This invention relates to the field of ultra-precision
polishing technology, specifically to an
ultrasonic cavitation microjet
polishing module for
polishing microstructures. The module includes an acoustic focusing
nozzle, a center-penetrating piezoelectric
transducer, an adaptive
acoustic impedance frequency
tracking system, and a liquid supply and
bubble nucleation system. The acoustic focusing
nozzle employs a variable cross-section acoustic amplitude rod structure, ensuring that the
standing wave antinodes and
nozzle outlet are
confocal, thus increasing
energy density. The piezoelectric
transducer has a ring structure with fluid flowing through its center, achieving efficient energy conversion. The frequency
tracking system adjusts the excitation frequency in real time to maintain
resonance. The liquid supply
system introduces
cavitation nuclei through a venturi tube, reducing the
cavitation threshold. This invention, through an acoustic-
fluid coupling mechanism, utilizes the dual effects of macroscopic
kinetic energy removal and microscopic
cavitation removal to solve the problems of traditional polishing techniques, such as difficulty in
processing high
aspect ratio microstructures, incomplete bottom polishing, and low efficiency. It achieves high-precision polishing of
microstructure surfaces, and is particularly suitable for ultra-precision
machining of deep and narrow grooves.