It is an optics array co-focus ultra-resolution micro three-dimension detection device, which comprises spot light source, calibration lens, microscope array and pinhole array, beam expansion lens, polarization light-splitting lens, a quarter of wavelet, binary iris filter, lens, carrier bench, collection lens, detection probes array and surface array CCD. The spot source forms parallel light through calibration lens into the micro lens array and then forms spot light array onto the beam expansion lens focus plane through pinhole array and forms polarization light through polarization light-splitting lens and a quarter of wavelet and emits onto the object surface to be measured through binary iris filter and lens.