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Three-dimensional super-resolution confocal array scanning and micro-detecting method and device

A detection device and scanning microscopy technology, applied in the field of three-dimensional super-resolution confocal array scanning microscopy detection, can solve the problems of small measurement range, deviation from ideal image points, and reduced measurement accuracy, so as to achieve low production cost and make up for loss of accuracy. , to ensure the effect of measurement accuracy

Inactive Publication Date: 2005-06-29
严格集团股份有限公司
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Problems solved by technology

The former has high accuracy but relatively small measurement range due to the short focal length of the microlens array; while the latter uses array beam spot illumination, and the position of each beam of light off the axis is different, and the corresponding sampling point not only produces certain astigmatism, but also It also deviates from the ideal image point, thus reducing the measurement accuracy of the system

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  • Three-dimensional super-resolution confocal array scanning and micro-detecting method and device

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Embodiment Construction

[0024] The structure of the three-dimensional super-resolution confocal array scanning microscope detection device in this embodiment is as follows figure 1 As shown, the device includes: laser 1, collimator lens 2, microlens and pinhole array 3, lens 4, polarizing beam splitter 5, 1 / 4 wave plate 6, binary pupil filter 7, microscope objective lens 8 , measured object 9, micro-displacement table 10, condenser 11, detection pinhole array 12, area array CCD13, micro-displacement drive control system 14, computer 15 and micro-displacement inductance sensor 16.

[0025] The main device models and parameters of the three-dimensional super-resolution confocal array scanning microscopic detection method and device in this embodiment are as follows:

[0026] In this embodiment, the measuring objective lens 8 is selected as the plan achromat microscope objective lens of 40×0.65 and 60×0.85. The microlens array is: 40×40 units, the unit pitch is 150um, the focal length is 4mm, and the n...

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Abstract

It is an optics array co-focus ultra-resolution micro three-dimension detection device, which comprises spot light source, calibration lens, microscope array and pinhole array, beam expansion lens, polarization light-splitting lens, a quarter of wavelet, binary iris filter, lens, carrier bench, collection lens, detection probes array and surface array CCD. The spot source forms parallel light through calibration lens into the micro lens array and then forms spot light array onto the beam expansion lens focus plane through pinhole array and forms polarization light through polarization light-splitting lens and a quarter of wavelet and emits onto the object surface to be measured through binary iris filter and lens.

Description

technical field [0001] The invention relates to the technical field of surface three-dimensional microstructure measurement, in particular to a three-dimensional super-resolution confocal array scanning microscopic detection method and device. Background technique [0002] Confocal microscopes have been widely used in medicine, biology, lithography, materials and other fields due to their remarkable advantages such as non-contact, high resolution, and three-dimensional digital imaging. The key factors affecting the development of confocal microscope systems are measurement range, measurement speed and Three-dimensional resolution. The vigorous development of micro-optics and micro-electronics has promoted the gradual maturity of binary optical element manufacturing and processing technology, making traditional optical systems develop in the direction of miniaturization, arraying, and integration. Therefore, introducing the binary optical element into the traditional confoca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/02
Inventor 谭久彬黄向东
Owner 严格集团股份有限公司
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