The invention discloses a large
turn angle piezoelectric scanning micromirror integrated by single chips, comprising a micro reflector surface, a piezoelectric micro driver, an angle sensor and a support frame, wherein the reflector surface, the piezoelectric micro driver and the support frame are all manufactured on a same
silicon substrate, and the reflector surface and the piezoelectric micro driver are arranged in the structure of the support frame. In the invention, the micromirror is driven by adopting a mode of piezoelectric drive, and the piezoelectric micro driver comprises a plurality of piezoelectric folded beams, therefore, large angle scanning of the micromirror can be realized under lower work
voltage. The middle part of the micromirror is supported by a pair of torsion beams to enable the micromirror to rotate around the torsion beams, thereby inhibiting translation outside the micromirror surface and increasing the stability of a
system. The invention also integrates the piezoelectric angle sensor and realizes accurate measurement of scanning angles, therefore, an angle detection device is not additionally needed, and the
system volume is reduced. The invention can be widely applied to the fields of micro spectrometers,
optical imaging and the like.