Excimer Lamp Envelope UV Filter

Abstract

The technology described herein relates to excimer lamps. An exemplary excimer lamp includes a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm.

Description

Technical Field

[0001] (Related Application)

[0001] This patent claims priority under 35 U.S.C. § 119(e) to U.S. Provisional Application No. 63 / 505,754, filed Jun. 2, 2023, entitled “EXCIMER LAMP ENVELOPE UV FILTER,” which is hereby incorporated by reference in its entirety.

[0002]

[0002] The technology described herein generally relates to ultraviolet light emission, and more specifically to excimer lamps.

Background Art

[0003]

[0003] An excimer lamp emits ultraviolet (UV) light based on the excitation of a gas containing diatomic or polyatomic molecules (excimers). UV light in the UV-C (or UVC) region (100 - 280 nanometers (nm)) can kill viruses and other pathogens. An excimer lamp that emits UV light in such a wavelength range may be used to sterilize areas exposed to the excimer lamp.

Summary of the Invention

[0004]

[0004] According to the disclosed subject matter, devices, systems, and methods for an excimer lamp are provided.

[0005]

[0005] Some embodiments are excimer lamps comprising a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light having a wavelength greater than 230 nanometers (nm) and transmit UV light having a wavelength between 190 and 230 nm.

[0006]

[0006] Some embodiments relate to another excimer lamp comprising a dielectric having a doped surface, which constitutes at least one side of a sealed cavity, and an electrode disposed on the doped surface of the dielectric.

[0007]

[0007] Some embodiments relate to an excimer lamp system comprising a lamp having a dielectric that constitutes at least one side of a sealed cavity, electrodes disposed on the surface of the dielectric, and a window having a doped surface.

[0008]

[0008] Some embodiments relate to a method for operating an excimer lamp having a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light of wavelengths greater than 230 nanometers (nm) and transmit UV light of wavelengths between 190 and 230 nm, and the method involves driving electrodes with a voltage to emit UV light.

[0009]

[0009] Some embodiments describe a method for operating an excimer lamp system comprising a lamp having a dielectric that constitutes at least one side of a sealed cavity, electrodes disposed on the surface of the dielectric, and a window having a doped surface, the method comprising driving the electrodes with a voltage for emitting UV light.

[0010]

[0010] The above summary is not intended to be limiting. Furthermore, various aspects of this disclosure may be implemented alone or in combination with other aspects. [Brief explanation of the drawing]

[0011]

[0011] In the drawings, identical or nearly identical components shown in various drawings are each represented by the same reference numeral. For clarity, not all components are labeled in every drawing. The drawings are not necessarily drawn to scale, and the emphasis is on illustrating various aspects of the technology and apparatus described herein.

[0012] [Figure 1]

[0012] A top view is shown of an exemplary electrode configuration of an excimer lamp, according to one embodiment, in which the polarity of the electrodes of the electrode configuration alternates only along a first dimension. [Figure 2]

[0013] A top view is shown of another exemplary electrode configuration of an exemplary excimer lamp, in which the polarity of the electrodes of the electrode configuration alternates along both the first and second dimensions, according to one embodiment. [Figure 3]

[0014] A cross-sectional view of a two-dimensional excimer lamp according to one embodiment is shown. [Figure 4A]

[0015] An exemplary embodiment of an excimer lamp having two gas-filled sealed tubes, according to one embodiment, is shown. [Figure 4B]

[0016] Figure 4A shows a cross-sectional view of one of the two sealed tubes according to one embodiment. [Figure 5]

[0017] An exploded view of an exemplary embodiment of an excimer lamp system according to one of the embodiments is shown. [Figure 6]

[0018] A top view is shown of an exemplary embodiment of an excimer lamp system, including an excimer lamp having a coaxial body, according to one of the embodiments. [Figure 7]

[0019] A graph of the transmittance against wavelength of a tested quartz piece doped with cerium oxide and free of titanium oxide, according to some embodiments, is shown. [Figure 8]

[0020] This flowchart illustrates exemplary processes that may be performed and / or carried out to manufacture, calibrate, test, and / or operate an excimer lamp, such as the exemplary excimer lamp in Figures 1, 2, 3, 4A, 4B, and / or 6, and / or an excimer lamp system, such as the excimer lamp system in Figures 5 and / or 6, according to some embodiments. [Figure 9]

[0021] This flowchart illustrates exemplary processes that may be performed and / or carried out to manufacture, calibrate, test, and / or operate an excimer lamp, such as the exemplary excimer lamp in Figures 1, 2, 3, 4A, 4B, and / or 6, and / or an excimer lamp system, such as the excimer lamp system in Figures 5 and / or 6, according to some embodiments. [Modes for carrying out the invention]

[0013]

[0022] As discussed above, excimer lamps emit ultraviolet (UV) light in response to the excitation of excimer-containing gases. While UV-C light (for example, the wavelength range of 100 to 280 nanometers (nm)) is sometimes used for disinfection purposes, some wavelengths of UV-C light are not very harmful to human health. In particular, wavelengths below 230 nm have been shown to be less harmful to human health than longer UV-C wavelengths.

[0014]

[0023] The inventors recognize and understand that existing system solutions based on 222 nm excimer lamps utilize multiple tubular or planar dielectric barrier discharge lamps in conjunction with appropriate power and control modules. However, such existing system solutions may require spectral filtering to at least partially remove wavelengths that could be harmful to human health. For example, some of these existing system solutions have secondary output at wavelengths above 230 nm.

[0015]

[0024] For example, a krypton chloride (KrCl) excimer lamp has most of its output near 222 nm, but also has a secondary output at 257 nm. Similarly, a krypton bromide (KrBr) excimer lamp has most of its output near 208 nm, with secondary outputs at 228 nm and 291 nm. These secondary outputs at wavelengths longer than 230 nm may be undesirable for two reasons. First, wavelengths longer than 230 nm can be harmful to human health. Second, wavelengths longer than 230 nm can limit the amount of "good UV" that the excimer lamp is allowed to produce based on regulatory maximum exposure limits for "bad UV" (e.g., the threshold limit value (TLV)).

[0016]

[0025] A standard industry solution for attenuating wavelengths above 230 nm is to use a filter to remove the unwanted wavelengths. This filter can be either an absorption filter for the unwanted wavelengths or a reflective filter for the unwanted wavelengths, with the latter reflecting the harmful radiation away from the human body.

[0017]

[0026] This unwanted wavelength filter can take the form of a single or multi-layer dielectric coating applied to a quartz or sapphire substrate placed at the exit window of the device containing the excimer lamp, or alternatively, this dielectric filter can be applied or deposited on one or both sides of the excimer bulb or on the envelope.

[0018]

[0027] Suitable single and multi-layer filter stacks can be fabricated by various deposition techniques and include dielectric materials such as silicon oxide, hafnium oxide, aluminum oxide, etc. Of these materials, hafnium oxide and aluminum oxide are generally preferred based on their ability to withstand UV radiation without significant degradation over the life of the product.

[0019]

[0028] Such spectrum filters may include one or more dielectric layers. Such filters are designed to transmit UV light near 222 nm and block UV light at longer and harmful wavelengths. The inventors recognize and understand that such UV filters increase the cost of the system. Also, and perhaps more importantly, such filters also significantly reduce the amount of "good" UV output.

[0020]

[0029] The inventors also recognize that the transmittance of UV light wavelengths longer than 230 nm may increase when the filter changes performance during its lifetime or when the filter fails mechanically at the system level. Also, planar dielectric filters may reduce off-axis response, make the output of the device non-uniform, have a significant impact on the virus sterilization ability of the device in the low-output area, and give a false sense of security to people occupying the space.

[0021]

[0030] The inventors have developed excimer lamp technology that can overcome the above problems. In this specification, an excimer lamp will be described that can be constructed such that the lamp envelope itself can filter UV light in a desired manner without the need for a separate spectrum filter. Such an excimer lamp may include a lamp envelope that contains a dielectric material that confines the gas. The dielectric material of the lamp envelope itself may be manufactured to filter UV light in a desired manner. For example, the dielectric material of the lamp envelope may be manufactured such that the transmittance of UV light in the band of 190 - 230 nm is relatively high, and the transmittance of UV light at long wavelengths (e.g., wavelengths of 230 nm or more) that can be harmful to human health is relatively low.

[0022]

[0031] The lamp envelope may be formed from a suitable dielectric material, such as quartz or sapphire. The dielectric material may be doped to obtain appropriate optical properties, such as relatively high transmittance of UV light in the 190-230 nm band and relatively low transmittance of long-wavelength UV light, especially above 250 nm. Such techniques may eliminate the need for separate filters and, in some cases, improve off-axis spectral filtering.

[0023]

[0032] The application of commercially available cerium-doped fused silica (also called cerium-doped quartz) and titanium-doped fused silica (also called titanium-doped quartz) to excimer lamps was considered. However, both options completely block the "good UV" output (190-230 nm).

[0024]

[0033] The inventors recognized that commercially available cerium-doped fused silica actually contains both cerium oxide and titanium oxide as dopants, and that this combination is the cause of poor UV transmission. Therefore, the inventors developed a quartz doping method that uses only cerium oxide as a dopant. As a result, good UV light is no longer blocked.

