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245results about "Magnetostrictive material selection" patented technology

Variable inductor type mems pressure sensor using magnetostrictive effect

A variable inductor type MEMS pressure sensor using a magnetostrictive effect comprises an inductor array unit and a capacitor unit. The inductor array unit includes a coil unit having a plurality of serially connected circular electrodes formed on a first substrate and a magnetostrictive material thin film corresponding one by one to the circular electrode formed on a second substrate opposite to the first substrate at a predetermined distance in parallel to form an inductor which has the magnetostrictive material thin film as a core of the coil unit for inducing change of magnetic permeability of the magnetostrictive thin film depending on external pressure to vary inductance of the inductor. The capacitor unit constitutes a LC resonant circuit with the inductor array unit to convert magnetic energy discharged in the inductor array unit into a voltage. The variable inductor type MEMS pressure sensor has an excellent resolution because it is more sensitive than a conventional piezoresistive or capacitance sensor, and is manufactured using a MEMS process technology exchangeable with a semiconductor process, thereby enabling miniaturization and a mass package process to reduce the cost of production.
Owner:MDT CORP

Magnetostrictive material and preparation method thereof

The invention provides a magnetostrictive material and a preparation method thereof. The composition of the magnetostrictive material is (Fe[]1-x]Gax)[100-y]REy, wherein 0.17<=x<=0.19, 0.01<=y<=0.2, and RE is selected from one or more of Tb, La, Sm, Dy, Lu, Ho, Er and Tm. The preparation method comprises the following steps: smelting the Fe Ga and RE prepared according to the composition requirements into a mother alloy cast ingot, preparing a mother alloy bar, putting the mother alloy bar and a <100>-oriented FeGa monocrystal seed in a directional solidification apparatus, vacuumizing the directional solidification apparatus, charging protective gas, heating to melt all the mother alloy bar and melt the upper part of the FeGa monocrystal seed, and drawing the molten material into a coolant along the lower part of the FeGa monocrystal seed to carry out directional solidification, wherein the temperature gradient is controlled at 1*10<5>-9*10<5> K / m, and the growth rate is 1000-20000 mm / hour. The magnetostrictive material prepared by the method is a <100>-oriented monocrystal material in which the RE elements are completely dissolved in the FeGa matrix; the saturated magnetic field is only 100-5000e, and the magnetostriction coefficient is up to 300-1500 ppm; and the magnetostrictive material has favorable comprehensive usability and wide application prospects.
Owner:BEIHANG UNIV
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