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Preparation of high-hardness diamond-like multi-layer film

A diamond thin film and multi-layer thin film technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problems of reducing the hardness of the film, reducing the hardness and elastic modulus of the diamond-like carbon (DLC) film, etc. Achieve the effect of excellent tribological performance and wide application space

Inactive Publication Date: 2008-11-05
SOUTHWEST JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These methods reduce the internal stress of the diamond-like carbon (DLC) film to varying degrees, but element doping also reduces the hardness and elastic modulus of the diamond-like carbon (DLC) film to varying degrees, and thermal annealing can also lead to graphite in the film. to reduce the hardness of the film

Method used

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  • Preparation of high-hardness diamond-like multi-layer film

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Embodiment 1-7

[0020] The concrete steps of embodiment 1-7 of the present invention are:

[0021] The invention discloses a method for preparing a high-hardness diamond-like multilayer film, the steps of which are as follows: firstly cleaning a base body by sputtering, and then depositing a diamond-like film. The method for depositing a diamond-like carbon film is a magnetic filter cathodic vacuum arc deposition method, and its specific method is:

[0022] Close the vacuum chamber of the magnetically filtered cathodic vacuum arc deposition equipment and pump down to 10 -3 Pa, turn on the graphite cathode arc source, and apply a negative bias voltage of -50V to -200V on the substrate material to deposit a diamond-like carbon film on the substrate surface; 99.99% high-purity argon gas, the control cycle is 120-600 seconds, the time for feeding high-purity argon gas is 10%-50% of the control cycle, and the argon pressure in the vacuum chamber is 0.01-0.1Pa during ventilation; close the high-pu...

Embodiment 8

[0026] This embodiment is basically the same as Embodiment 1, the only difference is that after the sputtering cleaning is completed, a titanium transition layer with a thickness of 120-150 nm is deposited on the base material by the magnetic filter cathodic vacuum arc deposition method, and then a diamond-like carbon film is deposited. .

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Abstract

The invention discloses a preparation method of a multilayer diamond-like film with high hardness, which comprises the following steps: a substrate is sputter cleaned, the diamond-like film is deposited by a depositing method with magnetic filtering and cathode vacuum arc, and the depositing method comprises steps of closing a vacuum chamber, vacuumizing the vacuum chamber to the pressure of 10<-3> Pa, turning on a pot lead cathode arc source, exerting negative bias voltage from minus 50 V to minus 200 V on the substrate and simultaneously and periodically letting in argon of 99.99 percent; furthermore, a control period lasts for 120 to 600 seconds, the time for letting in the argon is 10 to 50 percent of the control period, and the argon pressure in the vacuum chamber during argon inletting is 0.01 to 0.1 Pa; time for shutting off the argon is 90 to 50 percent of the control period, and the vacuum degree of the vacuum chamber at the time is 10<-4> to 10<-3> Pa; the number of the control periods is 3 to 50. The preparation method of the multilayer diamond-like film with high hardness has simple technique, low cost, produced films with strong bonding force, high hardness, large thickness, small stress and excellent mechanical and tribology performance; as well as wide application space in the industrial application field.

Description

technical field [0001] The invention relates to a method for preparing a diamond-like film on the surface of a substrate. Background technique [0002] Diamond-like carbon film (DLC), also known as amorphous carbon film, is usually amorphous or contains some nanocrystals. It is a large category similar to diamond in nature, with sp 2 bond (C atom bonding structure in graphite) and sp 3 A metastable amorphous carbon film with a carbon atom space network structure hybridized with bonds (the C atom bonding structure in the diamond structure). As a new type of hard film material, diamond-like carbon film has a series of excellent properties, such as low friction coefficient, high hardness, high elastic modulus, high wear resistance, high thermal conductivity, high resistivity, good optical transparency, Chemical stability and corrosion resistance, etc., can be widely used in machinery, electronics, optics, thermals, acoustics, medicine and other fields. DLC film preparation t...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/22
Inventor 冷永祥孙鸿黄楠石志峰
Owner SOUTHWEST JIAOTONG UNIV
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