[0025]

[0034] In the development of doped dielectric quartz materials, various concentrations and compositions of cerium oxide were used, but the output values ​​at 222 nm and 257 nm differed depending on the concentration. With the composition tested, we succeeded in favorably increasing the ratio of 222 nm to 257 nm to such a low level that the output at 257 nm only needed to be considered for the 222 nm TLV. In the case of an undoped tube, even if the 222 nm output is within the safe level, the emission at 257 nm will trigger the safety requirements of the TLV.

[0026]

[0035] The advantage of excimer lamps manufactured using this improved, novel doped dielectric quartz material (or glass or sapphire material) is that they do not require an external filter for actual disinfection applications where it is necessary to protect human health from harmful UV radiation.

[0027]

[0036] The lamp envelope may take any suitable shape, such as tubular, coaxial, or nearly flat. The lamp envelope forms a sealed cavity for containing a gas configured to emit UV light in response to excitation. Excitation may take any suitable form, such as electrical or optical excitation (e.g., using a laser). If excitation is performed electrically, electrodes may be placed at any suitable location, such as the edges of the cavity, or the surface of the lamp may be covered with wire mesh electrodes.

[0028]

[0037] In some applications, excimer lamps may be used to sterilize a certain area, and it is particularly desirable to sterilize a large area. Existing solutions for sterilizing an area (e.g., a large area) use a number of small tubular lamps that can emit UV light. Challenges in sterilizing a large area include the need for a large number of small tubular lamps to emit enough UV light to expose the large area, or the use of fewer small tubular lamps but requiring additional time to expose the large area (e.g., additional time for a person to move the fewer small tubular lamps around the large area). Another challenge with small tubular lamps is that such lamps can be expensive to manufacture and / or unreliable. Yet another recognized challenge with small tubular lamps is that conventional lamps constructed as tubes may have electrodes at both ends of the tube. Such lamps are limited to small sizes, which contributes to the aforementioned challenges in sterilizing large areas.

[0029]

[0038] This specification describes an excimer lamp technology that overcomes the aforementioned challenges. This specification describes an excimer lamp that can be formed in a relatively large size and avoids the shortcomings of conventional excimer lamp designs for disinfecting large areas. In some embodiments, instead of positioning electrodes at the edges of a sealed cavity, or in addition to that, an array of electrodes with alternating polarity may be positioned across the entire surface of the sealed cavity. In some embodiments, the electrodes may be spaced 8 to 12 millimeters (mm) or less from each other, in other embodiments. Advantageously, positioning the electrode array across the entire surface of the sealed cavity allows for the formation of excimer lamps of various sizes, including sizes larger than those of conventional excimer lamp designs.

[0030]

[0039] In some embodiments, an excimer lamp with an electrode array may be formed in a two-dimensional shape (e.g., flat, planar). In such a lamp, a gas containing excimer molecules is confined between an upper and lower substrate extending two-dimensionally in a suitable shape, which may be square, rectangular, triangular, and / or helical. The substrates may have a planar or curved shape, and are not limited to being strictly flat. An electrode array on at least one substrate may excite the excimer gas, while the substrate opposite the electrode array may provide a window that allows UV light to exit the lamp. The window may be transparent. In some embodiments, illumination may be supplied from the other side of the window. In some such embodiments, the window may be a two-dimensional window with any area. Exemplary areas may range from about 1 square foot to 4 square feet. Alternatively, the area of ​​the two-dimensional window may be smaller or larger than the 1 to 4 square foot area range.

[0031]

[0040] In some embodiments, the excimer lamp may include an array of electrodes spaced apart from one another along a first dimension. For example, a tube formed of a dielectric (e.g., a dielectric material) may constitute a sealed cavity that confines a suitable gas, and an array of electrodes with alternating polarity may be positioned along the length of the tube. Advantageously, the tube may be formed of any length, and a greater number of electrodes allows for a longer lamp and therefore a longer arc length.

[0032]

[0041] By forming tubes of arbitrary length to enable longer lamps, the techniques described herein overcome the challenges of conventional lamps when sterilizing large areas. Furthermore, by enabling longer lamps, the techniques described herein improve the reliability of excimer lamps and / or reduce the manufacturing cost of excimer lamps by reducing the number of individual lamps constructed. In some embodiments, the excimer lamp may include multiple tubes, each having an array of electrodes with alternating polarity.

[0033]

[0042] Further advantages of the excimer lamps described herein include the elimination of the need for a reflector and the elimination of the need for UV light to pass through a mesh, which in standard designs can block some of the UV light and reduce efficiency. Non-limiting examples of applications in which the excimer lamps described herein may be used include air sterilization, air purification, surface disinfection, and water sterilization.

[0034]

[0043] The technologies described herein are not limited to any particular method of implementation and may be carried out in any of many ways. Examples of implementation details are provided herein, but these are for illustrative purposes only. Furthermore, aspects of the technologies described herein are not limited to the use of any particular technology or combination of technologies; therefore, the technologies disclosed herein may be used individually or in any suitable combination.

[0035]

[0044] Referring to the drawings, the example shown in Figure 1 shows a top view of a first exemplary excimer lamp 100 having a first exemplary electrode configuration 102. The first electrode configuration 102 is an array of electrodes (e.g., an electrode array) including a plurality of electrodes 104, 106 whose polarity alternates only along a first dimension 108, which in this example is the X dimension. A different number of electrodes may be used than the number of electrodes shown in Figure 1. The first electrode configuration 102 has a pattern that can be considered a “stripe” pattern. In exemplary operation, the first excimer lamp 100 emits UV light in response to the excitation of any of the plurality of electrodes 104, 106. For example, an electric arc may be generated in response to the excitation of any of the plurality of electrodes 104, 106 and spread across the entire excited electrode of the plurality of electrodes 104, 106.

[0036]

[0045] The first electrode configuration 102 includes a first electrode set 104, each electrode of the first electrode set 104 being identified as "A". Each electrode of the first electrode set 104 is configured to be supplied with a voltage (e.g., 5kV) of a first polarity (e.g., a first voltage polarity, a positive voltage polarity such as +5kV). The first electrode configuration 102 includes a second electrode set 106, each electrode of the second electrode set 106 being identified as "B". Each electrode of the second electrode set 106 is configured to be supplied with a voltage (e.g., 5kV) of a second polarity (e.g., a second voltage polarity, a negative voltage polarity such as -5kV), the second polarity being opposite to and / or different from the first polarity. For example, electrode 106a may have a voltage of -5kV, electrode 104a may have a voltage of +5kV, electrode 106b may have a voltage of -5kV, electrode 104b may have a voltage of +5kV, and adjacent pairs have alternating polarities that can be used to generate an arc spanning adjacent pairs. In such an example, the arc length may extend across the entire length of multiple electrodes 104, 106 along the first dimension 108.

[0037]

[0046] In the illustrated example, the same nominal voltage is applied to each of the multiple electrodes 104 and 106. Alternatively, different nominal voltages may be supplied to any of the multiple electrodes 104 and 106. For example, the first electrode of the first electrode set 104 may be supplied with a first nominal voltage, and the second electrode of the first electrode set 104 may be supplied with a second nominal voltage different from the first nominal voltage. Another example is that the electrodes of the first electrode set 104 may be supplied with a first nominal voltage, and the electrodes of the second electrode set 106 may be supplied with a second nominal voltage different from the first nominal voltage.

[0038]

[0047] In the example shown in Figure 1, each of the electrodes 104 and 106 is rectangular in shape. Alternatively, one or more of the electrodes 104 and 106 may have different shapes, such as squares, triangles, or spirals. In the illustrated example, each of the electrodes 104 and 106 has the same length along the second dimension 110, which in this example is the Y dimension. Alternatively, one or more of the electrodes 104 and 106 may have different lengths.

[0039]

[0048] In the illustrated example, the first electrode of the first electrode set 104 closest to the first side 112 of the first excimer lamp 100, and the second electrode of the second electrode set 106 closest to the second side 114 (opposite the first side 112) of the first excimer lamp 100, each have a first width 116 (identified as W1) in the first dimension 108. Other electrodes of the multiple electrodes 104, 106 have a second width 118 (identified as W2) that is wider than the first width 116 in the first dimension 108. In this example, the narrower electrodes near and / or close to the edge of the first excimer lamp 100 may help and / or support the equalization of electrode capacitance across the entire electrode array so that the plasma distribution can be made more uniform. For example, the surface (e.g., surface area) of electrodes 104, 106 can be used to equalize the capacitance between lamp segments. At both ends of the cavity of the first excimer lamp 100, the two narrow electrodes shown are approximately half the size (in terms of surface area) of the wider electrodes other than those at the ends of the excimer lamp 100. Advantageously, by manipulating the surfaces of electrodes 104 and 106, the capacitance between electrodes 104 and 106 can be equalized to equalize the operating voltage of each lamp segment, and consequently, the plasma distribution across the entire lamp segment.

[0040]

[0049] Furthermore, while this example shows that each of the multiple electrodes 104, 106 has the same length in the second dimension 110, in other embodiments, one of the multiple electrodes 104, 106 may have a different length from any of the other electrodes 104, 106. Also, in this example, the first spacing 120 (identified by D1) between adjacent electrodes near the edge of the first excimer lamp 100 (e.g., electrodes identified by 104a, 106a) is shown to be smaller (e.g., shorter) than the second spacing 122 (identified by D2) between adjacent electrodes further away from the edge of the first excimer lamp 100 (e.g., electrodes identified by 104b, 106b).

