, and even more preferably is substantially composed solely of carbon nanotubes. Here, "substantially composed solely of carbon nanotubes" means that, apart from the metal catalyst used in the manufacture of the carbon nanotubes, 98% or more by mass of the second reinforcing layer 50 is carbon nanotubes. That is, "substantially composed solely of carbon nanotubes" means that, relative to the total mass of the second reinforcing layer 50 after subtracting the mass of the metal catalyst used in the manufacture of the carbon nanotubes, i.e., the mass of the metal catalyst contained in the second reinforcing layer 50, the percentage by mass of carbon nanotubes is 98% or more. In the case where the second reinforcing layer 50 is substantially composed solely of carbon nanotubes, unavoidable impurities that are intentionally excluded from the second reinforcing layer 50 due to contamination during the raw materials or manufacturing process may or may not be included in the second reinforcing layer 50.

[0186] When the second reinforcing layer 50 includes carbon nanotubes, it is preferable that the carbon nanotubes in the second reinforcing layer 50 are oriented in a parallel direction relative to the support surface 34 of the frame portion 31. That is, it is preferable that the long axis direction of each carbon nanotube is along the support surface 34 of the frame portion 31. By oriented the carbon nanotubes in the second reinforcing layer 50 in this way, and by winding them with the protective film, which is also oriented in a parallel direction, the reinforcing effect can be expected to be improved. It should be noted that the carbon nanotubes in the second reinforcing layer 50 may also be oriented in a perpendicular direction relative to the support surface 34 of the frame portion 31.

[0187] (Protective film)

[0188] The protective film 10 in the second embodiment is the same as that in the first embodiment.

[0189] In the protective film assembly 110, the materials of the protective film 10 and the second reinforcing layer 50 can be the same or different. For example, it is preferable that the materials of the protective film 10 and the second reinforcing layer 50 are both the same, which is carbon nanotubes. By making the protective film 10 and the second reinforcing layer 50 formed of the same material, the adhesion between the protective film 10 and the second reinforcing layer 50 can be improved.

[0190] Furthermore, the materials of the protective film 10, the first reinforcing layer 40, and the second reinforcing layer 50 can be the same or different. When the materials of the protective film 10, the first reinforcing layer 40, and the second reinforcing layer 50 are the same, their adhesion is improved. Preferably, the materials of the protective film 10, the first reinforcing layer 40, and the second reinforcing layer 50 are carbon nanotubes.

[0191] (Manufacturing method of protective film components)

[0192] Next, the manufacturing method of the protective film assembly according to the second embodiment (hereinafter sometimes referred to as the manufacturing method of the second embodiment) will be described.

[0193] The manufacturing method of the second embodiment also includes the step of manufacturing a protective film assembly using the protective film support 30A described in the first embodiment. More specifically, the manufacturing method of the second embodiment may include either the steps (P1) and (P2) described below, or it may include either the steps (P1) and (P3) described below.

[0194] Step (P1) is to attach the protective film 10 to the support surface 34 side of the frame portion 31 of the protective film support 30A in a manner that covers the opening 32 and is supported by the first reinforcing layer 40. Step (P1) is the same as in the first embodiment.

[0195] Step (P2) involves depositing the second reinforcing layer 50 in a region of the second protective film surface 12, which is opposite to the first protective film surface 11 of the protective film 10 and the protective film support 30A, wherein the region is the area where the protective film 10 and the protective film support 30A overlap when viewed from above. That is, in step (P2), the protective film assembly 100 of the first embodiment is first manufactured, and the second reinforcing layer 50 is deposited on the second protective film surface 12 of the protective film 10.

[0196] Step (P3) is a step of placing a second reinforcing layer 50 on the second protective film surface 12, which is the opposite side of the first protective film surface 11 that is opposite to the protective film support 30A, before the step of pasting the protective film 10 onto the protective film support 30A.

[0197] In this process (P3) (the process of configuring the second reinforcing layer), when the protective film 10 is viewed from above after it has been pasted onto the support 30, the second reinforcing layer 50 is configured in the area or position where the protective film 10 and the protective film support 30A overlap with the first reinforcing layer 40.

[0198] That is, in process (P3), the second reinforcing layer 50 is first disposed on the protective film 10, and the protective film 10 with the second reinforcing layer 50 is attached to the support 30 with the first reinforcing layer 40 (protective film support 30A).

[0199] As a method of disposing the second reinforcing layer 50 on the protective film 10, one example is forming the second reinforcing layer 50 at a given position on the protective film 10.

[0200] The second reinforcing layer 50 can be formed using a material appropriately selected based on the material of the protective film 10 and the area disposed on the protective film 10. The method for forming the second reinforcing layer 50 can be appropriately selected based on the material used.

