Gradient type temperature field heating element

A heating element and temperature field technology, applied in electric furnace heating, crystal growth, furnace type, etc., can solve the problems of affecting the stability of the temperature field, increasing the cost of equipment and the difficulty of control, and simplifying operation, maintaining stability, and reducing costs. Effect

Inactive Publication Date: 2008-12-31
扬州华夏集成光电有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, in the pulling method of resistance heating (see Chemical Engineering Science2004, 59: 1437~1457), heat exchange method (see Journal of Crystal Growth 1979, 46: 601-606), temperature gradient method (see Journal of Crystal Growth 1998, 193: 123-126) and other crystal growth furnaces often use simple wave-type loop heating elements, which do not produce temperature gradients; in the multi-heating element pulling method, Bridgman method and double heating gradient method, although Using graphite or silicon-molybdenum materials to form multiple discrete heating elements to generate temperature gradients, but it greatly increases the cost of equipment and the difficulty of control, and also affects the stability of the temperature field

Method used

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  • Gradient type temperature field heating element

Examples

Experimental program
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Effect test

Embodiment 1

[0021] Such as figure 2 As shown in 1#, a heating cylinder with a radius of R=60mm and H=300mm is made of high-purity graphite resistance heating material. according to figure 1 The trend of the partition groove E is to slot the heating element, where: H A =50mm,H B =120mm,H C =50mm,H D = 40mm; T 1 =2.2mm, T 2 =2.5mm, T 3 = 4mm, T 4 =5mm, T 5 = 5 mm. The transition from section thickness T2 to T3 is a straight line. The prepared heating element is placed in the crystal growth furnace, the furnace is closed, vacuumized, and the temperature is raised after filling the gas. The temperature distribution of the crystal growth area is as follows: image 3 1# line in.

Embodiment 2

[0023] Such as figure 2 As shown in 2#, a heating cylinder with a radius of R=60mm and H=300mm is made of high-purity graphite resistance heating material. according to figure 1 The trend of the middle groove is to slot the heating element, among which: H A =50mm,H B =120mm,H C =50mm,H D = 40mm; T 1 =2.5mm, T 2 = 3mm, T 3 =4.5mm, T 4 =5mm, T 5 = 5mm. Wherein the transition from section thickness T2 to T3 is a concave line. The prepared heating element is placed in the crystal growth furnace, the furnace is closed, vacuumized, and the temperature is raised after filling the gas. The temperature distribution of the crystal growth area is as follows: image 3 Middle 2# line.

Embodiment 3

[0025] Such as figure 2 As shown in 3#, the high-purity graphite resistance heating material is used to make a heating cylinder with a radius of R=60mm and H=300mm. according to figure 1 The trend of the middle groove is to slot the heating element, among which: HA =50mm,H B =120mm,H C =50mm,H D = 40mm; T 1 =2.5mm, T 2 = 3mm, T 3 =4.5mm, T 4 =5mm, T 5 = 5mm. The transition from section thickness T2 to T3 is a straight line. The prepared heating element is placed in the crystal growth furnace, the furnace is closed, vacuumized, and the temperature is raised after filling the gas. The temperature distribution of the crystal growth area is as follows: image 3 Middle 3# line.

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Abstract

The invention relates to a gradient type temperature field heating element, in particular to a heating element which is applied in a crystal growing furnace and can effectively build an appropriate temperature gradient field, and the heating element belongs to the crystallization process technique field, and is mainly characterized in that a plurality of heating sheets with certain longitudinal-sectional and cross-sectional shapes are combined together reasonably to form one or a plurality of current paths, so as to produce different quantities of heat at parts with different resistance values, thereby certain temperature gradients can be produced in a growing zone; and the distribution of the temperature field can be adjusted flexibly through adjusting the cross-sectional shapes and heights of the heating sheets, The heating element only need one set of temperature control device when being used in the crystal growing furnace, thereby simplifying the operation, reducing the cost and also being favorable for keeping the stability of the temperature field, and the heating element is particularly applicable for crystal growing furnaces adopting descent methods, temperature gradient methods, resistance heating crystal pulling methods, Bridgman methods and heat exchange methods, and is also applied to other heat treatment devices needing the temperature gradient distribution.

Description

technical field [0001] The invention relates to a gradient temperature field heating element, in particular to a heating element capable of effectively establishing a suitable temperature gradient field applied in a crystal growth furnace, and belongs to the technical field of crystallization technology. Background technique [0002] A very important condition for growing high-quality crystals is to have a suitable temperature field. The temperature distribution in the growth system or the temperature gradients in the crystal, in the melt and at the solid-liquid interface have a decisive influence on the quality of the crystal. However, different crystals have different characteristics, and the main defects that need to be controlled are often different, so their requirements for temperature field conditions are naturally also different. Therefore, there is no strict criterion for the so-called suitable temperature field. Generally speaking, a large temperature gradient is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B35/00C30B15/14C30B11/00H05B3/62F27B14/14F27D11/02
Inventor 徐军曾金穗李红军董永军李明远林岳明
Owner 扬州华夏集成光电有限公司
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