U-shaped heating element of silicon tetrachloride hydrogenation furnace and manufacturing process thereof

A silicon tetrachloride, manufacturing process technology, applied in the direction of furnace heating element, metal material coating process, gaseous chemical plating, etc., can solve the problem of short service life, unsatisfactory use reliability, corrosion resistance of heating element and Erosion performance is not high, to achieve the effect of high carbon fiber content, prevent erosion and surface peeling
CN101541111AInactive Publication Date: 2009-09-23HUNAN NANFANG BOYUN NOVEL MATERIAL
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HUNAN NANFANG BOYUN NOVEL MATERIAL
Publication Date
2009-09-23
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a U-shaped heating element of a silicon tetrachloride hydrogenation furnace and a manufacturing process thereof. The U-shaped heating element of the silicon tetrachloride hydrogenation furnace consists of a green body, a matrix and a silicon carbide surface coating, wherein, the green body is prepared from 2D (two-dimensional) carbon fiber laminated fabric or quasi-3D (three-dimensional) carbon fiber needle felt with the weight not less than 50% of the total weight of the product; the matrix is composed of impregnated carbon and CVD-based (chemical vapor deposition) carbon, wherein, the content of the CVD-based carbon is not more than 30% of the total weight of the green body and the matrix; the material density of the heating element is higher than or equal to 1.3g / cm3; and the thickness of the silicon carbide surface coating is 10 to 100 mum. The U-shaped heating element of the silicon tetrachloride hydrogenation furnace has the advantages of high corrosion and erosion resistance, long service life and high reliability.
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Description

technical field

[0001] The invention relates to a U-shaped heating element of a hydrogenation furnace and a manufacturing process thereof, in particular to a U-shaped heating element of a carbon-carbon composite material silicon tetrachloride hydrogenation furnace and a manufacturing process thereof. Background technique

[0002] The hydrogenation furnace is the key equipment for the recycling of chlorosilane, and it is an important guarantee for high efficiency, energy saving, environment-friendly closed-loop production and high-purity polysilicon.

[0003] In 1955, Siemens successfully developed and utilized H 2 Reduced SiHCl 3 , Deposit and produce polysilicon on the silicon core heating element. Tail gas emitted from polysilicon production mainly contains SiH 4 、SiH 2 Cl 2 , hydrogen, hydrogen chloride and unreduced SiHCl 3 , these exhaust gases must be dealt with. The treatment method is mainly to use a hydrogenation furnace for hydrogenation reduction, so that t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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