Guided mode resonance grating narrow line width vertical-cavity surface emitting laser (VESEL) and preparation method thereof

A technology of vertical cavity surface emission and guided mode resonance, which is applied in the direction of semiconductor lasers, lasers, laser components, etc., can solve the problem that the light source cannot meet the needs of big data information systems, and achieve simple structure, narrow laser line width, and small volume Effect

Inactive Publication Date: 2017-10-17
BEIJING UNIV OF TECH
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Problems solved by technology

With the rapid development of science and technology in the information age, people have higher and higher requirements for the performance of core light sources. Accurate measurement

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  • Guided mode resonance grating narrow line width vertical-cavity surface emitting laser (VESEL) and preparation method thereof
  • Guided mode resonance grating narrow line width vertical-cavity surface emitting laser (VESEL) and preparation method thereof
  • Guided mode resonance grating narrow line width vertical-cavity surface emitting laser (VESEL) and preparation method thereof

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Embodiment Construction

[0024] The narrow linewidth vertical cavity surface emitting laser designed by the present invention can be combined with figure 2 -- Figure 9 , introduces its preparation method in detail:

[0025] Step 1: If figure 2 As shown, the metal organic chemical vapor deposition (MOCVD) was used to alternately grow n-Al on the n-type GaAs substrate 0.1 Ga 0.9 As layer and n-Al 0.9 Ga 0.1 A total of 36 pairs of As layers constitute the lower DBR; then grow Al 0.2 Ga 0.8 As / Al 0.12 In 0.18 Ga 0.7 As quantum well structure constitutes the active region; re-growth Al 0.98 Ga 0.02 As oxidizes the current confinement layer; then grows a few pairs of Al 0.9 Ga 0.1 As / Al 0.1 Ga 0.9 DBR on As; final growth doping concentration is 1x10 19 / cm -3 P-type Al 0.1 Ga 0.9 As, it is convenient to form a good ohmic contact with the injection electrode;

[0026] Step 2: If image 3 As shown, a cylindrical step with a diameter of 60 μm was etched using a combination of photolitho...

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Abstract

The present invention provides a guided mode resonance grating narrow line width vertical-cavity surface emitting laser and a preparation method thereof. According to the present invention, a guided-mode resonant effect of a micro-nano grating is utilized, and a sub-wavelength guided-mode resonant microcavity structure of high reflection and narrow resonance line width is used as a part of the vertical-cavity surface emitting laser, thereby achieving the purposes of narrower laser line width, wider high reflection bandwidth, smaller size and stable polarization control. According to the present invention, by utilizing the guided-mode resonant effect of the micro-nano grating, and by the equivalent medium theoretical calculation, a weak modulated sub-wavelength grating guided-mode resonant microcavity structure of which the resonant wavelength is 852 nm is designed, and a wall used for controlling the mode line width is added between a grating layer and a waveguide layer, so that the mode line width can reach 1 nm or less. Relative to a conventional VCSEL, the narrow line width vertical-cavity surface emitting laser has the narrower laser line width, the wider high reflection bandwidth, the smaller size and the stable polarization control.

Description

technical field [0001] The invention belongs to the technical field of semiconductor lasers, in particular to a guided-mode resonant grating narrow-linewidth vertical cavity surface-emitting laser, and belongs to the technical fields of atomic physics, spectroscopy, quantum information, coherent communication, remote sensing and precision measurement. Background technique [0002] Narrow linewidth vertical cavity surface emitting lasers play an important role in many optical systems and are widely used in technical fields such as atomic physics, spectroscopy, quantum information, coherent communication, remote sensing, and precision measurement. With the rapid development of science and technology in the information age, people have higher and higher requirements for the performance of core light sources. The traditional VCSEL light source will be increasingly unable to meet the narrow linewidth requirements of big data information systems for precise measurement of time and...

Claims

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Application Information

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IPC IPC(8): H01S5/183H01S5/125H01S5/32
CPCH01S5/183H01S5/125H01S5/32
Inventor 关宝璐刘振扬李鹏涛胡丕丽梁津
Owner BEIJING UNIV OF TECH
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