[0201] For example, the material contained in the second reinforcing layer 50 (reinforcing material) can be dispersed in a solvent to prepare a reinforcing material dispersion, and the reinforcing material dispersion can be coated on the protective film 10, and the solvent can be evaporated to form a film formed by the reinforcing material as the second reinforcing layer 50.

[0202] In the manufacturing method of the second embodiment, when forming a second reinforcing layer 50 containing carbon nanotubes, it is preferable that the carbon nanotubes in the second reinforcing layer 50 are oriented in a parallel direction relative to the support surface 34 of the frame portion 31.

[0203] Because the second reinforcing layer 50 is formed within a range that does not interfere with development (a range that does not block the exposure light required for development), the content of carbon nanotubes in the second reinforcing layer 50 (e.g., the mass of carbon nanotubes per unit area of ​​the film) can be increased compared to the protective film 10. As a result, the strength of the second reinforcing layer 50 is improved, and the impact resistance of the protective film 10 is also improved.

[0204] The manufacturing method of the second embodiment may also include, before step P1: the step of manufacturing the protective film support as described in the first embodiment, and the step of manufacturing the protective film.

[0205] The protective film assembly 110 can be used for a dust cover in the same way as the protective film assembly 100 of the first embodiment.

[0206] (Effects of the second implementation method)

[0207] The protective film assembly according to the second embodiment can achieve the same effect as the protective film assembly of the first embodiment. Furthermore, since the protective film assembly of the second embodiment has a second reinforcing layer 50 on the second protective film surface 12 side, the protective film 10 is further reinforced, and the impact resistance of the protective film assembly 110 is further improved.

[0208] In the protective film assembly of the second embodiment, the area where the second reinforcing layer 50 is disposed is also the area where the protective film 10 overlaps with the support 30 in a top view of the protective film assembly 110, therefore the transparency of the second reinforcing layer 50 can be low. Thus, the options for materials that can be used in the second reinforcing layer 50 are expanded, and the content of reinforcing material in the second reinforcing layer 50 (e.g., the mass of reinforcing material per unit area of ​​the film) can be increased compared to the protective film 10. As a result, the strength of the second reinforcing layer 50 is improved, and the impact resistance of the protective film assembly 110 is also improved. Since the area where the second reinforcing layer 50 is disposed is the edge portion 13 of the protective film 10, the edge portion 13 of the protective film 10 can be protected more effectively.

[0209] In the protective film assembly of the second embodiment, the second reinforcing layer 50 is not an adhesive layer or bonding agent layer, but is formed of a material with excellent heat resistance, so it is not easily decomposed even when exposed to high-energy light such as EUV. Therefore, even with the second reinforcing layer 50 provided as in the protective film assembly of the second embodiment, the generation of foreign matter can be suppressed.

[0210] According to the manufacturing method of the second embodiment, a protective film assembly with further improved impact resistance can be manufactured.

[0211] [Variations on the implementation method]

[0212] It should be noted that the present invention is not limited to the above embodiments, and all modifications and improvements within the scope of achieving the purpose of the present invention are included in the present invention.

[0213] Reference Figures 1-4 An example of the protective film assembly of the first and second embodiments has been described, but the protective film assembly of the present invention is not limited to an example of these protective film assemblies.

[0214] The protective film assembly of the present invention can be implemented in various ways as long as it achieves the effect of the protective film assembly using the protective film of the first embodiment and the second embodiment described above. The shape and size of each part of each component constituting the protective film assembly of the first embodiment and the second embodiment can be determined, for example, based on the size of the photomask (not shown in the figure) when using the protective film assembly of the first embodiment and the second embodiment.

[0215] In addition, for example, Figures 1-4The protective film 10 and the support 30 of the protective film assemblies 100 and 110 shown are both formed in a rectangular shape. The protective film assembly of the present invention is not limited to this and can be formed in any shape such as circular, elliptical, or polygonal.

[0216] In addition, Figure 3 and Figure 4 In the protective film assembly 110 shown, the second reinforcing layer 50 is disposed at the edge 13 of the protective film 10, but the protective film assembly of the present invention is not limited to such an example. For example, the second reinforcing layer 50 may not only be disposed at the edge 13 of the protective film 10, but may also protrude to the area of ​​the support surface 34 where the protective film 10 is not adhered. The second reinforcing layer 50 may also protrude to the side of the support surface 34, covering the side of the protective film 10. By covering the side of the protective film 10 with the second reinforcing layer 50, it is possible to prevent the protective film 10 from peeling off from the support 30. The second reinforcing layer 50 may protrude from the edge 13 of the protective film 10 and contact part or all of the portion of the support surface 34 exposed where the first reinforcing layer 40 is not disposed.