[0041]

[0050] Figure 2 shows a top view of a second exemplary excimer lamp 200 having a second exemplary electrode configuration 202. The second electrode configuration 202 is an electrode array containing a plurality of electrodes 204, 206 whose polarity alternates along both a first dimension 208 and a second dimension 210, which in this example are the X and Y dimensions, respectively. A different number of electrodes may be used than the number of electrodes shown in Figure 2. The second electrode configuration 202 has a pattern that can be considered a “checkerboard” pattern, with space or dielectric material provided between adjacent electrodes. In exemplary operation, the second excimer lamp 200 emits UV light in response to the excitation of any of the plurality of electrodes 204, 206. For example, an electric arc may be generated in response to the excitation of any of the plurality of electrodes 204, 206 and spread throughout any of the excited electrodes 204, 206.

[0042]

[0051] The second electrode configuration 202 includes the first electrode set 204, where each electrode of the first electrode set 204 is identified as "A". Each electrode of the first electrode set 204 is configured to be supplied with a voltage of a first polarity (e.g., a first voltage polarity). The second electrode configuration 202 includes the second electrode set 206, where each electrode of the second electrode set 206 is identified as "B". Each electrode of the second electrode set 206 is configured to be supplied with a voltage of a second polarity (e.g., a second voltage polarity), where the second polarity is opposite to and / or different from the first polarity. For example, electrode 206a may have a voltage of -10kV, electrode 204a may have a voltage of +10kV, electrode 206b may have a voltage of -10kV, electrode 204b may have a voltage of +10kV, and adjacent pairs have alternating polarities that can be used to generate an arc spanning adjacent pairs. In such an example, the arc length may extend over the entire length of the multiple electrodes 204, 206 along the first dimension 108 and / or the second dimension 210.

[0043]

[0052] In the illustrated example, the same nominal voltage is applied to each of the multiple electrodes 204 and 206. Alternatively, different nominal voltages may be supplied to any of the multiple electrodes 204 and 206. For example, the first electrode of the first electrode set 204 may be supplied with a first nominal voltage, and the second electrode of the first electrode set 204 may be supplied with a second nominal voltage different from the first nominal voltage. For example, the electrodes of the first electrode set 204 may be supplied with a first nominal voltage, and the electrodes of the second electrode set 206 may be supplied with a second nominal voltage different from the first nominal voltage.

[0044]

[0053] Although the electrodes 204, 206 are shown in the top view as being square or rectangular in shape, any of the electrodes 204, 206 may have any shape in the top view. For example, any of the electrodes 204, 206 may have other shapes, such as circular (e.g., dot shape), curved (e.g., cylindrical, crescent shape), and / or straight edges (e.g., triangular, pentagonal, hexagonal, etc.). Any of the electrodes 204, 206 may be narrower near and / or closer to the edge of the excimer lamp 200, as shown in Figure 2, or in other embodiments, there may be no electrodes that are narrower near and / or closer to the edge. For example, narrower electrodes near the edge of the excimer lamp 200 may help equalize the electrode capacitance across the entire electrode array so that the plasma distribution can be more uniform.

[0045]

[0054] In the illustrated example, the electrodes 204, 206 closest to and / or adjacent to the side of the second excimer lamp 200 each have a first width 212 (identified as W1) along a first dimension 208. The other electrodes of the plurality of electrodes 204, 206 have a second width 214 (identified as W2) wider than the first width 212 along the first dimension 208. For example, the narrower electrodes near the edge of the second excimer lamp 200 may help and / or support the equalization of electrode capacitance across the entire electrode array so that the plasma distribution can be made more uniform. Also in this example, the first spacing 216 (identified as D1) between adjacent electrodes near the edge of the second excimer lamp 200 is shown to be smaller (e.g., shorter) than the second spacing 218 (identified as D2) between adjacent electrodes further away from the edge of the second excimer lamp 200.

[0046]

[0055] Figure 3 shows a cross-sectional view of a third exemplary excimer lamp 300. The third excimer lamp 300 is shown as a two-dimensional excimer lamp. In some embodiments, the third excimer lamp 300 can implement the first excimer lamp 100 of Figure 1. For example, the third excimer lamp 300 can have an electrode configuration having a stripe pattern. In some embodiments, the third excimer lamp 300 can implement the second excimer lamp 200 of Figure 2. For example, the third excimer lamp 300 can have an electrode configuration having a checkerboard pattern. Alternatively, the third excimer lamp 300 may have any other arbitrary electrode configuration.

[0047]

[0056] The third excimer lamp 300 includes an electrode array 302, which includes electrodes 304, 306 alternating at different voltages. For example, the electrode array 302 includes a plurality of electrodes 304, 306 of opposite polarity with appropriate spacing. Those skilled in the art will understand how to select appropriate spacing between adjacent electrodes among the plurality of electrodes 304, 306. For example, adjacent electrodes among the plurality of electrodes 304, 306 can be spaced apart by a distance in the range of 8 to 12 millimeters (mm) or less. As discussed above, the electrode array 302 in this example can be arranged and / or configured in one of the various electrode configurations described herein.

[0048]

[0057] The electrode array 302 in the illustrated example includes a first electrode set 304, each electrode of the first electrode set 304 being identified as "A". Each electrode of the first electrode set 304 is configured to be supplied with a voltage of a first polarity (e.g., a first voltage polarity). The electrode array 302 further includes a second electrode set 306, each electrode of the second electrode set 306 being identified as "B". Each electrode of the second electrode set 306 is configured to be supplied with a voltage of a second polarity (e.g., a second voltage polarity), the second polarity being opposite to and / or different from the first polarity.

[0049]

[0058] The electrode array 302 is disposed on a dielectric 308. In this example, the dielectric 308 is a material (e.g., a dielectric material) shown as the first two-dimensional substrate. The dielectric 308 may be formed from any of a variety of dielectric materials. Non-limiting examples of dielectric materials include glass, quartz, sapphire, and ceramic materials. In some embodiments, the dielectric 308 is opaque to UV light. In some embodiments, the dielectric 308 is transparent to UV light.

[0050]

[0059] Gas 310 is sealed, enclosed, and / or encapsulated within a cavity 312 between the dielectric 308 and the window 314. In this example, the window 314 is a second two-dimensional substrate. The window 314 may be transparent. Alternatively, the window 314 may be opaque. The dielectric 308 and the window 314 constitute part of a lamp envelope that seals the gas 310 within the cavity. When excited by the electrode array 302, the gas 310 emits UV light, which passes through the window 314 and exits from the third excimer lamp 300.

[0051]

[0060] The window 314 can be constructed and / or formed from any of a variety of materials that transmit UV light of a desired wavelength. Non-limiting examples of window materials include glass, quartz, and sapphire. In some embodiments, the window 314 can be coated and / or doped to absorb and / or attenuate unwanted wavelengths so that desired wavelengths can be transmitted through the window 314. For example, the window 314 can be coated and / or doped to absorb UV lengths with a wavelength (e.g., peak wavelength) of 257 nanometers (nm) and / or to prevent those UV lengths from being transmitted through the window 314. For example, the window 314 can be doped or otherwise manufactured such that it has relatively high transmittance of UV light in the range of 190–230 nm and relatively low transmittance of UV light with wavelengths longer than 230 nm.

[0052]

[0061] In some embodiments, doping window 314 with cerium oxide can block unwanted long wavelengths of UV light. To avoid excessive attenuation of wavelengths from 190 nm to 230 nm, window 314 may not be doped with titanium oxide. By not doping with titanium oxide, window 314 may be titanium oxide-free or substantially titanium oxide-free. In some embodiments, window 314 may be an integral structure (e.g., glass, quartz, or sapphire). In some embodiments, window 314 itself may perform spectral filtering to remove UV wavelengths above 230 nm and therefore may not be covered by a separate spectral filter.

[0053]

[0062] As used herein, the term “transparent” refers to the ability of a window, such as window 314, to transmit light of a desired wavelength, and includes any level of transparency from partial transparency to complete transparency.

[0054]

[0063] The dielectric 308 can be bonded to the electrode array 302 and / or the transparent window 314 by any suitable technique. For example, the dielectric 308 can be attached to and / or bonded to the electrode array 302 by brazing, bonding, soldering, and / or welding. In another example, the dielectric 308 can be attached to and / or bonded to the window 314 by brazing, bonding, soldering, and / or welding.

[0055]

[0064] The dielectric 308 may be rigid or flexible. The window 314 may be rigid or flexible. For example, a rigid structure may be useful for a variety of applications, such as installation on ceilings, walls, or floors. In another example, a flexible structure may allow a lamp, such as a third excimer lamp 300, to be bent or flexed to accommodate installation on non-planar or irregular surfaces.

[0056]

[0065] In this example, gas 310 fills the sealed cavity 312 between the dielectric 308 and the window 314. In some embodiments, gas 310 may have a pressure lower than atmospheric pressure. Alternatively, gas 310 may have a pressure equal to or higher than atmospheric pressure.

