Manufacturing method for CVD (Chemical Vapor Deposition) diamond/diamond-like composite coating tool with complex shape

A complex shape and composite coating technology, which is applied in the direction of metal material coating process, coating, superimposed layer plating, etc., can solve the problem of uneven coating thickness on the surface of the tool, affecting the service life of the coated tool, and NCD film Stress and other problems, to achieve excellent wear resistance and anti-friction and self-lubricating properties, excellent adhesion strength, smooth and flat surface quality effect

Active Publication Date: 2012-08-29
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this technology still has certain deficiencies
First of all, although the in-situ deposition of NCD film on the surface of the diamond coating improves the surface quality of the coating to a certain extent, the defects of the large internal stress of the NCD film itself still exist, which may easily cause the film to peel off during processing and affect the coating. tool life
Secondly, when using the hot wire CVD method to deposit a diamond film on the

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] A CVD diamond / diamond-like coating was deposited on the surface of a cemented carbide (YG6) complex-shaped integral milling cutter for high-precision graphite electrode processing. The diameter of the cutter is 8mm, the blade length is 40mm, and the length is 100mm. Take the following steps:

[0024] In the first step, the cutting edge area of ​​the cemented carbide graphite milling cutter is placed in the Murakami solution for 30 minutes of ultrasonic cleaning, so that the tungsten carbide particles on the surface of the substrate are broken and the surface is roughened. The components of Murakami solution are potassium hydroxide (KOH), potassium ferricyanide (K 3 Fe(CN) 6 )) and water (H 2 O), its mass ratio is 1:1:10. Subsequently, the tool was taken out and washed with water, and then etched in a Caro mixed acid solution for 1 minute to remove the cobalt element on its surface. The composition of Caro's acid solution is concentrated sulfuric acid (H 2 SO 4 ) a...

Embodiment 2

[0034] A CVD diamond / diamond-like coating is deposited on the surface of a cemented carbide (YG6) PCB milling cutter for edge milling of a printed circuit board. The cutter diameter is 6mm, the blade length is 35mm, and the length is 80mm. Take the following steps:

[0035] The first step adopts the same process method as in Example 1 to process the blade portion of the PCB milling cutter;

[0036] In the second step, put the pretreated PCB milling cutter into the hot wire CVD reaction chamber, and perform nucleation for half an hour (acetone / hydrogen flow rate 70 / 220sccm, boron-carbon atomic ratio 3200:1ppm, reaction pressure 18Torr, bias current 3.2 A); then the reaction gas pressure is increased to 28 Torr, the bias current is reduced to 3.0A, and the film growth stage is carried out for 7 hours, and a layer of MCD film with a grain size of 1-2 μm is deposited on the surface of the milling cutter;

[0037] The third step is to increase the flow rate of acetone to 130sccm, ...

Embodiment 3

[0044] A CVD diamond / diamond-like coating was deposited on the surface of a cemented carbide integral single-edged milling cutter for processing carbon fiber composite materials. The diameter of the cutter is 5 mm, the blade length is 28 mm, and the length is 76 mm. Take the following steps:

[0045] The first step adopts the same process method as in Example 1 to process the blade portion of the single-edged milling cutter;

[0046] In the second step, put the pretreated single-edged milling cutter into the hot wire CVD reaction chamber, and perform nucleation for half an hour (acetone / hydrogen flow rate 80 / 210sccm, boron-carbon atomic ratio 3000:1ppm, reaction pressure 18.5Torr, bias current 3.0A); then the reaction gas pressure was increased to 35Torr, the bias current was reduced to 2.8A, and the film growth stage was carried out for 8 hours, and a layer of MCD film with a grain size of 1-2 μm was deposited on the surface of the milling cutter;

[0047] The third step is ...

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Abstract

The invention discloses a manufacturing method for a CVD (Chemical Vapor Deposition) diamond/diamond-like composite coating tool with a complex shape. The manufacturing method comprises the steps as follows: depositing a layer of MCD (Micro Crystalline Diamond) film on the surface of the tool by a hot wire CVD method, and generating ion bombardment by negative bias in the depositing process so as to ensure that the surface of the MCD film is smooth; and continuously depositing a layer of DLC (Diamond-like Carbon) film, carrying out ion bombardment on the tool surface coated with the MCD film by positive and negative pulse ion power so as to remove impurities on the tool surface in the initial period, and removing the sharp crystalline grain edge of the coating surface to enhance the flatness of the coating and improve the surface activity of the coating so as to achieve the effect of enhancing the interlayer adhesion strength. Due to the manufacturing method, the surface of the integrated hard alloy tool with the complex shape can be deposited to obtain the CVD diamond/diamond-like composite coating with excellent film-based adhesion strength, surface wear and friction resistance and self lubricating property, and the composite coating also has the characteristics of low internal stress, smooth and flat surface, uniform thickness and the like.

Description

technical field [0001] The invention relates to a preparation method of a CVD diamond / diamond-like composite coating tool, in particular to a CVD diamond / diamond-like composite coating that can achieve extremely high film-base adhesion strength on the outer surface of a complex-shaped monolithic hard alloy tool. Coating preparation process. Background technique [0002] Chemical vapor deposition (Chemical Vapor Deposition, CVD) diamond film has many excellent properties close to natural diamond, such as high hardness, large elastic modulus, low friction coefficient, strong wear resistance and stable surface chemical properties. The preparation of CVD diamond film is not restricted by the shape of the substrate, and can be directly deposited on the surface of complex-shaped substrates. Therefore, it is very suitable as a wear-resistant, anti-friction and protective coating material for carbide monoliths with complex shapes. The outer surface of the tool can achieve the purpo...

Claims

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Application Information

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IPC IPC(8): C23C28/04C23C16/44C23C16/27C23C14/35C23C14/06
Inventor 沈彬孙方宏阮华权顾宝龙张志明
Owner SHANGHAI JIAO TONG UNIV
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