15 results about "Guided-mode resonance" patented technology

The invention discloses a strong dispersion dielectric grating guided mode resonance optical filter insensitive to angles. The filter is based on a strong-dispersion sub-wavelength dielectric grating structure, and the resonant wavelength shows the characteristic of being insensitive to the change of an incident angle. By reducing the thickness of the grating layer and the grating line width, the angle sensitivity of the device can be further reduced. The insensitivity of the wavelength of the device to the angle mainly depends on the intrinsic dispersion characteristic of an excited optical mode in the device, that is, the frequency of the optical mode with strong dispersion changes slowly along with in-plane wave vectors, so that the change of the far-field frequency response along with the angle is obviously slowed down. Based on the principle, an angle-insensitive metasurface device can be designed by using a strong dispersion optical mode. The design method provided by the invention is not only suitable for an optical filter, but also can be popularized to other metasurface devices with strict requirements on angle sensitivity, and has wide application prospects in the fields of optical communication, hyperspectral and multispectral imaging, sensing and the like.

We utilize high-quality-factor (high-Q) metasurfaces patterned either in or adjacent to electro-optical or thermo-optical materials such as lithium niobate, barium titanate, or thermally-sensitive polymers. The metasurface includes nanoantennas that act as dipole emitters; the particular structure and arrangement of nanoantennas can steer light to particular directions or focus light, The electromagnetic metasurface supports one or more guided mode resonances. The metasurface also includes a perturbation superposed on the metasurface features and configured to couple free-space radiation to the guided mode resonances.

The invention discloses an angle-insensitive optical light trapping filter based on local guided-mode resonance, which is characterized in that a metal-medium composite planar waveguide grating method is adopted, a metal grating structure is embedded into a multilayer film, and when a near-infrared band is incident to the thickness-constrained multilayer film structure at an angle of 0-70 degrees, the metal grating structure is embedded into the multilayer film structure. Under the periodic constraint of the metal grating, a localized guided-mode resonance effect is generated, under the periodic constraint of the metal grating, a strong light field limitation and coupling effect is generated, a spectral response curve with a sharp stop-band characteristic is formed, the thickness of the waveguide layer is adjusted, and tuning of the working wavelength is achieved. Compared with the prior art, the device has a localized guided-mode resonance effect, generates strong light field limitation and coupling effect under periodic constraint of the metal grating, forms a spectral response curve with sharp stop-band characteristics, and greatly inhibits the angle sensitivity problem caused by transverse wave vector change. The method can be widely applied to the fields of optical communication, spectral analysis, imaging systems and the like, and improves the reliability and application angle range of the optical system.

This invention provides a silicon-based grating structure, fabrication method, and mid-infrared dual-color filter device for mid-infrared resonant filtering. The structure includes: a silicon-based substrate; an anti-reflection stacked structure disposed on the silicon-based substrate, the anti-reflection stacked structure being composed of a material with low absorption in the mid-infrared band; and a periodic grating layer disposed on the anti-reflection stack, the grating layer being composed of a silicon-based dielectric material with low light absorption in the mid-infrared band. The grating structure achieves a peak transmittance of >90% and an average transmittance of >85% in both the 3.0±0.1μm and 5.0±0.1μm bands by using diffraction coupling to excite guided mode resonance in conjunction with the anti-reflection stacked structure.

This invention discloses an ultra-narrowband optical filter and its design method, belonging to the field of micro-nano optical device technology. It is a reflective all-dielectric guided-mode resonant filter, comprising, from bottom to top, a substrate, a planar waveguide layer, a single-layer one-dimensional subwavelength grating layer, and a single-layer anti-reflection film. The design method includes initial tuning of the resonant wavelength, optimization of the ultra-narrowband bandwidth, fine-tuning of the resonant wavelength, and synergistic optimization of sideband suppression. It clarifies the priority of adjusting each structural parameter, achieving narrowband reflection filtering through the guided-mode resonance effect of the grating and waveguide layer. Through the synergistic design of the single-layer anti-reflection film and the resonant structure, non-resonant broadband background reflection is suppressed without disrupting the ultra-narrowband resonant peak. At the target filtering wavelength of 1064nm, an ultra-narrowband filter with a peak reflectivity of 100% and a full width at half maximum (FWHM) as low as 0.03nm can be achieved, with a sideband suppression ratio exceeding 30dB. This solves the core defect of existing technologies that cannot simultaneously achieve ultra-narrowband filtering and high sideband suppression ratio.