[0057]

[0066] The gas 310 confined within the cavity 312 may be any suitable diatomic or polyatomic gas that emits UV radiation in response to the excitation of any of the electrodes 304, 306. Gas 310 may be a single gas or a mixture of multiple gases. Non-limiting examples of gas 310 include krypton chloride (KrCl) gas mixtures and krypton bromide (KrBr) gas mixtures. For example, the third excimer lamp 300 may emit UV light with a peak wavelength of 222 nm when gas 310 is a KrCl gas mixture. In another example, the third excimer lamp 300 may emit UV light with a peak wavelength of 207 nm when gas 310 is a KrBr gas mixture.

[0058]

[0067] When gas 310 is excited by any of the electrodes 304, 306, it can emit light having a peak wavelength in the range of, for example, 100-230 nm or 200-230 nm. For example, gas 310 can emit light having a peak wavelength in the range of 100 nm to 230 nm, or in the range of 200 nm to 230 nm. Any other arbitrary peak wavelength range is also possible. In another example, when gas 310 is excited by any of the electrodes 304, 306, it can emit light having a peak wavelength of 208 nm. In yet another example, when gas 310 is excited by any of the electrodes 304, 306, it can emit light having a peak wavelength of 222 nm.

[0059]

[0068] In the illustrated example, the third excimer lamp 300 further includes a drive circuit 316 for driving a plurality of electrodes 304, 306. The drive circuit 316 is configured to generate and / or output a drive waveform for exciting any of the plurality of electrodes 304, 306. Non-limiting examples of drive waveforms include sinusoidal and pulsed waveforms (e.g., pulse-width modulation (PWM) waveforms). Any other type of drive waveform is also possible. For example, those skilled in the art will understand how to select an appropriate drive waveform, as well as appropriate voltage, current, and / or power levels, based on the lamp shape, material, type of gas, and / or other criteria for emitting UV light having a desired peak wavelength.

[0060]

[0069] In some embodiments, the drive circuit 316 includes one or more switches configured to drive a plurality of electrodes 304, 306 at a controlled frequency. Non-limiting examples of switches include micro-electromechanical (MEMS) switches and transistors. Any other type of switch is also possible. Non-limiting examples of transistors include field-effect transistors (FETs), bipolar junction transistors (BJTs) (e.g., NPN BJTs, PNP BJTs), and insulated-gate bipolar transistors (IGBTs). Non-limiting examples of FETs include power FETs and metal-oxide-semiconductor field-effect transistors (MOSFETs) (e.g., p-channel MOSFETs, n-channel MOSFETs, etc.). Any other type of transistor is also possible.

[0061]

[0070] In some embodiments, the drive circuit 316 is configured to include and / or be connected to one or more power sources. One or more power sources may be configured to output appropriate current, voltage, and / or power levels to drive the multiple electrodes 304, 306. For example, one or more power sources may be alternating current (AC) power sources (e.g., electric wall outlets capable of supplying AC power) configured to output voltages up to 20 kilovolts (kV) (e.g., 20kV peak-to-peak, 20kV AC peak-to-peak). Other arbitrary output voltages such as 5kV (e.g., 5kV peak-to-peak, 5kV AC peak-to-peak) and 10kV (e.g., 10kV peak-to-peak, 10kV AC peak-to-peak) are also conceivable. In another example, one or more power sources may be direct current (DC) power sources (e.g., 24-volt direct current (VDC) power sources, 48VDC power sources) that can be converted from DC voltage to AC voltage via a DC-AC power converter.

[0062]

[0071] In the illustrated example, the same nominal voltage is applied to each of the multiple electrodes 304, 306. Alternatively, different nominal voltages may be supplied to any of the multiple electrodes 304, 306. For example, the first electrode of the first electrode set 304 may be supplied with a first nominal voltage from a first power supply, and the second electrode of the first electrode set 304 may be supplied with a second nominal voltage from a second power supply (or first power supply), where the second nominal voltage is different from the first nominal voltage. Another example is that the first electrode of the first electrode set 304 may be supplied with a first nominal voltage from a first power supply, and the second electrode of the second electrode set 306 may be supplied with a second nominal voltage from a second power supply (or first power supply), where the second nominal voltage is different from the first nominal voltage.

[0063]

[0072] The inventors recognize and understand that the apparatus and techniques described herein may be applied to lamps having one or more sealed tubes as shown in Figure 4A (e.g., excimer lamps). For example, the inventors recognize and understand that lamps having one or more sealed tubes may be easier to construct, fabricate, and / or manufacture than lamps having one or more non-tubular structures.

[0064]

[0073] Figure 4A shows an example of a fourth excimer lamp 400 having two exemplary sealed tubes 402a and 402b (collectively referred to as 402). The tubes 402 in this example are circular tubes, such as cylindrical tubes (e.g., cylindrical tubes). Alternatively, the tubes 402 may have different shapes. For example, one of the tubes 402 may be a triangular tube (e.g., a V-shaped tube), a rectangular tube, a pentagonal tube, a hexagonal tube, etc. The tubes 402 in this example may be constructed to have any desired length. For example, each of the tubes 402 may have a length of 600 mm (e.g., about 2 feet), 1200 mm (e.g., about 4 feet), etc., by adding additional electrodes whose polarity alternates along the length of the tube 402.

[0065]

[0074] The tube 402 in this example may be a tube filled with one or more gases 404, such as gas 310 in Figure 3, and the window 314 in Figure 3, as described above. However, the lamp may be made up of any number of tubes 402, such as one tube, two tubes, four tubes, eight tubes, or any other number of tubes. The tubes 402 may be made of a transparent material, such as glass. Alternatively, the tubes 402 may be made of a different transparent material, such as quartz or sapphire. In some embodiments, the material of the envelope (e.g., the outer surface) of the tube 402 can be doped with cerium oxide to block unwanted long wavelengths of UV light. To avoid excessive attenuation of wavelengths from 190 nm to 230 nm, the envelope material of the tube 402 may not be doped with titanium oxide. By not doping with titanium oxide, the envelope of the tube 402 may contain or substantially no titanium oxide.

[0066]

[0075] Each tube 402 in this example has a plurality of electrodes 406, 408 arranged on the curved side of the tube 402 so that UV light can be transmitted along the edge of the tube 402. The plurality of electrodes 406, 408 include a first electrode set 406 (each electrode identified by "A") and a second electrode set 408 (each electrode identified by "B"). Each electrode in the first electrode set 406 may have a first polarity (e.g., a first voltage polarity). Each electrode in the second electrode set 408 may have a second polarity (e.g., a second voltage polarity). In some embodiments, the first polarity is opposite to the second polarity.

[0067]

[0076] The multiple electrodes 406, 408 can be formed from any suitable conductor, such as metal. Non-limiting examples of conductors include aluminum, copper, nickel, stainless steel, and chrome-plated materials. Forming electrodes 406, 408 from a reflective conductor, such as aluminum, can improve light transmission efficiency by reflecting UV light to the opposite side of the fourth excimer lamp 400. In some embodiments, each of the multiple electrodes 406, 408 can be formed from the same conductor. Alternatively, some of the multiple electrodes 406, 408 can be formed from different conductors. For example, any of the first electrode set 406 can be formed from a first conductor such as aluminum, and any of the second electrode set 408 can be formed from a second conductor such as stainless steel. Another example is that the first electrode of the first electrode set 406 can be formed from a first conductor such as aluminum, and the second electrode of the first electrode set 406 can be formed from a second conductor such as stainless steel.

[0068]

[0077] Multiple electrodes 406, 408 may be in contact with the tube 402, as shown in Figure 4B, which shows one cross-sectional view of the tube 402 along the dashed line 410 in Figure 4A. As shown in Figure 4B, electrodes 406, 408 may extend around the tube 402 over approximately 180 degrees (e.g., 180 degrees, or in the range of 179 to 181 degrees). However, this is just one example, and in other cases, the electrodes may extend longer (e.g., 185 degrees, 200 degrees, etc.) or shorter (e.g., 175 degrees, 160 degrees, etc.) around the tube 402. In this example, electrodes 406, 408 have an arc shape that matches the shape of the tube 402. Alternatively, one of the multiple electrodes 406, 408 may have a different shape, such as a V-shape. In the illustrated example, the shape of the tube 402 may cause UV light to be emitted in the direction indicated by the illustrated arrow 412.

[0069]

[0078] As discussed in relation to the other excimer lamps 100, 200, and 300 described herein, the fourth excimer lamp 400 includes electrodes A and B whose polarity alternates along the length of the tube 402. In some embodiments, there may be a single power supply or a single instance of the drive circuit 316 shown in Figure 3 for all the tube electrodes of the fourth excimer lamp 400. In other embodiments, such as for longer lamps, there may be separate power supplies or separate instances of the drive circuit 316 for driving each tube electrode of the fourth excimer lamp 400.

[0070]

[0079] Figure 5 shows an exploded view of an exemplary embodiment of the excimer lamp system 500. In some embodiments, the excimer lamp system 500 may incorporate the first excimer lamp 100 in Figure 1, the second excimer lamp 200 in Figure 2, the third excimer lamp 300 in Figure 3, and / or the fourth excimer lamp 400 in Figures 4A and 4B.

