Large turn angle piezoelectric scanning micromirror

A technology of scanning micromirror and large rotation angle, applied in piezoelectric devices/electrostrictive devices, using electric devices, using electromagnetic means, etc., can solve problems such as large deflection angles, high operating voltage, and bulky volume, and achieve increased stability High performance, exquisite design, and the effect of reducing the volume of the optical system

Inactive Publication Date: 2010-10-06
CHONGQING UNIV
View PDF3 Cites 34 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantages are: there is a nonlinear relationship between the electrostatic force of the variable pitch electrostatic drive and the plate displacement, and in order to achieve a larger deflection angle, a higher working voltage (≥50V) is required. A

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Large turn angle piezoelectric scanning micromirror
  • Large turn angle piezoelectric scanning micromirror
  • Large turn angle piezoelectric scanning micromirror

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the preferred embodiments are only for illustrating the present invention, but not for limiting the protection scope of the present invention.

[0038] 1-micro-mirror surface; 2-piezoelectric micro-driver; 3-angle sensor; 4-support frame; 5-silicon structure layer; 7-lower electrode layer; 8-piezoelectric layer; 9-upper electrode layer; 10-reflection Film layer; 11-torsion beam; 12-piezoelectric driving structure; 13-lower electrode; 14-piezoelectric layer; 15-upper electrode; 16-silicon layer I; 17-SiO 2 Layer I; 18-Si wafer layer II; 19-SiO 2 Layer II; 20-lower electrode layer; 21-piezoelectric material layer; 22-upper electrode layer.

[0039] Such as figure 1 with figure 2As shown, the large-angle piezoelectric scanning micromirror of the present invention includes a micro-mirror surface 1, a piezoelec...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a large turn angle piezoelectric scanning micromirror integrated by single chips, comprising a micro reflector surface, a piezoelectric micro driver, an angle sensor and a support frame, wherein the reflector surface, the piezoelectric micro driver and the support frame are all manufactured on a same silicon substrate, and the reflector surface and the piezoelectric micro driver are arranged in the structure of the support frame. In the invention, the micromirror is driven by adopting a mode of piezoelectric drive, and the piezoelectric micro driver comprises a plurality of piezoelectric folded beams, therefore, large angle scanning of the micromirror can be realized under lower work voltage. The middle part of the micromirror is supported by a pair of torsion beams to enable the micromirror to rotate around the torsion beams, thereby inhibiting translation outside the micromirror surface and increasing the stability of a system. The invention also integrates the piezoelectric angle sensor and realizes accurate measurement of scanning angles, therefore, an angle detection device is not additionally needed, and the system volume is reduced. The invention can be widely applied to the fields of micro spectrometers, optical imaging and the like.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to a piezoelectric scanning micromirror with a large rotation angle. Background technique [0002] Micro-optical-electromechanical systems (MOEMS) refers to MEMS (Micro-electromechanical systems) devices and systems that use micro-processing technology for optical systems. Compared with traditional optomechanical electronic systems, MOEMS is smaller, lighter and faster. Scanning micromirror or micromirror array is an important MOEMS device. Under the action of driving force, the mirror surface of the micromirror is deflected to change the reflection angle of the incident beam and realize the scanning of the reflected beam. It can be widely used in medical imaging, spectrometer, barcode reading and other fields. [0003] According to the different driving methods of the micromirror, it is mainly divided into: electrostatic drive, electromagnetic drive, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B26/08H01L41/09G01B7/30
Inventor 温志渝钱蓉蓉陈李温中泉贺学锋
Owner CHONGQING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap