CrN/CrAlN protective coating capable of resisting high temperature corrosion in wide temperature range and preparing method

A protective coating, high temperature resistance technology, applied in the direction of coating, metal material coating process, ion implantation plating, etc., to achieve the effect of improving high temperature corrosion resistance, protecting low temperature oxidation and hot corrosion, and having a simple structure

Inactive Publication Date: 2007-09-12
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although there are preliminary studies on the high temperature oxidation behavior of Cr-Al-N coating systems, there is...

Method used

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  • CrN/CrAlN protective coating capable of resisting high temperature corrosion in wide temperature range and preparing method
  • CrN/CrAlN protective coating capable of resisting high temperature corrosion in wide temperature range and preparing method
  • CrN/CrAlN protective coating capable of resisting high temperature corrosion in wide temperature range and preparing method

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Experimental program
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Embodiment 1

[0021] The surface will be pre-treated by sandblasting, and the size will be 10×20×2mm 3 Ti 3 Put the Al-based alloy substrate into the vacuum coating equipment, and evacuate until the background vacuum degree is 4×10 -4 After Pa, the substrate is heated to 300°C. Open the intake valve to fill in 12SCCM of nitrogen and 8SCCM of argon, adjust the vacuum degree to 0.5Pa by adjusting the opening and closing of the gate valve, and then turn on the DC power connected to the Cr target, at a power density of 4.2W / cm 2 A single layer of CrN layer was sputtered for 5 hours, and the thickness of the CrN layer was 8 μm. Then turn on the DC power connected to the Al target, and co-sputter the Cr-Al-N layer with the Cr target, and the thickness of the Cr-Al-N layer is 8 μm. During the sputtering process, the power density of the Cr target and the Al target appears in the following four pairs: 4.2 / 4.2, 3.0 / 4.2, 2.1 / 4.2, 1.5 / 4.2. And the sputtering time of each power density pairing form...

Embodiment 2

[0023] Will be surface pre-treated, size 10×20×2mm 3 Put the K38G alloy substrate into the vacuum coating equipment, and evacuate until the background vacuum degree is 4×10 -4 After Pa, the substrate is heated to 250°C. Open the intake valve and fill with 8SCCM of nitrogen and 12SCCM of argon, adjust the vacuum degree to 0.2Pa by adjusting the opening and closing of the gate valve, and then turn on the DC power supply connected to the Cr target, at a power density of 2.1W / cm 2A single layer of CrN layer was sputtered for 10 hours, and the thickness of the CrN layer was 16 μm. Then turn on the DC power connected to the Al target, and co-sputter the Cr-Al-N layer with the Cr target, and the thickness of the Cr-Al-N layer is 10 μm. During the sputtering process, the power density of the Cr target and the Al target appears in the following four pairs: 4.2 / 4.2, 3.0 / 4.2, 2.1 / 4.2, 1.5 / 4.2. And the sputtering time of each power density pairing form is 1h, 3h, 5h, 7h respectively. ...

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Abstract

This invention relates to a CrN/CrAlN anti-hot corrosion protection coating in a wide temperature sphere and its preparation method, which applies a mode of DC reaction cosputter to Cr and Al targets to get a CrN/CrAlN coating, in which, the chip temperature is room temperature-300deg.C, Ar and N2 are controlled by mass flowmeter, the flow is 6-20SCCM and 6-20SCCM, the working air pressure is 0.1-0.8Pa, Al content in the coating is controlled by adjusting the power ratio of Cr and Al targets, and 0-150V base negative bias voltage is applied on the base to increase the binding force between the coating and the base, the inner layer of the coating is CrN, the outer is Cr-Al-N with grads distributed Al, and the coating forms a Cr2O3 film with solid solution Al after being oxidized in 800-900deg.C and forms Al oxidation film with rich Al over 1000deg.C and the CrN/CrAlN coating is very good at anti-hot corrosion from hot corrosion experiment.

Description

technical field [0001] The invention belongs to surface engineering technology, in particular to a CrN / CrAlN protective coating resistant to high temperature corrosion in a wide temperature range and a preparation method thereof. Background technique [0002] The original idea of ​​the present invention comes from the concept of the high-temperature corrosion-resistant intelligent coating first proposed by Professor Nicholls of the United Kingdom. That is, in an industrial high-temperature corrosive environment, the coating function can optimally respond or adjust to the environment in a quasi-intelligent way, so that a single coating can resist multiple types of corrosion in a wide temperature range or in different media. So far, systems clearly defined as smart coatings include three categories. Document 1: In the material world (Mater.World 4, 19, (1996)), Professor Nicholls proposed a MCrAlY (M=Ni or Co+Ni) intelligent coating system with a chemical composition gradient...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/54
Inventor 李美栓朱明周延春
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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