Micro-mechanics comb-typed gate capacitance top having electric tuning function

An electrical tuning and micro-mechanical technology, applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, measuring device, etc., can solve the adjustment of the resonant frequency of the comb-shaped capacitive gyroscope, and the performance of the comb-shaped capacitive gyroscope cannot be effectively obtained. to improve the sensitivity of the

Active Publication Date: 2012-02-15
ZHEJIANG UNIV
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional comb-gate capacitor gyroscope adopts a variable-area capacitor structure. The existing variable-area capacitor structure fails to adjust the resonant frequency of the comb-gate capacitor gyro in the driving or detection direction, making the comb-gate The performance of the capacitor gyroscope cannot be effectively improved

Method used

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  • Micro-mechanics comb-typed gate capacitance top having electric tuning function
  • Micro-mechanics comb-typed gate capacitance top having electric tuning function
  • Micro-mechanics comb-typed gate capacitance top having electric tuning function

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Embodiment Construction

[0030] Such as Figure 1 to Figure 12 As shown, in the electrical tuning capacitor of the micromachined comb grid capacitor gyro with electrical tuning function in the present invention, the front surface of the unit movable electrode 1 refers to the surface facing the unit fixed electrode 2, and the front surface of the unit fixed electrode 2 The surface refers to the surface facing the unit movable electrode 1 . The front surface of each unit movable electrode 1 and the front surface of unit fixed electrode 2 are parallel to each other.

[0031] Such as Figure 1 to Figure 8 As shown, when the front surface of the unit movable electrode 1 is rectangular and the front surface of the unit fixed electrode 2 is triangular, the triangular front surface of the unit fixed electrode 2 only intersects with one long side of the rectangular front surface of the unit movable electrode 1. When the front surface of the unit movable electrode 1 is rectangular and the front surface of the...

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Abstract

The invention discloses a micro-mechanics comb-typed gate capacitance top having an electric tuning function, and belongs to the field of micro-mechanics inertial sensors. An electric tuning variable area capacitor is distributed in a driving or detecting direction of the top; in each unit capacitor of the electric tuning variable area capacitor, the positive surface of a movable electrode is parallel to the positive surface of a fixed electrode, wherein the positive surface of the movable electrode is rectangular and the positive surface of the fixed electrode is triangular or saw tooth-shaped, or the positive surface of the movable electrode is triangular or saw tooth-shaped and the positive surface of the fixed electrode is rectangular, and the triangular positive surface and a long edge of the rectangular positive surface are overlapped. The top tunes a resonance frequency in the driving or detecting direction by the electric tuning variable area capacitor distributed in the driving or detecting direction of the top, so that the top devices in the same batch have similar properties; and the resonance frequencies in the driving and detecting directions are close or even equal, and the sensitivity of the top is greatly improved.

Description

technical field [0001] The invention relates to a micromechanical gyroscope and belongs to the field of micromechanical inertial sensors. Background technique [0002] A gyroscope is a sensor used to measure angular velocity and angular displacement, and is an important part of an inertial sensing unit. Since the first demonstration of the earth's rotation phenomenon by using the fixed axis of a high-speed rotating rigid body, the gyroscope has been developed for more than 100 years. Rotor gyroscopes, optical gyroscopes, and micromechanical gyroscopes have come out one after another. The sensitive mechanism of the vibrating micromechanical gyroscope is the Coriolis force, which is proportional to the rotation speed of the object, and the rotation speed of the object can be obtained by detecting the Coriolis force. [0003] There are many methods for detecting Coriolis force in the micromechanical gyro structure, among which capacitance detection is the most popular one at p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01C19/5656G01C19/5719
Inventor 胡世昌金仲和张霞朱辉杰
Owner ZHEJIANG UNIV
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