The invention relates to a micro force load device of piezoelectric film suspension beam micro
force sensor, belonging to sensor and test technical field, used for the static and quasi-static test and
label of piezoelectric film suspension beam micro
force sensor, wherein a micro force load device is composed of a one-dimension micro displacement table, a two-dimension micro displace table, a piezoelectric dual-
crystal micro force generator, and a damping device. The one-dimension micro displacement table is composed of an X-axis
micrometer element and a one-dimension micro displacement table base. The two-dimension micro displace table is composed of a Y-axis
micrometer element, a Z-axis
micrometer element, a two-dimension micro displacement table base, a support plate and a socket head cap screw. The piezoelectric dual-
crystal micro force generator III is composed of a micro probe, a fixing block, two piezoelectric
ceramic plates, an aluminum plate, a clamping plate and a socket head cap screw. The invention has simple and reliable structure, easy operation, and improved resolution of micro force loading
system, to resolve the problems as
instability and hard control of micro Newton force load.