The application discloses a kind of based on longitudinal graded grating structure's guided mode resonance refractive index detection device and method, belong to optical sensing and image spectral detection technical field, including the light source, light isolator, polarization controller, collimating beam expander in turn connection, guided mode resonance sensing chip, image detector and signal processing unit;Guided mode resonance sensing chip is transmission type structure, its top is equipped with the strip-shaped nanostructure of periodic consistent but longitudinal gradient, its below is equipped with image detector for receiving the transmission light signal after passing through guided mode resonance sensing chip, generates transmission light image and transmits transmission light image to signal processing unit;Signal processing unit is used to analyze transmission light image, and according to structure mapping model inversion refractive index of medium to be measured.The application introduces longitudinal structure gradient characteristics in guided mode resonance chip, realizes the spatial distribution control of monochromatic light resonance response position, finally realizes the image refractive index sensing without beam splitter.

The invention relates to the field of MEMS inertial measurement, discloses a sub-wavelength grating guided-mode resonance triaxial micro gyroscope and an angular velocity measurement method, and aims to improve the detection precision of the gyroscope. Comprising a substrate base, a sensitive structure layer and a grating layer, the sensitive structure layer is arranged on the substrate base and comprises a first axis gyroscope unit, a second axis gyroscope unit and a third axis gyroscope unit which are integrated on the same silicon-based substrate. Each gyroscope unit comprises a driving mass block, a detection mass block and a lower-layer sub-wavelength grating; and the driving mass block is connected with the outer frame of the sensitive structure layer through the driving beam structure. The detection mass block is connected with the outer frame or the driving mass block through a detection beam structure; the lower-layer sub-wavelength grating is arranged on the detection mass block; the grating layer is fixedly arranged above the sensitive structure layer through a supporting structure, and a preset air gap is formed between the grating layer and the sensitive structure layer; the grating layer is provided with upper-layer sub-wavelength gratings which are in one-to-one correspondence with the lower-layer sub-wavelength gratings and have the same structural parameters with the lower-layer sub-wavelength gratings.

This invention discloses a guided-mode resonant slot optical path system for a biochip detection device. The system comprises a modular, modular body integrally formed using additive manufacturing of polymer materials. It includes an illumination slot subsystem, a vertical slot subsystem, and an imaging focusing slot subsystem. The illumination slot subsystem defines the horizontal propagation direction of the main illumination optical axis through a series of optical element mounting brackets fixed to the illumination slot plate. The vertical slot subsystem is vertically connected to the illumination slot subsystem and the imaging focusing slot subsystem via a vertical slot side plate, forming a periscope-like vertical deflection optical path structure. The imaging focusing slot subsystem defines the receiving direction of the imaging optical axis and the emission and reflection directions of the infrared focusing optical axis through a series of optical element mounting brackets fixed to the imaging focusing slot plate. All optical elements are defined by the geometric tolerances of the mounting brackets, and the subsystems are rigidly assembled. This invention achieves automatic alignment of the entire optical path.

This invention relates to a flexible nanolaser and its fabrication method. The flexible laser nanolaser comprises a flexible polymer cladding layer and a dielectric material waveguide layer. The flexible polymer cladding layer is a flexible polymer substrate with a flexible polymer hole array. The dielectric material waveguide layer comprises a top dielectric material thin film layer and a dielectric material pillar array structure filling the holes in the flexible polymer hole array. In this invention, the flexible laser nanolaser is excited by optical pumping, generating guided mode resonance in the dielectric material waveguide layer, thereby amplifying the light and ultimately generating laser light. The flexible nanolaser of this invention has good bending resistance and can still function normally after deformation under stress, and can be applied to fields such as bio-implantable detection, flexible optoelectronic integrated devices, and wearable mechanical interaction devices.