[0071]

[0080] The illustrated example of the excimer lamp system 500 includes a plurality of lamps 502. The plurality of lamps 502 in this example is a set of four excimer lamps constructed as tubes. Alternatively, the excimer lamp system 500 may include a different number of excimer lamps. Each of the illustrated plurality of lamps 502 is constructed as a circular tube and / or cylindrical tube, but can alternatively be any other shape. For example, one of the plurality of lamps 502 may be constructed as a V-tube, a rectangular tube, etc. In some embodiments, each of the plurality of lamps 502 may be realized by one of the tubes 402a, 402b in Figure 4A and / or tube 402 in Figure 4B. For example, each of the plurality of lamps 502 may include one or more dielectric surfaces extending longitudinally along the lamp 502.

[0072]

[0081] In the illustrated example, the lamp 502 is attached to multiple electrodes 504, 506. The multiple electrodes 504, 506 in this example include a first electrode set 504 and a second electrode set 506. In this example, the first electrode set 504 will be excited by a voltage of first polarity, and the second electrode set 506 will be excited by a second voltage of second polarity opposite to the first polarity.

[0073]

[0082] In the illustrated example, the first electrode set 504 includes four electrodes 504a, 504b, 504c, and 504d, each having two electrodes at each distal end of the excimer lamp system 500 (e.g., electrodes 504a and 504b at the first distal end and electrodes 504c and 504d at the second distal end). In the illustrated example, the second electrode set 506 includes four electrodes 506a, 506b, 506c, and 506d, each having two electrodes at the first distal end (e.g., electrodes 506a and 506b) and two electrodes at the second distal end (e.g., electrodes 506c and 506d). Alternatively, different numbers of electrodes may be used in the first electrode set 504 and / or the second electrode set 506.

[0074]

[0083] Among electrodes 504a, 504b, 504c, 504d, 506a, 506b, 506c, and 506d, adjacent electrodes have alternating polarity. For example, electrode 504a may have positive voltage polarity, electrode 506a may have negative voltage polarity, electrode 506c may have positive voltage polarity, and electrode 504c may have negative voltage polarity, thereby implementing a positive-negative-positive-negative polarity configuration over the length of the lamp 502 and increasing the arc length over the length of the lamp 502. In such an example, using this polarity configuration, a first arc can be generated between the positive-negative voltage polarity of electrodes 504a and 506a, a second arc can be generated between the negative-positive voltage polarity of electrodes 506a and 506c, and a third arc can be generated between the positive-negative voltage polarity of electrodes 506c and 504c, thus tripling the arc length.

[0075]

[0084] The electrodes of the first electrode set 504 have a width shorter than each of the electrodes of the second electrode set 506, ensuring that each electrode system is balanced in terms of the capacity supplied to the excimer lamp system 500. For example, the electrodes of the first electrode set 504 may have a width that is half the width of each of the electrodes of the second electrode set 506, such that the electrodes of the first electrode set 504 have half the capacity of the electrodes of the second electrode set 506.

[0076]

[0085] In this example, multiple electrodes 504, 506 are constructed as W-shaped channels. For example, electrode 504a is constructed from a conductive material such as metal (e.g., aluminum, copper, nickel, stainless steel, chrome-plated material) and formed as two channels. Each channel may be U-shaped and configured to removably receive one of the lamps 502 (so that two adjacent U-shaped channels form a W-shaped electrode). For example, the first channel 508a of electrode 504a may be configured to removably attach to the first lamp of lamp 502, and the second channel 508b of electrode 504a may be configured to removably attach to the second lamp of lamp 502.

[0077]

[0086] In some embodiments, the multiple electrodes 504, 506 may be a single integrated structure. For example, the first channel 508a and the second channel 508b of electrode 504a can be constructed as a single component. Alternatively, the multiple electrodes 504, 506 may be a many-component structure. For example, the first channel 508a and the second channel 508b of electrode 504a can be constructed as separate components joined by any suitable technique such as soldering or welding.

[0078]

[0087] The multiple electrodes 504, 506 along the length of lamp 502 have the advantage of creating longer lamps, for example, by creating a higher-power single-tube planar system, thereby creating a longer arc length (e.g., electric arc length). For example, each lamp in lamp 502 shown in Figure 5 can have a length in the range of 500-600 mm. Advantageously, by increasing the number of electrodes and lengthening the tube, the excimer lamp system 500 shown in Figure 5 can achieve a longer discharge overall with higher UV light output. Advantageously, the excimer lamp system 500 in Figure 5 can reduce manufacturing costs (compared to lamp systems with short tubes) by manufacturing long tubes (such as lamp 502 shown in Figure 5) instead of many short tubes. Advantageously, the excimer lamp system 500 in Figure 5 is more reliable than lamp systems with short lamps because it has fewer tubes than lamp systems with short lamps.

[0079]

[0088] Figure 5 also shows the components for assembling the excimer lamp system 500. These components include lamp supports 510, 512, gaskets 514, windows 516, covers 518, side supports 520, 522, insulators 524, plates 526, and fasteners 528. Two lamp supports 510, 512 are shown, each having an opening for detachable attachment to a lamp 502. For example, the openings in the lamp supports 510, 512 can be configured to maintain the spacing between adjacent lamps of the lamp 502. The lamp supports 510, 512 are configured to attach to the side supports 520, 522 and the insulators 524. While two lamp supports 510, 512 are used in this example, different numbers of lamp supports 510, 512 may be used.

[0080]

[0089] The excimer lamp system 500 includes a gasket 514 for providing an airtight seal to prevent one or more gases, such as ozone, from leaking out of the excimer lamp system 500. The gasket 514 may be made of an ozone-resistant and / or UV-resistant material. The window 516 is positioned between the gasket and the cover 518 so that the cover 518 can be used to press the gasket 514 against the window 516 and the lamp support 510. In this example, the cover 518 is a rectangular cover configured with an opening (e.g., a rectangular opening) through which UV light emitted from the window 516 can pass.

[0081]

[0090] In this example, window 516 is a transparent window (which may also be opaque) configured to allow UV light from the excimer lamp system 500 to be emitted. In some embodiments, window 516 may be made of quartz or sapphire. Any other material, such as glass, may be used.

[0082]

[0091] In some embodiments, the material of window 516 is coated and / or doped to prevent the emission of unwanted UV wavelengths (e.g., UV light with a wavelength of 257 nm). For example, doping the material of window 516 with cerium oxide can block unwanted long wavelengths of UV light. To avoid excessive attenuation of wavelengths from 190 nm to 230 nm, the material of window 516 may not be doped with titanium oxide. By not doping with titanium oxide, window 516 may contain or substantially contain no titanium oxide.

[0083]

[0092] In some embodiments, the excimer lamp system 500 can be configured such that a window 516 is optional. For example, the lamp 502 can be made of a material that is coated and / or doped to prevent the emission of unwanted UV wavelengths (e.g., UV light with a wavelength of 257 nm). Additionally or alternatively, the excimer lamp system 500 may include a coated and / or doped window 516 and a coated and / or doped lamp 502. For example, the window 516 can be coated and / or doped to prevent the emission of UV wavelengths in a first range, and the lamp 502 can be coated and / or doped to prevent the emission of UV wavelengths in a second range. In such embodiments, the material of the envelope (e.g., the outer surface) of the lamp 502 can be doped with cerium oxide to block unwanted long wavelengths of UV light. To avoid excessive attenuation of wavelengths between 190 nm and 230 nm, the envelope material of lamp 502 may not be doped with titanium dioxide. By not doping with titanium dioxide, the envelope of lamp 502 may contain no titanium dioxide, or substantially no titanium dioxide.

[0084]

[0093] To facilitate the assembly of the excimer lamp system 500, the side supports 520, 522 are attached to an insulator 524 and extend upward from there. The side supports 520, 522 can be attached to a cover 518. The side supports 520, 522 in this example can be constructed from insulating material. The insulator 524 in this example is a plate that can be attached to a plate 526. The insulator 524 also includes a body 530 which is the same or substantially the same shape as the multiple electrodes 504, 506. For example, the body 530 is constructed from insulating material and is a W-shaped structure including one or more channels. The body 530 in this example is positioned between the electrode sets 504, 506 such that a desired spacing is maintained between the electrode sets 504, 506. For example, when positioned between the electrode sets 504, 506, the body 530 may have a width such that the distance between the electrode sets 504, 506 is maintained in the range of 8 to 12 mm or less. Other arbitrary distances are also possible, and can sometimes be achieved by changing the width of each of the main body 530.

[0085]

[0094] To further facilitate the assembly of the excimer lamp system 500, a plate 526 (identified as the “lower plate”) can be attached to other components of the excimer lamp system 500. For example, the plate 526 can be perforated (e.g., pre-perforated) with multiple holes into which one of the fasteners 528 can be inserted (for attachment to other components). In this example, the fasteners 528 are screws, but other types of fasteners such as bolts are also possible. In the illustrated example, the components of the excimer lamp system 500 can be assembled such that the lamp 502 and electrodes 504, 506 are housed within the housing. For example, when the cover 518 and plate 526 are assembled together with the other components shown in Figure 5, they can form a housing containing the lamp 502 and electrodes 504, 506.

[0086]

[0095] In the illustrated example, the lamp supports 510, 512, the side supports 520, 522, the insulator 524, and the plate 526 are constructed from insulators such as high-insulation materials to avoid and / or reduce electrical losses. Non-limiting examples of high-insulation materials include Teflon®, plastics, and ceramics (e.g., ceramic materials). Any other type of high-insulation material is also possible.

