Gallium nitride sensor, preparation method and multi-sensor system

Abstract

The invention discloses a gallium nitride sensor, a preparation method and a multi-sensor system. The sensor comprises a heterostructure semiconductor substrate and a transistor which is located on the heterostructure semiconductor substrate, based on III-group nitrides and of an HEMT structure. Metal of the source electrode and metal of the drain electrode are both arranged on the portion, on the top layer of the transistor, of the semiconductor. A functionalized membrane obtained through functionalized processing is arranged on the surface of the grid electrode, and an induction area is formed in the exposed grid electrode area between the source electrode and the drain electrode. By detecting the current changes of the induction area, the concentration of to-be-detected substances making contact with the induction area is detected. By means of the scheme, the defects that in the prior art, sensitivity is low, the detection range is small and portability is poor can be overcome, and the advantages of being high in sensitivity, large in detection range and good in portability are achieved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a gallium nitride (GaN) sensor, a preparation method and a multi-sensor system. Background technique [0002] In the atmosphere and gas supply system, the chemical composition detection of pollutants and biological water liquid components is extremely important for environmental protection and medical care. For example, in the hazardous gas transportation system, rapid detection of gas leakage plays a key role in the protection of workers' lives, health and safety, as well as the prevention and control of environmental pollution. [0003] In addition, through chemical sensing, it is also possible to detect the presence of heavy metals, organic pollutants, inorganic pollutants, industrial pollutants, and other relevant liquid characteristics (such as pH, salinity, turbidity, and smell, etc.). In addition, through the detection of body fluids (blood, saliva) and gases (breathing)...

AI Technical Summary

Problems solved by technology

There are three main shortcomings: first, the sensitivity is not high enough. In the application fields that require high sensitivity, such as environmental detection, medical applications, etc., silicon-based devices cannot meet the requirements; second, silicon-based devices are difficult to operate under harsh environmental conditions. work, such as high temperature, high humidity, high pressure, etc.; the third is that silicon-based sensors are limited by their working principles and are large in size. For portable or even wearable applications, they often cannot meet the requirements

[0006] In the prior art, there are defects such as low sensitivity, small detection range and poor portability

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