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405results about "Furnace heating elements" patented technology

Magnetic rotation transmitting device, hermetic stirring unit, and electric furnace

In order to provide a magnetic rotation transmitting device capable of obtaining a large transmitting torque without using a large-sized permanent magnet, in an axial-type magnetic rotation transmitting device, which includes a driving rotation body having one or plural magnetic line(s) in which plural first magnets (10A) are disposed in a circumferential direction on a first disk (11A) at almost equal intervals, a drive source rotationally driving a drive shaft of the driving rotation body, and a driven rotation body having one or plural magnet line(s) in which second magnets (20A) of the same number as the first magnets (10A) are disposed in the circumferential direction on a second disk (21A) at almost equal intervals, symmetrically disposed to, and magnetically coupled with the driving rotation body with a magnetic coupling gap and, which utilizes a magnetic operation and which allows the driven rotation body to rotate by rotationally driving the drive shaft by means of the drive source, the first magnet (10A) has a N-magnetic pole portion and a S-magnetic pole portion, and an extended surface of a boundary surface between the N-magnetic pole portion and the S-magnetic pole portion approximately overlaps with a driving center line as being a rotation center line of the driving rotation body, the second magnet (20A) has the N-magnetic pole portion and the S-magnetic pole portion, and the extended surface of the boundary surface between the N-magnetic pole portion and the S-magnetic pole portion approximately overlaps with a driven center line as being the rotation center line of the driven rotation body, adjacent and facing surfaces of the first magnets (10A) adjacent to each other on the first disk (11A) are disposed so that magnetic pole faces having the same polarity make pairs, and adjacent and facing surfaces of the second magnets (20A) adjacent to each other on the second disk (21A) are disposed so that the magnetic pole faces having the same polarity make pairs.
Owner:MAGUNEO

Heat processing furnace and method of manufacturing the same

The object of the present invention is to reduce a frictional resistance which is generated between a support member and a heating resistor when the heating resistor is thermally expanded and thermally shrunk, whereby generation of a permanent deformation of the heating resistor caused by a residual stress thereof can be restrained, to thereby improve the durability. A heat processing furnace comprises: a processing vessel 3 capable of accommodating an object to be processed w and subjecting the object to be processed w to a heat process; a cylindrical heat insulation member 4 surrounding the processing vessel 3; a helical heating resistor 5 arranged along an inner peripheral surface of the heat insulation member 4; a support member 13 disposed on the inner peripheral surface of the heat insulation member 4 in parallel with an axial direction thereof, for supporting the heating resistor 5 at predetermined pitches along the axial direction; and a plurality of terminal plates 14 axially arranged on an outside of the heating resistor 5 at suitable intervals therebetween, the terminal plates 14 radially passing through the heat insulation member 4 so as to be extended outside. The support member 13 includes a base part 17 positioned on an inside of the heating resistor 5, and a plurality of support pieces 18 extending radially outward from the base part through spaces between adjacent portions of the heating resistor 5 so as to support the heating resistor 5, the support member 13 being formed to have a comb-like shape. An upper surface part of each of the support pieces 18 is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor 5 is moved upon a thermal expansion and a thermal shrinkage thereof.
Owner:TOKYO ELECTRON LTD

Magnetic rotation transmitting device, hermetic stirring unit, and electric furnace

In order to provide a magnetic rotation transmitting device capable of obtaining a large transmitting torque without using a large-sized permanent magnet, in an axial-type magnetic rotation transmitting device, which includes a driving rotation body having one or plural magnetic line(s) in which plural first magnets (10A) are disposed in a circumferential direction on a first disk (11A) at almost equal intervals, a drive source rotationally driving a drive shaft of the driving rotation body, and a driven rotation body having one or plural magnet line(s) in which second magnets (20A) of the same number as the first magnets (10A) are disposed in the circumferential direction on a second disk (21A) at almost equal intervals, symmetrically disposed to, and magnetically coupled with the driving rotation body with a magnetic coupling gap and, which utilizes a magnetic operation and which allows the driven rotation body to rotate by rotationally driving the drive shaft by means of the drive source, the first magnet (10A) has a N-magnetic pole portion and a S-magnetic pole portion, and an extended surface of a boundary surface between the N-magnetic pole portion and the S-magnetic pole portion approximately overlaps with a driving center line as being a rotation center line of the driving rotation body, the second magnet (20A) has the N-magnetic pole portion and the S-magnetic pole portion, and the extended surface of the boundary surface between the N-magnetic pole portion and the S-magnetic pole portion approximately overlaps with a driven center line as being the rotation center line of the driven rotation body, adjacent and facing surfaces of the first magnets (10A) adjacent to each other on the first disk (11A) are disposed so that magnetic pole faces having the same polarity make pairs, and adjacent and facing surfaces of the second magnets (20A) adjacent to each other on the second disk (21A) are disposed so that the magnetic pole faces having the same polarity make pairs.
Owner:MAGUNEO
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