[0087]

[0096] An electrical connection system 532 is provided to facilitate electrical connection to the excimer lamp system 500. The electrical connection system 532 includes an electrical connector 534 and a plurality of wires 536. The electrical connector 534 and the plurality of wires 536 are adapted for high-voltage electrical connections. For example, the electrical connector 534 is a high-voltage electrical connector that can be connected to a voltage source such as up to 5kV, 10kV, etc. Furthermore, in this example, the plurality of wires 536 may be high-voltage wires adapted to be connected to a voltage source such as up to 5kV, 10kV, etc. In this example, the electrical connector 534 is an electrical plug with electrical terminals (e.g., pins), but in other embodiments, it may be an electrical receptacle with an electrical socket.

[0088]

[0097] The electrical connector 534 in this example can be configured to connect to one or more power sources so that one or more power sources can output voltage and current to the lamp 502 via electrodes 504, 506 and wires 536. For example, two of the wires 536 can be connected to one or more power sources via the electrical connector 534. The remaining four wires 536 can be connected to multiple electrodes 504, 506 in a push-pull configuration. For example, two of the four wires 536 can be connected to a first electrode set 504, and two of the remaining four wires 536 can be connected to a second electrode set 506. In the illustrated example, the wires 536 can be attached to electrodes 504, 506, and / or more generally, to the excimer lamp system 500 via one of the fasteners 528. Alternatively, one of the wires 536 may be soldered or welded to the corresponding electrode among electrodes 504, 506.

[0089]

[0098] Figure 6 shows a top view of an exemplary embodiment of an excimer lamp system 600, including a coaxial excimer lamp 602. Although not shown, the excimer lamp system 600 may include a housing capable of housing the excimer lamp 602 and / or related components. For example, the excimer lamp 602 may be housed in the housing shown in Figure 5.

[0090]

[0099] The excimer lamp 602 in this example has a first electrode 604 and a second electrode 606. The first electrode 604 is an inner electrode and is shown as an electrode on one side of the center of the excimer lamp 602. The inner electrode 604 may be a metal rod. The second electrode 606 is an outer electrode and is shown as a suitable wire mesh electrode on the outside of the excimer lamp 602. The outer electrode 606 may be wire mesh.

[0091]

[0100] In this example, the excimer lamp 602 is coaxial. The envelope of the excimer lamp 602 forms a sealed cavity for containing (e.g., confining) the gas 608. Gas 608 may have the same properties as gas 310 described above in relation to Figure 3. Gas 608 may be configured to emit UV light in response to excitation.

[0092]

[0101] Excitation may take any suitable form, such as electrical excitation from supply 610 of the excimer lamp system 600. Supply 610 is a power supply. Alternatively, two or more power supplies may be used. Supply 610 may be an AC power supply configured to output a voltage up to 20kV (e.g., 20kV peak-to-peak, 20kV AC peak-to-peak). Other arbitrary output voltages such as up to 5kV (e.g., 5kV peak-to-peak, 5kV AC peak-to-peak), 10kV (e.g., 10kV peak-to-peak, 10kV AC peak-to-peak), etc. In another example, power supply 610 may be a DC power supply (e.g., 24VDC power supply, 48VDC power supply) that can be converted from DC voltage to AC voltage via a DC-AC power converter. Furthermore, supply 610 may be connected to a drive circuit, such as the drive circuit 316 in Figure 3, to drive the inner electrode 604 and / or the outer electrode 606.

[0093]

[0102] The excimer lamp 602 in this example has a first dielectric barrier 612. The first dielectric barrier 612 is an inner dielectric barrier and is shown to form an envelope around the inner electrode 604. For example, the inner electrode 604 may be disposed on the inner dielectric barrier 612.

[0094]

[0103] The excimer lamp 602 in this example has a second dielectric barrier 614. The second dielectric barrier 614 is an outer dielectric barrier and is shown to form an envelope around the outer electrode 606. For example, the outer electrode 606 may be disposed on the outer dielectric barrier 614.

[0095]

[0104] The first dielectric barrier 612 and / or the second dielectric barrier 614 may have the same properties as the dielectric 308 described above in relation to Figure 3. For example, the first dielectric barrier 612 and / or the second dielectric barrier 614 may be constructed from a dielectric material (e.g., glass, quartz, sapphire, ceramic). In some embodiments, the first dielectric barrier 612 and / or the second dielectric barrier 614 are opaque to UV light. In some embodiments, the first dielectric barrier 612 and / or the second dielectric barrier 614 are permeable to UV light.

[0096]

[0105] The excimer lamp 602 in this example benefits from the use of a spectral filter (e.g., doped glass, doped quartz, doped sapphire, doped ceramic) in the outer envelope of this structure for all the reasons described herein. For example, the outer dielectric barrier 614, like the window 314 described above in relation to Figure 3, may be manufactured to have spectral filter properties that transmit "good" wavelengths of UV and at least partially block "bad" wavelengths of UV. In such an example, the outer dielectric barrier 614 may be doped to obtain suitable optical properties, including relatively high transmittance of UV light in the 190–230 nm band and relatively low transmittance of long-wavelength UV light, especially longer than 250 nm. Advantageously, doping the outer dielectric barrier 614 avoids the need for a separate filter and may, in some cases, improve off-axis spectral filtering.

[0097]

[0106] Additionally or alternatively, the inner dielectric barrier 612 may be manufactured to have spectral filtering properties that transmit "good" UV wavelengths and at least partially block "bad" UV wavelengths, similar to the window 314 described above in relation to Figure 3. For example, the inner dielectric barrier 612 may be doped to obtain suitable optical properties, including relatively high transmittance of UV light in the 190–230 nm band and relatively low transmittance of long-wavelength UV light, particularly longer than 250 nm. Advantageously, doping the inner dielectric barrier 612 can avoid the need for a separate filter and, in some cases, improve off-axis spectral filtering.

[0098]

[0107] Figure 7 shows graph 700 of the transmittance against wavelength of tested cerium oxide-doped quartz pieces that do not contain titanium oxide. For example, graph 700 can represent the UV light transmittance of tube 402 against wavelength when a portion of the envelope of tube 402 in Figure 4A and / or Figure 4B is made of cerium oxide-doped quartz that does not contain titanium oxide. As another example, graph 700 can represent the UV light transmittance of lamp 502 against wavelength when a portion of the envelope of lamp 502 in Figure 5 is made of cerium oxide-doped quartz. As yet another example, graph 700 can represent the UV light transmittance of the first dielectric barrier 612 and / or the second dielectric barrier 614 against wavelength when a portion of the envelope of the first dielectric barrier 612 and / or the second dielectric barrier 614 in Figure 6 is made of cerium oxide-doped quartz.

[0099]

[0108] Graph 700 shows the wavelength (nm) of UV light on the x-axis (702) and the transmittance (%) on the y-axis (704). As shown in the figure, transmittance decreases significantly as the wavelength increases.

[0100]

[0109] As an example, and as shown in Graph 700, a portion of the envelope of tube 402 in Figure 4A and / or Figure 4B may have a transmittance of at least 50% for light with a wavelength of 222 nm. As another example, and as shown in Graph 700, a portion of the envelope of tube 402 in Figure 4A and / or Figure 4B may have a transmittance of at least 70% for light with a wavelength of 222 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of tube 402 in Figure 4A and / or Figure 4B may have a transmittance of 20% or less for light with wavelengths from 250 nm to 280 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of tube 402 in Figure 4A and / or Figure 4B may have a transmittance of 10% or less for light with wavelengths from 250 nm to 280 nm.

[0101]

[0110] As an example, and as shown in Graph 700, a portion of the envelope of the first dielectric barrier 612 in Figure 6 may have a transmittance of at least 50% for light with a wavelength of 222 nm. As another example, and as shown in Graph 700, a portion of the envelope of the first dielectric barrier 612 in Figure 6 may have a transmittance of at least 70% for light with a wavelength of 222 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of the first dielectric barrier 612 in Figure 6 may have a transmittance of 20% or less for light with wavelengths from 250 nm to 280 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of the first dielectric barrier 612 in Figure 6 may have a transmittance of 10% or less for light with wavelengths from 250 nm to 280 nm.

[0102]

[0111] As an example, and as shown in Graph 700, a portion of the envelope of the second dielectric barrier 614 in Figure 6 may have a transmittance of at least 50% for light with a wavelength of 222 nm. As another example, and as shown in Graph 700, a portion of the envelope of the second dielectric barrier 614 in Figure 6 may have a transmittance of at least 70% for light with a wavelength of 222 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of the second dielectric barrier 614 in Figure 6 may have a transmittance of 20% or less for light with wavelengths from 250 nm to 280 nm. As yet another example, and as shown in Graph 700, a portion of the envelope of the second dielectric barrier 614 in Figure 6 may have a transmittance of 10% or less for light with wavelengths from 250 nm to 280 nm.

[0103]

[0112] Figure 8 is a flowchart 800 representing exemplary processes that may be performed and / or implemented to manufacture, calibrate, test, and / or operate excimer lamps such as excimer lamps 100, 200, 300, and 400 in Figures 1, 2, 3, 4A, 4B, and / or Figure 6, and / or excimer lamp systems such as excimer lamp system 500 in Figure 5 and / or excimer lamp system 600 in Figure 6.

