The invention discloses a growth method of
gallium oxide crystals, which is a horizontal
Bridgman method and specifically comprises the following steps: (1) putting
gallium and
gallium oxide into a
crucible, and putting
gallium oxide seed crystals into a
seed crystal tank of the
crucible; (2) putting the
crucible into a growth furnace, vacuumizing the growth furnace, introducing
inert gas, and heating the crucible to melt
gallium oxide, so that the
gallium oxide melt is in contact with the
seed crystal; (3) after the gallium
oxide is completely melted, sequentially carrying out
crystal growthprocesses of seed introducing, shoulder forming and isometric growth; and (4) after the
crystal growth is finished, cooling the
crystal, and taking out the gallium oxide crystal. According to the invention, gallium and gallium oxide are put into the crucible, and gallium oxide floats on a gallium solution and is separated from the crucible in the
crystal growth process, so that generated crystalsare prevented from being adhered to the crucible, the quality of the crystals is improved, and the crystals are easy to take out. Due to the existence of gallium,
oxygen released in the growth processof the gallium oxide crystal can be absorbed to generate gallium oxide, impurities cannot be introduced, and the crucible is protected from being oxidized.