127 results about "Guided-mode resonance" patented technology

Performing high-resolution determination of the relative shift of the spectral properties of a biosensor. The shift in the resonance peak of the biosensor is indicative of the amount of material bound to the surface of the biosensor. A preferred biosensor is a Guided Mode Resonant Filter Biosensor (GMRFB). In one aspect of the invention, curve fitting is used to determine the relative location of the spectrum of the unexposed biosensor with respect to those spectra that are altered (e.g., shifted) by the presence of materials bound to the surface of the biosensor. In an alternative embodiment, the cross correlation function is used to detect spectral peak offsets between a reference spectrum and a spectrum measured from an exposed biosensor. In yet another alternative, maximal likelihood estimation techniques are used to determine the spectral shift or offs.

The invention relates to an array multispectral optical filter and a manufacturing method thereof, belongs to the field of a micro-nano optical filter and solves the problem of integration of multichannel array detection in an existing nanofluidic chip. The optical filter only comprises the following four layers of structures: a two-dimensional metal grating layer, a buffer layer, a waveguide layer and a substrate. The invention also provides the manufacturing method of the optical filter, which utilizes a guided mode resonance principle of a two-dimensional metal grating and implements selection of different wavelengths by regulating the period of the grating. By the thickness of the buffer layer, the half-wave bandwidth of the cut-off wavelength also can be regulated. By regulating a suitable duty cycle of the two-dimensional metal grating layer, side lobes can be reduced. Therefore, relative to other turnable optical filters, the array multispectral optical filter manufactured by the method disclosed by the invention has the outstanding advantages of simple structure, low side lobes, adjustability of the half-wave bandwidth, high transmittance, no relation with polarization and the like. After the optical fiber disclosed by the invention is adopted, the integration of the nanofluidic chip can be implemented.

Nonlinear optical filters and associated methods. In a representative embodiment, a nonlinear optical filter includes a grating and a dye-doped polymer layer coupled to the grating. The dye-doped polymer layer may include ionic self-assembled layers. An associated method includes: providing a nonlinear filter comprising a grating and a dye-doped polymer layer coupled to the grating, directing an input broadband optical wave upon the filter, and backward diffracting the broadband optical wave from the grating as an output narrowband optical wave. The output narrowband optical wave may include a second harmonic beam.

A guided mode resonance solar cell includes a solar cell body and a guided mode resonance unit. The solar cell body is used for converting optical energy into electrical energy. The guided mode resonance unit is formed on the solar cell body, and includes a grating structure and a waveguide structure. The grating structure includes multiple sub-wavelength light pillars. When a light emitted from a light source is incident onto the grating structure, a resonant of the light occurs in the grating structure to facilitate trapping the light in the waveguide structure and elongating an optical path length.

Described herein are spectrometers comprising one or more wavelength-selective filters, such as guided mode resonance filters. Some of the spectrometers described herein are configured for obtaining absorbance spectra in a discrete fashion by measuring absorbances of a sample at multiple discrete wavelengths or wavelength bands. In another aspect, methods are also provided for obtaining spectra, images and chemical maps of samples in a discrete fashion.

A hybrid guided-mode resonance (GMR) grating, an optical filter and a method of optical filtering employ distributed Bragg reflection. The hybrid GMR grating includes a waveguide layer that supports a GMR having a GMR resonant frequency. The hybrid GMR grating further includes a diffraction grating that couples a portion of a signal incident on the hybrid GMR grating into the waveguide layer; and a distributed Bragg reflector (DBR) that reflects another portion of the incident signal. The coupled portion of the incident signal has a frequency corresponding to the GMR resonant frequency. The reflected portion has a frequency away from the GMR resonant frequency. The optical filter includes the hybrid GMR grating and a coupler. The method includes coupling an optical signal into the hybrid GMR grating and further coupling a reflected signal out of the hybrid GMR grating.