[0217] Additionally, for example, in Figures 1-4 In the protective film assemblies 110, 110 shown, the edge portion 13 of the protective film 10 is fixed by a first reinforcing layer 40 disposed on a portion of the support surface 34 of the support body 30. The protective film assembly of the present invention is not limited to this example; the edge portion 13 of the protective film 10 may also be fixed by the first reinforcing layer 40 disposed on the entire surface of the support surface 34 of the support body. For example, not only the area supporting the protective film 10, but also the area of ​​the support surface 34 where the protective film 10 is not adhered may be fixed by the first reinforcing layer 40. This protruding first reinforcing layer 40 may be in contact with a second reinforcing layer 50 as described above. By configuring the first reinforcing layer 40 and the second reinforcing layer 50 in such a manner that they are in contact with each other, the edge portion 13 of the protective film 10 is sandwiched between the first reinforcing layer 40 and the second reinforcing layer 50, further enhancing the effect of reinforcing the protective film 10.

[0218] Example

[0219] The present invention will be further described in detail below with reference to specific embodiments. The present invention is not limited to these embodiments.

[0220] [Example 1]

[0221] Reference Figure 5A and Figure 5B The fabrication of the protective film assembly of Example 1 will be described. Figure 5A The diagram schematically shows a top view of the protective membrane assembly WK from the protective membrane 10W side. Figure 5B The diagram schematically shows a side view of the protective membrane assembly WK viewed from the side along the short side.

[0222] An acrylic sheet (2cm×5cm×2mm) with an opening 32W of 1cm×1cm was prepared as the support body 30W. The opening 32W is located near the center of the first end E1 side of the support body 30W.

[0223] In addition, a vertically oriented MWCNT was prepared as the first reinforcing layer 40W. The MWCNT was formed on a SUS substrate BP with a height of 0.25 mm.

[0224] Next, on the support surface of the support body 30W, the substrate BP is fixed to the edge of the opening 32W (here, a region 5 mm wide from the edge of the opening 32W) using double-sided adhesive tape, which serves as an adhesive member 20W. Thus, a support body 30W (protective film support) having a first reinforcing layer 40W is manufactured.

[0225] Next, SWCNTs were dispersed in water to prepare an SWCNT dispersion. The SWCNT dispersion was filtered using a membrane filter, forming a protective membrane 10W on the membrane filter consisting solely of SWCNTs. The entire membrane filter was then submerged in water, separating the protective membrane 10W, consisting solely of SWCNTs, onto the water surface.

[0226] A support 30W having a first reinforcing layer 40W is submerged in water from which the protective membrane 10W has been separated. The support 30W is then lifted from the water, and the protective membrane 10W is retrieved as a self-supporting membrane, covering the opening 32W and supported on the first reinforcing layer 40W. Thus, a protective membrane assembly WK is manufactured. In the protective membrane assembly WK, the protective membrane 10W (CNT self-supporting membrane) is integrated with the support 30W and reinforced by the first reinforcing layer 40W.

[0227] [Reference Example 1]

[0228] For the protective film assembly of Reference Example 1, in the fabrication of the protective film assembly of Example 1, a dispersion of MWCNTs was pre-dropped onto the outer periphery of the opening 32W and dried, and MWCNTs oriented in the horizontal direction were set as the first reinforcing layer 40W. Otherwise, the fabrication was carried out in the same manner as in Example 1.

[0229] [Comparative Example 1]

[0230] Regarding the protective film assembly of Comparative Example 1, the protective film assembly of Example 1 was fabricated in the same manner as Example 1, except that the first reinforcing layer 40W was not provided on the support 30W, and the protective film 10W was picked up as a self-supporting film to cover the opening 32W.

[0231] [Comparative Example 2]

[0232] In the case of the protective film assembly of Comparative Example 2, the SUS substrate BP without the first reinforcing layer 40W was glued to the support 30W using the adhesive member 20W (double-sided tape) to pick up the protective film 10W as a self-supporting film so as to be supported on the substrate BP. Otherwise, it was manufactured in the same way as in Example 1.

[0233] [Impact Resistance Evaluation]

[0234] The evaluation method is carried out through the steps described below. Figure 6 The method of evaluating the strength of a protective membrane using a protective membrane assembly WK is schematically illustrated, showing the state of the protective membrane assembly WK as viewed laterally along the short side. For example... Figure 6 As shown, firstly, the protective film assembly WK is placed on a horizontal platform T. A stop block S is positioned to contact the second end E2 side of the protective film assembly WK. Next, without allowing the second end E2 side of the protective film assembly WK to slide, the first end E1 side is lifted, and a 1mm thick plate-shaped member B is inserted between the platform T and the protective film assembly WK. Next, the plate-shaped member B is pulled out horizontally H, allowing the protective film assembly WK to fall. After the protective film assembly WK falls, the condition of the protective film 10W is visually inspected to confirm whether it is damaged. If it is not damaged, two 1mm thick plate-shaped members B are stacked together, and the two plate-shaped members B are pulled out horizontally H, allowing the protective film assembly WK to fall. This operation is repeated until the protective film 10W is damaged. The maximum height from which the protective film 10W falls without damage is used to evaluate the impact resistance of the protective film 10W. It should be noted that this maximum height corresponds to the maximum number of plate-shaped components B when stacked with a thickness of 1 mm. The impact resistance evaluation of the 10W protective film was conducted by performing the above-described tests three times, and the average value of the three tests was taken. The impact resistance evaluation results of the protective film assemblies of Example 1, Reference Example 1, Comparative Example 1, and Comparative Example 2 are shown in Table 1.

