The application discloses a preparation process of electronic-grade trans-1,2-
cyclohexanediaminetetraacetic acid. The preparation process takes industrial-grade 1,2-cyclohexanediamine as
raw material, reacts the 1,2-cyclohexanediamine with electronic-grade
organic acid to generate a water-soluble salt, crystallizes at 0-30 DEG C, filters out the
crystal to reserve the filtrate, adds an alkaline solution to the filtrate, then adds a polar organic
reagent to extract, directly adds an aqueous
bromoacetic acid solution to the
oil phase to react, after the reaction is completed, adds electronic-grade
dilute acid to precipitate trans-1,2-
cyclohexanediaminetetraacetic acid until the PH of the
system is less than or equal to 2, filters and reserves the
solid, washes with pure water, and electronic-grade trans-1,2-
cyclohexanediaminetetraacetic acid is obtained. The method has a clear process
route, can effectively remove
metal ion impurities in the synthesis process, the obtained trans-1,2-cyclohexanediaminetetraacetic acid product has high purity, can be used for preparing high-end
semiconductor cleaning liquid, and meets the strict requirements of advanced processes on the purity of cleaning chemicals.