A guided mode resonance device, comprising—a substrate,—a waveguide,—a grating structure associated with said waveguide, said grating structure being arranged to an incident surface of said substrate, said incident surface being intended to receive an incident light beam provided by at least one light source, said incident light beam having an incident angle, defined relative to the normal of said waveguide, said grating structure comprising at least one elementary structure comprising at least a first-type grating structure and at least a second-type grating structure,—wherein:—said waveguide is arranged to transfer light from_the first-type grating structures to the second-type grating structure and also to transfer light from the second-type grating structures to the first-type grating structure,—said first-type grating structure is arranged to couple out a first light beam,—said second-type grating structure is arranged to couple out a second light beam,—said first light beam having a different spectral distribution than said second light beam.

The invention discloses a polarization-insensitive meta-material resonance apparatus with an adjustable guided-mode resonance quality factor. The polarization-insensitive meta-material resonance apparatus comprises a planar waveguide and a meta-material unit that is arranged on the planar waveguide and is formed by a metal resonance unit. The meta-material resonance unit having a complex structure includes four metal resonance rings, wherein the four metal resonance rings is symmetric about the center of the resonance unit; and side lengths of the first metal resonance ring and the second metal resonance ring are not equal. Therefore, the resonance apparatus is not sensitive to the polarization. Besides, with the similar raster diffraction effect of the meta-material cladding layer, guided-mode resonance can be realized; and when the sizes of the metal resonance rings are changed, the quality factor of the guided-mode resonance can be adjusted and the mutual effect of the guided mode and the surface mode can be controlled, thereby realizing electromagnetic induction transparency.

The invention relates to an unpolarized tunable guided-mode resonance filter system and a method for measuring a nanometer gap. The system is formed by parallelly placing two same guided-mode resonance filters in an opposite direction. The each guided-mode resonance filter is formed by a substrate layer, a waveguide layer and a grating layer. The guided-mode resonance filter system is an orthogonal double grating system. The grating layers of the two guided-mode resonance filters are parallel and opposite to each other. And stripes are mutually orthogonal. An air gap layer is arranged between the two grating layers. Through measuring the spacing of two split reflection peaks of a TE0 mode or a TM0 mode in a spectral region after incident light passes through the system, a size of the nanometer gap (<100nm) between the two gratings can be obtained. In the invention, an orthogonal double grating structure is adapted to any polarized incident light; separation of the two split reflection peaks of the TE0 mode and the two split reflection peaks of the TM0 mode can be realized; possible interference between the TE0 mode and the TM0 mode during measuring can be avoided.

A silicon bulk-micromachining technology is used to fabricate a GMR filter by exploiting the structure of a suspended silicon nitride (SiNx) membrane on the silicon substrate. A first silicon nitride (SiNx) thin film and a second silicon nitride (SiNx) thin film are formed on opposite sides of the silicon substrate. A first opening is defined in the first silicon nitride (SiNx) thin film, and a grating structure is defined in the second silicon nitride (SiNx) thin film. By etching off a portion of the silicon substrate exposed from the first opening until a portion of the second silicon nitride (SiNx) thin film is exposed from the first opening, a light path space is defined.

The invention mainly provides the influence of thickness of photoresist on an optical filter and an optimization method for the photoresist. The method is characterized in that diffraction grating manufacturing is performed above a waveguide layer; in exposure and development process of the photoresist, the groove depth of the grating manufactured by a final holographic method is not the practical thickness of uniform glue as being affected by the exposure time and development time, so that a layer of non-sensitive photoresist layer is also arranged on a guide mode layer and a diffraction grating layer, which directly affects the width and peak value position of the practically manufactured optical filter. The method realizes the modulating function of unsuccessfully exposed and developed photoresist on the reflection of the optical filter, not only has guiding function for the thickness maximum of the uniform glue in the practical preparation process, but also can optimize the thickness of the undeveloped photoresist to adjust the process parameters of other later period optical filter according to the results. The method is convenient to implement and can be used for the field of optical filter manufacturing and biological sensing.

The invention relates to a guided mode resonance wave shifting device for scintillation detection. The guided mode resonance wave shifting device comprises a substrate layer and a luminous film layer arranged on the substrate layer, and also comprises a photonic crystal layer arranged on the luminous film layer, wherein the photonic crystal layer consists of dielectric cylinders arranged into a period array in a triangular structure; the dielectric cylinders are vertically arranged on the upper surface of the luminous film layer; the materials of the dielectric cylinders are transparent for the light emitted by the luminous film layer. Compared with the prior art, the guided mode resonance wave shifting device has the advantages that the conversion efficiency and the time distinguishing capability are high; high light emission direction regulation and control capability is also realized; the detection efficiency on scintillation fluorescence such as ultraviolet rays can be improved.

