Biosensor based on tunneling field effect transistor and preparation method of biosensor

Abstract

The invention provides a biosensor based on a tunneling field effect transistor and a preparation method of the biosensor. The preparation method of the biosensor at least comprises the steps of firstly, preparing a tunneling field effect transistor as a converter; and then carrying out activated modification on the surface of a channel in the tunneling field effect transistor by adopting a surface modification agent, wherein the step of preparing the tunneling field effect transistor specifically comprises the procedures of providing an SOI (Silicon On Insulator) substrate, wherein the SOI substrate comprises a top layer silicon, a buried oxygen layer and a bottom layer silicon; forming a gate dielectric layer on the surface of the top layer silicon; carrying out ion injection on the top layer silicon at two sides of the gate dielectric layer by adopting an ion injection process to form a source electrode and a leak electrode, defining the top layer silicon of the gate dielectric layer, which is not subjected to the ion injection, as a channel; and forming a back gate on the surface of the bottom layer silicon. The tunneling field effect transistor provided by the invention is abrupt in sub-threshold slope, and is sensitive in change of charges on the surface of the channel, thereby enabling the biosensor to be capable of detecting a biomolecule at high sensitivity.

Description

technical field [0001] The invention relates to the technical field of biosensing, in particular to a biosensor based on a tunneling field effect transistor and a preparation method thereof. Background technique [0002] Biosensor is an interdisciplinary subject that combines biologically active materials (enzymes, proteins, DNA, antibodies, antigens, biofilms, etc.) with physical and chemical transducers. The method and monitoring method are also fast and micro-molecular methods at the molecular level of substances. In the future economic development, biosensing technology will be a new growth point between confidence and biotechnology. It has broad application prospects in researches such as protection, biotechnology, and biochips. [0003] Specifically, a biosensor (Biosensor) is an instrument that is sensitive to biological substances and converts its concentration into an electrical signal for detection. It is an analysis tool or system composed of immobilized biosen...

AI Technical Summary

Problems solved by technology

[0005] At present, the subthreshold slope of the traditional planar field effect transistor (FET) is relatively stable, which makes the device insensitive to the change of the channel surface charge and affects the performance of the biosensor.

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