[0104]

[0113] The flowchart 800 in Figure 8 begins with block 802, in which an electrode array containing multiple electrodes is arranged within the housing of the excimer lamp system. For example, one or more users (e.g., excimer lamp manufacturers, technicians, assembly workers, assembly robots, collaborative robots, etc.) may arrange and / or install the multiple electrodes 504, 506 of Figure 5 onto the insulator 524 for final sealing within the housing formed by at least the plate 526 and cover 518 of the excimer lamp system 500 of Figure 5.

[0105]

[0114] In block 804, one or more lamps are positioned within the housing in close proximity to the electrode array. For example, one or more users may attach lamp 502 in Figure 5 to electrodes 504 and 506 for final sealing within the housing.

[0106]

[0115] In block 806, an electrical connection system is arranged within the housing in close proximity to multiple electrodes. For example, one or more users may position the electrical connection system 532, or a portion thereof such as its wires 536, for attachment to electrodes 504 and 506 for final sealing by the housing.

[0107]

[0116] In block 808, the electrical connection system is connected to multiple electrodes and supplies alternating polarity voltages to adjacent electrodes. For example, one or more users may establish an electrical connection between wire 536 and corresponding electrodes 504 and 506 such that when one or more power supplies connected to wire 536 are turned on, an alternating polarity voltage is supplied to adjacent electrodes of electrodes 504 and 506.

[0108]

[0117] In block 810, it is determined whether or not to operate the excimer lamp system. For example, one or more users may decide to calibrate the excimer lamp system 500 by supplying power to the excimer lamp system 500, measuring the electrical and / or thermal characteristics of the excimer lamp system 500, and / or adjusting the components of the excimer lamp system 500 according to the measurement results. In another example, one or more users may decide to test the excimer lamp system 500 to confirm that its operation is within satisfactory and / or expected operating limits (e.g., current, voltage, and / or power consumption, ambient temperature rise, UV light luminescence efficiency, TLV). In yet another example, one or more users may decide to operate the excimer lamp system 500 to sterilize a certain area. In yet another example, one or more users may decide to operate the excimer lamp system 500 for air purification, air sterilization, and / or water sterilization.

[0109]

[0118] If block 810 determines that the excimer lamp system will not be operated, flowchart 800 terminates. For example, the excimer lamp system 500 may be packaged for transport and / or delivery to customers, prepared for sale, and / or a combination of these. If block 810 determines that the excimer lamp system will be operated, flowchart 800 proceeds to block 812.

[0110]

[0119] In block 812, one or more users drive adjacent electrodes among multiple electrodes with alternating polarity voltages. For example, the electrical connector 534 may be connected to one or more power sources, or an AC power source such as an electrical wall outlet. After connecting the electrical connector 534 to a power source, one or more users may supply power to the excimer lamp system 500 by turning on the power and / or activating the power supply so that adjacent electrodes among multiple electrodes 504, 506 are driven with alternating polarity voltages. After driving the electrodes in block 812, the flowchart 800 in Figure 8 ends.

[0111]

[0120] Figure 9 is a flowchart 900 representing exemplary processes that may be performed and / or implemented to manufacture, calibrate, test, and / or operate excimer lamps such as excimer lamps 100, 200, 300, and 400 in Figures 1, 2, 3, 4A, 4B, and / or Figure 6, and / or excimer lamp systems such as excimer lamp system 500 in Figure 5 and / or excimer lamp system 600 in Figure 6.

[0112]

[0121] The flowchart 900 in Figure 9 begins with block 902, in which at least one electrode, disposed on at least one dielectric barrier, is disposed within the excimer lamp system. For example, one or more users (e.g., excimer lamp manufacturers, technicians, assembly workers, assembly robots, collaborative robots, etc.) may position and / or install the inner electrode 604, disposed on the inner dielectric barrier 612 in Figure 6, for final sealing within the housing formed by the components of the excimer lamp system 600 in Figure 6.

[0113]

[0122] In block 904, the electrical connection system is arranged within the housing in close proximity to multiple electrodes. For example, one or more users may place the supply 610 shown in Figure 6 for final sealing by the housing.

[0114]

[0123] In block 906, the electrical connection system is connected to at least one electrode. For example, one or more users may establish an electrical connection between the supply 610 (and / or drive circuit) and the corresponding electrode among electrodes 604 and 606, such that voltage is supplied to electrodes 604 and 606 when the power supply 610 is turned on.

[0115]

[0124] Block 908 determines whether or not to operate the excimer lamp system. For example, one or more users may decide to calibrate the excimer lamp system 600 by supplying power to it, measuring its electrical and / or thermal characteristics, and / or adjusting its components according to the measurement results.

[0116]

[0125] In another example, one or more users may decide to test the excimer lamp system 600 to confirm that its operation is within satisfactory and / or expected operating limits (e.g., current, voltage, and / or power consumption, ambient temperature rise, UV light luminescence efficiency, TLV).

[0117]

[0126] In yet another example, one or more users may decide to operate the excimer lamp system 600 to sterilize a certain area. In yet another example, one or more users may decide to operate the excimer lamp system 600 for air purification, air sterilization, and / or water sterilization.

[0118]

[0127] If block 908 determines that the excimer lamp system will not be operated, flowchart 900 terminates. For example, the excimer lamp system 600 may be packaged for transport and / or delivery to customers, prepared for sale, and / or a combination of these. If block 908 determines that the excimer lamp system will be operated, flowchart 900 proceeds to block 910.

[0119]

[0128] In block 910, one or more users drive at least one electrode with a voltage that emits ultraviolet light. For example, one or more users may power the excimer lamp system 600 by turning on and / or enabling supply 610 so that electrodes 604, 606 are driven with a voltage that emits UV light. After driving at least one electrode in block 910, flowchart 900 in Figure 9 ends.

[0120]

[0129] The techniques that operate according to the principles described herein may be carried out in any suitable manner. For example, flowchart 800 in Figure 8 and / or flowchart 900 in Figure 9 show functional information and / or operation that a person skilled in the art may use to manufacture, produce, calibrate, test, and / or operate an excimer lamp.

[0121]

[0130] It should be understood that some embodiments may take the form of the given method, at least one example thereof. The actions performed as part of this method may be ordered in any suitable manner. Thus, while shown as sequential actions in the exemplary embodiments, embodiments may be constructed in which the actions are performed in a different order than illustrated, which may include performing some actions simultaneously.

[0122]

[0131] Various aspects of the above embodiments may be used individually, in combination, or in various configurations not specifically considered in the above embodiments, and therefore, their application is not limited to the details and arrangement of components listed in the above description or illustrated in the drawings. For example, an aspect described in one embodiment may be combined in any way with an aspect described in another embodiment.

[0123]

[0132] When used herein and in the claims, the phrase "and / or" should be understood to mean "either or both" of the elements thus connected at equal intervals, for example, elements that are sometimes connected and sometimes disjunctive. Similarly, any multiple elements listed using "and / or" should be interpreted as "one or more" of the elements thus connected at equal intervals. Other elements other than those specifically identified by the "and / or" clause may be present at their discretion, whether related to or unrelated to those specifically identified elements. Therefore, as a non-restrictive example, when used in conjunction with open-ended phrases such as "comprising," a reference may refer to A only (optionally including elements other than B) in one embodiment, B only (optionally including elements other than A) in another embodiment, and both A and B (optionally including other elements) in yet another embodiment, and so on.

[0124]

[0133] The indefinite articles "a" and "an," when used herein and in the claims, should be understood to mean "at least one" unless otherwise explicitly indicated.

[0125]

[0134] When used herein and in claims, the phrase “at least one” referring to a list of one or more elements means at least one element selected from any one or more elements in the list of elements, but should be understood not to necessarily include at least one of each element specifically enumerated in the list of elements, nor to exclude any combination of elements in the list of elements. This definition also allows for the optional presence of elements other than those specifically identified in the list of elements to which the phrase “at least one” refers, whether related to or unrelated to those specifically identified elements. Therefore, as a non-limiting example, “at least one of A and B” (or equivalently, “at least one of A or B” or equivalently, “at least one of A and / or B”) may refer to, in one embodiment, at least one A comprising two or more optionally selected elements, where B is absent (and other elements are optionally included); in another embodiment, at least one B comprising two or more optionally selected elements, where A is absent (and other elements are optionally included); in yet another embodiment, at least one A comprising two or more optionally selected elements, and at least one B comprising two or more optionally selected elements (and other elements are optionally included), and so on.

[0126]

[0135] The use of ordinal terms such as “first,” “second,” and “third” in a claim to modify a claim element does not, in itself, imply priority, precedence, or order of one claim element relative to another, nor does it imply a temporal order in which the actions of the method are performed, but is merely used as a label to distinguish claim elements, to distinguish another element having the same name as a claim element having the same name (except for the use of ordinal terms).

[0127]

[0136] Furthermore, the expressions and terms used herein are for illustrative purposes only and should not be considered limiting. The terms “include,” “equip,” “have,” “contain,” “involve,” and their variations herein are intended to encompass the items listed therein and their equivalents, as well as any additional items. The use of “combined” or “connected” is intended to refer to circuit elements or signals that are directly connected to one another or connected via intermediate components.

[0128]

[0137] It should be understood that all definitions defined and used herein take precedence over dictionary definitions, definitions in literature incorporated by reference, and / or the ordinary meanings of the defined terms.