The present invention provides a guided mode resonance grating narrow line width vertical-cavity surface emitting laser and a preparation method thereof. According to the present invention, a guided-mode resonant effect of a micro-nano grating is utilized, and a sub-wavelength guided-mode resonant microcavity structure of high reflection and narrow resonance line width is used as a part of the vertical-cavity surface emitting laser, thereby achieving the purposes of narrower laser line width, wider high reflection bandwidth, smaller size and stable polarization control. According to the present invention, by utilizing the guided-mode resonant effect of the micro-nano grating, and by the equivalent medium theoretical calculation, a weak modulated sub-wavelength grating guided-mode resonant microcavity structure of which the resonant wavelength is 852 nm is designed, and a wall used for controlling the mode line width is added between a grating layer and a waveguide layer, so that the mode line width can reach 1 nm or less. Relative to a conventional VCSEL, the narrow line width vertical-cavity surface emitting laser has the narrower laser line width, the wider high reflection bandwidth, the smaller size and the stable polarization control.

A multi-wavelength laser array is achieved by using a wavelength selectable optical device as a feedback mirror for a plurality of lasers. The wavelength of reflected light from the optical device depends upon the parameters in the local reflection positions of the optical device along the direction as determined by guided-mode resonance. Thus, the multi-wavelength laser array is able to emit a plurality of laser beams with desired wavelengths, each within the gain curve of its active element.

A system for performing Raman spectroscopy comprises a waveguide layer configured with at least one array of features, the at least one array of features being configured to provide guided-mode resonance for at least one wavelength of electromagnetic radiation; and at least one fluid channel disposed in the waveguide layer. An analyte sensor comprises an electromagnetic radiation source configured to emit a range of wavelengths of electromagnetic radiation, the system for performing Raman spectroscopy, and at least one photodetector configured to detect Raman scattered light.

The invention discloses a method for realizing guided-mode resonance filtering through a single gradient-material grating structure, and belongs to the field of an optical communication and MOEM (micro optical electro mechanical) system. The method is characterized in that an optical thin film, the refractive index of which increases progressively with the thickness, is prepared on a substrate, and by etching the refractive-index-gradient thin film, a guided-mode resonant grating structure is obtained, and furthermore, guided-mode resonance filtering can be realized; on the basis of the above, by selecting different etching depths, channel position of a filter can be adjusted; and with the etching depth being kept unchanged, by reducing gradient coefficient, multichannel filtering can be realized. The filtering performance of the guided-mode resonant grating structure is highly insensitive to change of substrate refractive index, so that even if the substrate refractive index is higher than the maximum value of the refractive index of the gradient thin film, the guided-mode resonance filtering performance keeps excellent; and the method breaks away from the limit that refractive index of a waveguide layer in a conventional guided-mode resonance filter needs to be higher than the substrate refractive index, and is more advantageous in practical application.

The invention relates to a thin film amorphous silicon solar cell based on an antireflective structure and guided-mode resonance. The thin film amorphous silicon solar cell used for visible wavelengths ranging from 300 nanometers to 800 nanometers is characterized in that the top antireflective film of the solar cell is 55-60 nanometers in thickness, the period of the middle grating absorption layer is 505-515 nanometers, the middle grating absorption layer is 95-105 nanometers in thickness and 0.7-0.75 in duty ratio, and a waveguide absorption layer is 45-55 nanometers in thickness; when light comes in vertically, the average integral absorption efficiency of the light in the wavelengths of 300-800 nanometers is higher than 66%, the average integral absorption efficiency is large in angle independence, and the average integral absorption efficiency is higher than 60% in the incidence angle of 0-66 degrees. The thin film amorphous silicon solar cell based on the antireflective structure and guided-mode resonance has the advantages that the solar cell is machined by an electronic beam direct writing device combining with micro-electronics deep etching, and the solar cell is convenient in material taking, low in manufacturing cost, capable of achieving large-batch production, and promising in application prospect.