[0235]

[0236] As shown in Table 1, by distributing a first reinforcing layer between the protective film and the support, the protective film of Example 1 is less prone to breakage compared to the protective films of Comparative Examples 1 and 2, which do not have the first reinforcing layer, and the impact resistance of the protective film assembly is improved. In the protective film assembly of Example 1, since the MWCNTs in the first reinforcing layer are oriented vertically, it exhibits superior impact resistance compared to the protective film assembly of Reference Example 1, which has a first reinforcing layer with MWCNTs oriented horizontally. Furthermore, since the first reinforcing layer is formed of carbon nanotubes, it has excellent heat resistance, and therefore is not easily decomposed even when irradiated with high-energy light such as EUV.

Claims

1. A protective film assembly comprising: Protective film A support having a frame portion and an opening surrounded by the frame portion, and supporting the protective film, and The first reinforcing layer of the protective film is enhanced. The frame portion has a supporting surface opposite to the protective film. The protective film has a first protective film surface opposite to the support and a second protective film surface opposite to the first protective film surface. The first reinforcing layer is located in the area where the protective film overlaps with the support when viewed from above, and is disposed on the side of the first protective film and between the protective film and the support. The first reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. When the first reinforcing layer contains carbon nanotubes, the carbon nanotubes in the first reinforcing layer are oriented in a vertical direction relative to the support surface of the frame portion.

2. The protective film assembly according to claim 1, wherein, The protective film is an inorganic film or an organic film.

3. The protective film assembly according to claim 1, wherein, The protective film contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

4. The protective film assembly according to claim 1, wherein, The protective film contains carbon nanotubes.

5. The protective film assembly according to any one of claims 1 to 4, wherein, The material of the protective film is the same as that of the first reinforcing layer.

6. The protective film assembly according to any one of claims 1 to 4, further comprising a second reinforcing layer disposed on the surface side of the second protective film.

7. The protective film assembly according to claim 6, wherein, The second reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

8. The protective film assembly according to claim 7, wherein, The second reinforcing layer comprises carbon nanotubes. The carbon nanotubes in the second reinforcing layer are oriented in a parallel direction relative to the supporting surface of the frame.

9. A protective film support for supporting a protective film, The protective film support has a frame portion and an opening surrounded by the frame portion. The frame portion has a support surface that is opposite to the protective film when supporting the protective film. A first reinforcing layer is disposed on the outer periphery of the opening and on the support surface of the frame. The first reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride. When the first reinforcing layer contains carbon nanotubes, the carbon nanotubes in the first reinforcing layer are oriented in a vertical direction relative to the support surface of the frame portion.

10. A method for manufacturing a protective film assembly, comprising manufacturing a protective film assembly using the protective film support of claim 9, the method comprising: The process of attaching the protective film to the support surface side of the frame portion in a manner that covers the opening and is supported by the first reinforcing layer.

11. The method for manufacturing the protective film assembly according to claim 10, wherein, Before the step of attaching the protective film to the protective film support, the procedure includes: depositing a second reinforcing layer on a second protective film surface opposite to the first protective film surface opposite to the protective film support. The process of configuring the second reinforcing layer is to configure the second reinforcing layer at the position where the protective film, the protective film support, and the first reinforcing layer overlap when the protective film is viewed from above after it has been pasted onto the protective film support.

12. The method for manufacturing the protective film assembly according to claim 10, further comprising: The process of distributing a second reinforcing layer in a region on the second protective film surface opposite to the first protective film surface opposite to the protective film support, wherein the region is the area where the protective film and the protective film support overlap when viewed from above.

13. The method for manufacturing the protective film assembly according to claim 11 or 12, wherein, The second reinforcing layer contains one or more materials selected from carbon nanotubes, graphene, graphite, diamond-like carbon, amorphous carbon, silicon, silicon carbide, silicon nitride, and boron nitride.

14. The method for manufacturing the protective film assembly according to claim 13, wherein, The second reinforcing layer comprises carbon nanotubes. The second reinforcing layer is formed such that the carbon nanotubes in the second reinforcing layer are oriented in a parallel direction relative to the surface of the protective film.

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