[0129]

[0138] The term "exemplary" is used herein to mean serving as an example, example, or illustration. Therefore, unless otherwise indicated, embodiments, examples, processes, features, etc. described herein as exemplary should be understood as illustrative examples, not as preferred or advantageous examples.

[0130]

[0139] The terms “approximately,” “substantially,” and “about” may, depending on the embodiment, be used to mean within ±20%, ±10%, ±5%, and ±2% of the target value. The terms “approximately” and “about” may include the target value.

[0131]

[0140] Having thus described several aspects of at least one embodiment, it should be understood that various changes, modifications, and improvements are readily apparent to those skilled in the art. Such changes, modifications, and improvements are intended to be part of this disclosure and to be included in the spirit and scope of the principles described herein. Thus, the foregoing description and drawings are merely examples.

[0132]

[0141] Various embodiments, including but not limited to the following embodiments, are described in this disclosure.

[0133]

[0142] 1. An excimer lamp comprising a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm.

[0143] 2. An excimer lamp according to embodiment 1, wherein at least a portion of the lamp envelope contains cerium oxide-doped quartz.

[0144] 3. An excimer lamp according to embodiment 1 or embodiment 2, wherein at least a portion of the lamp envelope is substantially free of titanium oxide.

[0145] 4. An excimer lamp according to any of embodiments 1 to 3, wherein at least a portion of the lamp envelope has a transmittance of at least 50% for light with a wavelength of 222 nm.

[0146] 5. An excimer lamp according to any of embodiments 1 to 4, wherein at least a portion of the lamp envelope has a transmittance of at least 70% for light with a wavelength of 222 nm.

[0147] 6. An excimer lamp according to any of embodiments 1 to 5, wherein at least a portion of the lamp envelope has a transmittance of 20% or less for light with a wavelength of 250 nm to 280 nm.

[0148] 7. An excimer lamp according to any of embodiments 1 to 6, wherein at least a portion of the lamp envelope has a transmittance of 10% or less for light with a wavelength of 250 nm to 280 nm.

[0149] 8. A dielectric comprising at least one side of a sealed cavity, the dielectric having a doped surface, Electrodes disposed on the doped surface of the dielectric, An excimer lamp equipped with [a specific feature].

[0150] 9. An excimer lamp according to embodiment 8, further comprising a sealed cavity containing a gas capable of emitting ultraviolet light in response to the excitation of electrodes.

[0151] 10. An excimer lamp according to embodiment 9, wherein the doped surface is constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

[0152] 11. An excimer lamp according to any of embodiments 8 to 10, further comprising a power supply for driving electrodes.

[0153] 12. An excimer lamp according to any of embodiments 8 to 11, wherein the dielectric material is glass, quartz, sapphire, or ceramic material.

[0154] 13. An excimer lamp according to any of embodiments 8 to 12, wherein the electrodes are metal rods or wire mesh.

[0155] 14. An excimer lamp according to any of embodiments 8 to 13, wherein the electrode is a first electrode and further comprises a second electrode.

[0156] 15. An excimer lamp according to embodiment 14, wherein the first electrode is a metal rod and the second electrode is a wire mesh.

[0157] 16. The dielectric is the first dielectric, and the doped surface is the first doped surface, A second dielectric comprising at least one side of a sealed cavity, the second dielectric having a second doped surface, A second electrode disposed on a second doped surface, An excimer lamp according to any of embodiments 8 to 13, further comprising the above.

[0158] 17. A lamp having a dielectric material forming at least one side of a sealed cavity, Electrodes arranged on the surface of the dielectric, A window with a doped surface, An excimer lamp system equipped with [specific features / features].

[0159] 18. An excimer lamp system according to embodiment 17, further comprising in a sealed cavity a gas capable of emitting ultraviolet light from a window in response to the excitation of an electrode.

[0160] 19. An excimer lamp system according to embodiment 18, wherein the doped surface is constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

[0161] 20. An excimer lamp system according to embodiment 18, wherein a sealed cavity comprises a second doped surface constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

[0162] 21. An excimer lamp system according to any of embodiments 17 to 20, wherein the window is made of quartz or sapphire material.

[0163] 22. An excimer lamp system according to any one of embodiments 17 to 21, further comprising a cover attached to a window to form the housing of the excimer lamp system.

[0164] 23. An excimer lamp system according to any of embodiments 17 to 22, further comprising a lamp support structure mounted in a sealed cavity.

[0165] 24. An excimer lamp system according to any one of embodiments 17 to 23, further comprising a gasket attached to a window and a lamp support structure.

[0166] 25. An excimer lamp system according to embodiment 24, wherein the gasket is resistant to ultraviolet light.

[0167] 26. A method for operating an excimer lamp having a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm. A method comprising driving electrodes with a voltage to emit UV light.

[0168] 27. The method according to embodiment 26, further comprising controlling a power supply that provides voltage.

[0169] 28. A method for operating an excimer lamp system comprising a lamp having a dielectric forming at least one side of a sealed cavity, electrodes disposed on the surface of the dielectric, and a window having a doped surface, A method comprising driving electrodes with a voltage to emit UV light.

[0170] 29. The method of embodiment 28, further comprising controlling a power supply that provides voltage.

[0171] 30. An excimer lamp according to embodiment 1, comprising an electrode array disposed on the surface of a lamp envelope, further comprising an electrode array having a plurality of electrodes with alternating polarity disposed at each position of the entirety of at least one dimension of the excimer lamp.

Claims

1. An excimer lamp having a lamp envelope configured to confine a gas within a sealed cavity, An excimer lamp in which at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm.

2. The excimer lamp according to claim 1, wherein at least a portion of the lamp envelope contains cerium oxide-doped quartz.

3. The excimer lamp according to claim 1 or 2, wherein at least a portion of the lamp envelope is substantially free of titanium oxide.

4. The excimer lamp according to any one of claims 1 to 3, wherein at least a portion of the lamp envelope has a transmittance of at least 50% of light with a wavelength of 222 nm.

5. The excimer lamp according to any one of claims 1 to 4, wherein at least a portion of the lamp envelope has a transmittance of at least 70% of light with a wavelength of 222 nm.

6. An excimer lamp according to any one of claims 1 to 5, wherein at least a portion of the lamp envelope has a transmittance of 20% or less for light with a wavelength of 250 nm to 280 nm.

7. An excimer lamp according to any one of claims 1 to 6, wherein at least a portion of the lamp envelope has a transmittance of 10% or less for light with a wavelength of 250 nm to 280 nm.

8. A dielectric comprising at least one side of a sealed cavity, having a doped surface, An electrode disposed on the doped surface of the dielectric, An excimer lamp equipped with [a specific feature].

9. The excimer lamp according to claim 8, further comprising in the sealed cavity a gas capable of emitting ultraviolet light in response to the excitation of the electrode.

10. The excimer lamp according to claim 9, wherein the doped surface is constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

11. An excimer lamp according to any one of claims 8 to 10, further comprising a power supply for driving the electrodes.

12. An excimer lamp according to any one of claims 8 to 11, wherein the dielectric is glass, quartz, sapphire, or a ceramic material.

13. The excimer lamp according to any one of claims 8 to 12, wherein the electrode is a metal rod or a wire mesh.

14. The electrode is the first electrode, An excimer lamp according to any one of claims 8 to 13, further comprising a second electrode.

15. The first electrode is a metal rod, The excimer lamp according to claim 14, wherein the second electrode is a wire mesh.

16. The dielectric is the first dielectric, The doped surface is the first doped surface, A second dielectric comprising at least one side surface of the sealed cavity, the second dielectric comprising a second doped surface, The second electrode disposed on the second doped surface, An excimer lamp according to any one of claims 8 to 13, further comprising the above.

17. A lamp comprising a dielectric material forming at least one side of a sealed cavity, An electrode disposed on the surface of the dielectric, A window with a doped surface, An excimer lamp system equipped with [specific features / features].

18. The excimer lamp system according to claim 17, further comprising in the sealed cavity a gas capable of emitting ultraviolet light from the window in response to the excitation of the electrode.

19. The excimer lamp system of claim 18, wherein the doped surface is constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

20. The excimer lamp system of claim 18, wherein the sealed cavity comprises a second doped surface constructed to prevent the emission of ultraviolet light having a peak wavelength greater than 230 nanometers.

21. An excimer lamp system according to any one of claims 17 to 20, wherein the window is made of quartz or sapphire material.

22. An excimer lamp system according to any one of claims 17 to 21, further comprising a cover attached to the window to form the housing of the excimer lamp system.

23. An excimer lamp system according to any one of claims 17 to 22, further comprising a lamp support structure attached to the sealed cavity.

24. An excimer lamp system according to any one of claims 17 to 23, further comprising a gasket attached to the window and the lamp support structure.

25. The excimer lamp system according to claim 24, wherein the gasket is resistant to ultraviolet light.

26. A method for operating an excimer lamp having a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm. A method comprising driving an electrode with a voltage for emitting the aforementioned UV light.

27. The method of claim 26, further comprising controlling a power supply that provides the voltage.

28. A method for operating an excimer lamp system comprising a lamp having a dielectric forming at least one side of a sealed cavity, an electrode disposed on the surface of the dielectric, and a window having a doped surface, A method comprising driving the electrode with a voltage for emitting UV light.

29. The method of claim 28, further comprising controlling a power supply that provides the voltage.

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