The invention relates to the technical field of
semiconductor devices, in particular to a GaN HEMT device and a manufacturing method thereof. According to the invention, a multi-channel
heterojunction epitaxial structure is adopted to prepare the device, current
coupling among multiple channels is realized by forming a gate structure and a GaN secondary epitaxial technology, the on-resistance of the device is remarkably reduced, and meanwhile, the turn-off / turn-on
voltage of a side wall channel and a bottom groove channel is unified through an n-type GaN intermediate layer formed by secondary
epitaxy, so that the on-resistance of the device is improved. The problem of asynchronous turn-off / turn-on of the gate region is avoided, and the
gate control capability of the device is effectively improved. In addition, by changing the
doping concentration of the n-type GaN intermediate layer, the
threshold voltage of the device can be regulated and controlled in a
large range. According to the characteristics, the GaN HEMT
transistor with high
conduction current density, low
subthreshold slope and adjustable
threshold voltage can be realized.