Diamond-like carbon coated glass and preparation method thereof

A technology of diamond-like film and coated glass, applied in chemical instruments and methods, glass/slag layered products, sputtering coating, etc., can solve the problems of hard-to-degrade solid waste, PE organic protective film requiring manual peeling, etc. The film surface has a uniform appearance, good protection effect and high hardness.

Inactive Publication Date: 2009-12-16
天津南玻节能玻璃有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a diamond-like coated glass and its preparation method to overcome the defects that the existing PE organic protective film needs to be manually peeled off and is not easily degraded, resulting in a large amount of solid waste

Method used

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  • Diamond-like carbon coated glass and preparation method thereof
  • Diamond-like carbon coated glass and preparation method thereof
  • Diamond-like carbon coated glass and preparation method thereof

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preparation example Construction

[0065] In addition, the present invention provides a preparation method of the diamond-like coated glass, Figure 6 It is a schematic flow sheet of the diamond-like coated glass preparation method of the present invention, as Figure 6 As shown, the method includes the following steps:

[0066] Step 1: providing a glass substrate;

[0067] Step 2: Depositing a functional film layer on the surface of the glass substrate;

[0068] Step 3: Deposit a type of diamond film on the surface of the functional film.

[0069] Wherein, in the step 2 and step 3, there is no specific limitation on the deposition process and the process parameters of the deposition process, wherein, various known deposition methods capable of depositing each film layer can be selected, for example, chemical vapor deposition and cathode Deposition by arc evaporation, etc. In the embodiment of the present invention, all film layers are deposited by magnetron sputtering. At the same time, for various known d...

Embodiment 1

[0093] The present invention is prepared by conventional vacuum magnetron sputtering equipment, and the vacuum series after the process gas is introduced is guaranteed to be 10 -3 Under the condition of mbar-level working atmosphere, use fresh (production date no more than two months) raw construction-grade floats for plating.

[0094] like figure 2 , on the glass substrate 0, a multi-layer functional film layer 1 is plated, and the inner layer of the functional film layer may include TiO 2 layer, NiCr layer, Ag layer, Cu layer, SiO 2 layer, ZnO layer, SnZnO 3 layer and other conventional film materials, and the outer layer 2 is plated with Si 3 N 4 , forming Si 3 N 4 layer, its sputtered thickness can be 10-120nm.

[0095] DLC layer 3: on Si 3 N 4 On the outside of the layer, using a graphite target, sputter an oxide layer C with a thickness of 15-20 nm in an argon gas atmosphere, under the condition of an argon flow rate of 1200 sccm, and a sputtering power of 8 KW...

Embodiment 2

[0106] The present invention is prepared by conventional vacuum magnetron sputtering equipment, and the vacuum series after the process gas is introduced is guaranteed to be 10 -3 Under the condition of mbar-level working atmosphere, use fresh (production date no more than two months) raw construction-grade floats for plating.

[0107] like image 3 , on the glass substrate 0, one or more layers of functional film layer 4, including SnO 2 layer, SiO 2 layer, TiO 2 layer, coated with SiO on the outer layer 5 2 layer, its sputtered thickness can be 20-110nm.

[0108] The outermost protective film layer, that is, the diamond-like film layer 6: in SiO 2 On the outside of the layer, using a graphite target, sputter an oxide layer C with a thickness of 15-20 nm in an argon gas atmosphere, under the condition of an argon flow rate of 1200 sccm, and a sputtering power of 8 KW. After the diamond-like carbon film is plated, the wear resistance and oxidation resistance of the subst...

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Abstract

The invention discloses diamond-like carbon coated glass and a preparation method thereof. The diamond-like carbon coated glass comprises a glass substrate, a functional film layer plated on the surface of the glass substrate, and a diamond-like carbon coated glass plated on the surface of the functional film layer, wherein the functional film layer is a low radiation film layer capable of being toughened, a low radiation film layer capable of not being toughening or a sunlight control film layer, wherein a substance on the outmost layer of the functional film is Si3N4, Ti3N4, TiO2, SnO2, SiO2, ZnO or SnZnO3. The diamond-like carbon film plated by the method has high stability, wear resistance and oxidative resistance, plays roles of preventing scratches and delaying oxidization in processes of glass transportation and storage, has good adhesion with the functional film layer, does not mutually erode and react with other film layers, and is volatilizable after a heat treatment process.

Description

technical field [0001] The invention relates to the technical field of coated glass, in particular to a diamond-like coated glass and a preparation method thereof. Background technique [0002] At present, coated glass has been widely used in various fields due to its excellent performance. However, in the process of transportation and storage, the substrate film layer is easy to scratch and wear, and its silver layer is easy to oxidize. In addition, The physical and chemical properties of coated glass are easy to change after various cold processing and heat treatment, such as slicing, edging, interlayer, etc. To solve this problem, most domestic glass deep-processing enterprises currently use PE organic film to protect the substrate film layer. Can play a certain protective effect. However, when the substrate is used, the protective film needs to be peeled off manually. The protective film cannot be reused and is not easily degraded. The batch use will cause a large amoun...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/04B32B17/06B32B7/02C23C14/35C23C14/06C03C17/34
Inventor 王烁徐伯永宋宇李彬陈可明李鹏
Owner 天津南玻节能玻璃有限公司
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