The utility model discloses
polishing solution supply equipment, which relates to the technical field of
polishing solution production, and comprises an equipment box, a solution supply
assembly and a solution supplement
assembly, a cleaning
barrel is arranged in the equipment box, the solution supply
assembly for automatic solution supply of the equipment is arranged on the right side of the cleaning
barrel, and the solution supplement assembly is arranged on the right side of the cleaning
barrel. The liquid supply assembly comprises a liquid
medicine supply barrel, a
pressure sensor and a stirring rod, the
pressure sensor is arranged at the bottom of the liquid
medicine supply barrel, the stirring rod is installed in the liquid
medicine supply barrel through a motor, and the liquid supplementing assembly for automatic liquid supplementing of the equipment is arranged on the right side of the liquid medicine supply barrel. According to the
polishing solution supply equipment, a
cleaning agent and pure water are proportioned in the cleaning barrel to prepare a cleaning solution for equipment cleaning, the
chemical solution supply barrel is used for storing the proportioned polishing solution, and the stirring rod stirs to prevent the polishing solution from precipitating, so that the equipment has the functions of automatic solution supplementing, cleaning, PH value adjusting and the like, deposition can be reduced, and the cleaning efficiency is improved. Liquid is supplied to the polishing
machine in the
semiconductor industry, and manual intervention is effectively reduced.