Micro-mechanics comb-typed gate capacitance top having electric tuning function

Abstract

The invention discloses a micro-mechanics comb-typed gate capacitance top having an electric tuning function, and belongs to the field of micro-mechanics inertial sensors. An electric tuning variable area capacitor is distributed in a driving or detecting direction of the top; in each unit capacitor of the electric tuning variable area capacitor, the positive surface of a movable electrode is parallel to the positive surface of a fixed electrode, wherein the positive surface of the movable electrode is rectangular and the positive surface of the fixed electrode is triangular or saw tooth-shaped, or the positive surface of the movable electrode is triangular or saw tooth-shaped and the positive surface of the fixed electrode is rectangular, and the triangular positive surface and a long edge of the rectangular positive surface are overlapped. The top tunes a resonance frequency in the driving or detecting direction by the electric tuning variable area capacitor distributed in the driving or detecting direction of the top, so that the top devices in the same batch have similar properties; and the resonance frequencies in the driving and detecting directions are close or even equal, and the sensitivity of the top is greatly improved.

Description

technical field The invention relates to a micromechanical gyroscope and belongs to the field of micromechanical inertial sensors. Background technique A gyroscope is a sensor used to measure angular velocity and angular displacement, and is an important part of an inertial sensing unit. Since the first demonstration of the earth's rotation phenomenon by using the fixed axis of a high-speed rotating rigid body, the gyroscope has been developed for more than 100 years. Rotor gyroscopes, optical gyroscopes, and micromechanical gyroscopes have come out one after another. The sensitive mechanism of the vibrating micromechanical gyroscope is the Coriolis force, which is proportional to the rotation speed of the object, and the rotation speed of the object can be obtained by detecting the Coriolis force. There are many methods for detecting Coriolis force in the micromechanical gyro structure, among which capacitance detection is the most popular one at present, and there are tw...

AI Technical Summary

Problems solved by technology

However, the traditional comb-gate capacitor gyroscope adopts a variable-area capacitor structure. The existing variable-area capacitor structure fails to adjust the resonant frequency of the comb-gate capacitor gyro in the driving or detection direction, making the comb-gate The performance of the capacitor gyroscope cannot be effectively improved

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