The application discloses a refractive index detection device and method based on a width-gradually-changing guided-mode resonance grating, and belongs to the technical field of optical sensing. Light emitted by a light source is incident on a guided-mode resonance sensing chip after passing through a light isolator, a polarization controller and a collimating and expanding mirror. The guided-mode resonance sensing chip is of a transmission type structure, and a strip-shaped nano structure with gradually-changing strip width is arranged on the top of the guided-mode resonance sensing chip. An image detector is arranged below the guided-mode resonance sensing chip. The image detector receives a transmission light signal after passing through the guided-mode resonance sensing chip, generates a transmission light image, and transmits the transmission light image to a signal processing unit for analysis. The refractive index of a medium to be measured is inversely calculated according to the mapping relationship between the strip width and the refractive index. The application maps the resonance wavelength into image position information through spatial structure design, and does not need a traditional light splitting device for refractive index inversion, so that high-precision, image-based and real-time refractive index detection is realized, and the problems of the traditional guided-mode resonance sensor, such as the need of complex optical elements, large volume and high cost, are solved.

The application discloses a polarization-independent ultra-narrow-band high-transmission filter based on a guided-mode resonance principle, which comprises, from bottom to top, a substrate, a first dielectric layer, a waveguide layer, a buffer layer, a metal grating, a second dielectric layer and a third dielectric layer. The metal grating has structural symmetry and is a periodic nanowire array, and the cross section of the nanowire is square or circular. In the visible light range, different central wavelengths can be selected by changing the period of the metal grating. The second and third dielectric layers can effectively suppress sidebands and improve the color purity of filtered light. The buffer layer and the first dielectric layer can adjust the full width at half maximum of the transmission peak, and the first dielectric layer can also improve the transmittance of the filter. The filter has the advantages of high transmission peak, extremely narrow full width at half maximum, polarization independence, high optical quality, high light energy utilization rate and the like, and has wide application in the fields of spectral imaging, biological molecule detection and interaction, medical diagnosis and the like.

The invention provides a local guided mode resonance structure and a manufacturing method thereof, and the structure comprises a substrate; the reflecting layer is arranged on one surface of the substrate; the dielectric layer is arranged on the surface, away from the substrate, of the reflecting layer, and the refractive index of the dielectric layer is larger than or equal to a preset refractive index threshold value; the micro-structure array is embedded into the dielectric layer, the micro-structure array comprises a plurality of micro-structures, and a gap cavity with a sub-period spatial scale exists between every two adjacent micro-structures. The local guided mode resonance structure can meet the requirements of high efficiency, wide angle and narrow band at the same time.

The invention discloses a high-Q-value terahertz lattice slit waveguide micro-fluidic sensor, which is characterized in that a super-structure surface with perturbation metal super atoms is designed according to a surface lattice resonance principle, so that the selective absorption characteristic of a micro-fluidic chip on incident terahertz waves is enhanced, and the Q value of the micro-fluidic chip is increased; by combining the characteristics of the slit waveguide in the micro-fluidic chip, the surface lattice resonance is further converted into guided mode resonance through mode matching, so that the sensing sensitivity is improved, and a high Q value and high sensitivity are realized at the same time. The design method can be expanded to a dual-frequency working mode through polarization multiplexing, and dual-frequency high-performance terahertz sensing is realized. On the premise of an existing micro-fluidic chip architecture, a novel electromagnetic resonance mode excitation and conversion method is constructed, the capturing capacity of the micro-fluidic chip on tiny refractive index change of a micro liquid sample in a terahertz frequency band is improved, and the wide application prospect of the micro-fluidic chip in the fields of terahertz fingerprint spectrum recognition and trace biochemical quantity sensing is shown.

The application discloses a kind of performance dynamically adjustable optical fiber F-P cavity MEMS sensor and preparation method thereof, belong to optical fiber sensor technical field, include sapphire sensitive structure, sapphire substrate structure, optical fiber sleeve, guided mode resonance grating, F-P cavity and optical fiber, high refractive index dielectric layer, the present application is by introducing guided mode resonance grating on sapphire surface to realize the optimization of sapphire interface reflection spectrum, and then can be designed and controlled F-P interferometer spectrum precision for different demodulation methods, to realize sensor performance regulation and control.Compared with the traditional F-P cavity sensor sensitive structure surface plating with fixed reflectivity metal reflection film and other ways, the present application can realize interface reflectivity adjustment, to realize sensor dynamic performance regulation and control facing different test application scenarios.