The invention discloses a method for dynamically controlling the reflection spectrum bandwidth of a guided-mode resonance filter and belongs to the fields of optical communication and micro electro mechanical systems. A coupling grating provided by the invention is composed of double equivalent grating bodies with the thickness one half of the thickness of an absentee layer and stacked vertically, for TM polarized incident light, structural magnetic field distribution is changed nearby a Brewster angle by controlling micro/nanoscale relative lateral movement between the two grating bodies, and continuous control of the reflection spectrum bandwidth of the guided-mode resonance filter is achieved. In the lateral movement process of the grating bodies, a peak wavelength shift phenomenon caused by the relative lateral movement between the grating bodies is not obvious, but the reflection spectrum bandwidth changes remarkably, and excellent anti-reflection filtering characteristics of the filter are kept when the two grating bodies produce the relative lateral movement. By finely adjusting an incidence angle, reflection peak shift caused by the relative lateral movement of the two grating bodies can be compensated.

Discloses an aluminum nitride-based guided-mode resonant multichannel light filter and a preparation method thereof. The aluminum nitride-based guided-mode resonant multichannel light filter comprises a silicon substrate layer, an aluminum nitride waveguide layer and an aluminum nitride optical grating; the aluminum nitride optical grating is composed of a plurality of rows of linear optical grating arrays different in cycles. The aluminum nitride-based guided-mode resonant multichannel light filter of a visible light waveband is realized on a silicon substrate aluminum nitride chip; techniques such as electron beam lithography, ion beam etching, photoetching and deep reactive ion etching are adopted to define and etch the device, and a back registration process and a deep silicon etching technique are adopted to remove the silicon substrate under the aluminum nitride optical grating, so that the aluminum nitride layer is completely suspended. The light filter realizes multichannel light filtration within the visible light waveband by use of the guided-mode resonance characteristic of the optical gratings different in cycle.

The present invention discloses an all-dielectric metamaterial EIT (electromagnetically induced transparency)-like resonance device. The all-dielectric metamaterial EIT (electromagnetically induced transparency)-like resonance device comprises a planar waveguide and a two-dimensional periodic dielectric resonator; the planar waveguide comprises a first dielectric layer; the two-dimensional periodic dielectric resonator is composed of cuboid dielectric bars which are arranged at the upper surface of the first dielectric layer and are in two-dimensional periodic distribution; the refractive index of the cuboid dielectric bars is greater than the refractive index of the first dielectric layer; the two-dimensional periodic dielectric resonator has a resonant characteristic, so that the two-dimensional periodic dielectric resonator can generate a series of Mie resonance according to the Mie resonant principle; the two-dimensional periodic dielectric resonator has a grating-like effect, so that the two-dimensional periodic dielectric resonator can make incident waves diffracted and coupled with the guided mode of the planar waveguide; and an EIT-like effect can be generated through controlling the interaction of Mie resonance and guided mode resonance. With the all-dielectric metamaterial EIT (electromagnetically induced transparency)-like resonance device of the invention adopted, high-quality factor resonance and high resonance intensity can be achieved, and a high group refractive index can be obtained.

The invention discloses an unmarked guided-mode resonance Brewster sensor detection device. The unmarked guided-mode resonance Brewster sensor detection device comprises an incident light source assembly, a guided-mode resonance grating sensor and a detection optical assembly, wherein the incident light source assembly comprises a laser light source and a beam expander group; the guided-mode resonance grating sensor comprises a grating layer, a waveguide layer and a substrate; the detection optical assembly comprises a CCD linear array and a drive circuit thereof; the beam expander group is installed in front of the laser light source, the waveguide layer is installed above the substrate, the grating layer is installed above the waveguide layer, and the CCD linear array is installed right above the grating layer. The unmarked guided-mode resonance Brewster sensor detection device is high in integration degree and suitable for detecting high-flux samples; the design for entering a guided-mode resonance optical device at a Brewster angle is favorable for actually establishing a biochemical detection device and improving the unmarked optical detection sensitivity.