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Wolframium (W) doped diamond-like coating and preparation method thereof

A diamond coating and diamond layer technology, applied in metal material coating process, coating, metal layered products, etc., can solve problems such as inability to completely eliminate, poor surface roughness, etc., and achieve good oxidation resistance and chemical stability. , Good anti-oxidation performance, wear-resistant and anti-friction performance, high coating hardness

Inactive Publication Date: 2013-12-18
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitations of the preparation principle itself, the droplets in the arc ion plating coating cannot be completely eliminated, resulting in a loose coating structure and poor surface roughness.

Method used

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  • Wolframium (W) doped diamond-like coating and preparation method thereof
  • Wolframium (W) doped diamond-like coating and preparation method thereof

Examples

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Effect test

Embodiment 1

[0030] Embodiment 1 provides a kind of method for preparing tungsten-doped diamond-like coating on the surface of high-speed steel. It should be noted that the tungsten-doped diamond-like coating prepared by the method of the present invention can be used on any black or non-ferrous metal material surface carried out above, not limited to this example.

[0031] Example 1

[0032] (1) Substrate pretreatment: use high-speed steel substrate with hardness HRC=60 after quenching at 1170°C and tempering at 550°C (material: W 18 Cr 4 V) As a substrate, its surface is degreased and polished, then immersed in acetone for ultrasonic cleaning, and then dehydrated with alcohol.

[0033] (2) Put the pretreated substrate on the turret rod in the vacuum chamber of the arc and magnetron sputtering composite coating equipment. Such as figure 1 As shown, the arc and magnetron sputtering composite coating equipment at least includes a vacuum chamber 1, a turret 2, a bias voltage 3, a turret ...

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Abstract

The invention provides a wolframium (W) doped diamond-like coating and a preparation method thereof. The coating comprises a Cr bottom layer, a CrC transition layer and a W doped diamond-like layer, wherein the Cr bottom layer is deposited on the surface of a substrate, the CrC transition layer is prepared on the Cr bottom layer, and the W doped diamond-like layer is prepared on the CrC transition layer. The preparation method comprises the following steps: firstly carrying out plasma cleaning on the substrate, opening a column electric arc Cr target to prepare the Cr bottom layer on the surface of the substrate, opening a plane magnetron sputtering C target to prepare the CrC transition layer on the Cr bottom layer, and finally closing the column electric arc Cr target and opening a plane magnetron sputtering W target to prepare the W doped diamond-like layer on the CrC transition layer. According to the preparation method provided by the invention, the electric arc and magnetron sputtering composite coating technology is adopted, so that the prepared coating is smooth and compact in surface, high in hardness, high in film bonding strength, low in friction coefficient and good in oxidization resistance and chemical stability, and can meet relatively high requirements for oxidization resistance, wear resistance and antifriction performance, therefore the coating has wide application prospects.

Description

technical field [0001] The invention belongs to the field of coating material preparation, in particular to a tungsten-doped diamond-like carbon (DLC) coating and a preparation method thereof. Background technique [0002] Traditional carbon-based superhard coatings, such as Ti-doped or Cr-doped diamond-like carbon (DLC) coatings have excellent properties such as high hardness and low friction coefficient, and are widely used in the field of surface protection of mechanical parts prospects, but the insufficient oxidation resistance of these coatings has limited their further applications. In recent years, in order to reduce the fuel consumption of automobile and motorcycle engines, it is becoming more and more important to solve the wear and oxidation failure of engine sliding parts such as pistons, piston rings and cylinders under high temperature working conditions. In addition, the surfaces of high-speed moving parts such as refrigeration compressor crankshafts and slide...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/35C23C14/06B32B15/04B32B9/04
Inventor 马胜利
Owner XI AN JIAOTONG UNIV
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