The invention belongs to the technical field of
organic synthesis, and discloses a preparation process of electronic-grade bis (tert-butylamino)
silane. The preparation process comprises the following steps: filling a composite catalyst and tert-
butylamine into a high-pressure reaction kettle, sealing, replacing with an
argon atmosphere, introducing monosilane, stirring and reacting in the
argon atmosphere, cooling, filtering, and fractionating filtrate to obtain a crude product; and then carrying out
supercritical carbon dioxide extraction on the crude product by using
anhydrous isopropanol, carrying out rotary
evaporation to remove isopropanol, dissolving in
anhydrous acetonitrile, electrolyzing, carrying out secondary
filtration, and carrying out
fractionation treatment on the filtrate to obtain the electronic-grade bis (tert-butylamino)
silane. By adding the composite catalyst and introducing the treatment processes such as
supercritical carbon dioxide extraction, the product purity and the reaction yield of the bis (tert-butylamino)
silane preparation process are effectively improved, and the content of chlorides and
metal impurities of the product is reduced at the same time. Therefore, the method has a wider application prospect.