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Aluminum nitride-based guided-mode resonant multichannel light filter and preparation method thereof

A guided mode resonance, aluminum nitride-based technology is applied in the field of guided mode resonance multi-channel filters and the preparation thereof, which can solve the problems of cumbersome design methods and complex manufacturing processes, and achieves cumbersome manufacturing processes, concise manufacturing processes, and the principle of simple effect

Inactive Publication Date: 2015-06-10
NANJING UNIV OF POSTS & TELECOMM
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These technical design methods are cumbersome and the manufacturing process is complicated

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  • Aluminum nitride-based guided-mode resonant multichannel light filter and preparation method thereof
  • Aluminum nitride-based guided-mode resonant multichannel light filter and preparation method thereof
  • Aluminum nitride-based guided-mode resonant multichannel light filter and preparation method thereof

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Embodiment Construction

[0035] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments of the description:

[0036] Such as figure 1 As shown, the top view schematic diagram of the aluminum nitride-based guided mode resonant multi-channel filter of the present invention is provided with a circular aluminum nitride device area on the silicon-based aluminum nitride wafer, and the circular aluminum nitride device area The underlying silicon substrate layer 1 is completely etched into a cavity, which is a circular aluminum nitride film. A square grating setting area is set in the circular aluminum nitride film area, and the four sides of the grating setting area are connected to the edge area 22 of the circular aluminum nitride device area through a support structure, except for the grating setting area in the circular aluminum nitride device area 21 is etched through, thereby forming a completely etched iso...

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Abstract

Discloses an aluminum nitride-based guided-mode resonant multichannel light filter and a preparation method thereof. The aluminum nitride-based guided-mode resonant multichannel light filter comprises a silicon substrate layer, an aluminum nitride waveguide layer and an aluminum nitride optical grating; the aluminum nitride optical grating is composed of a plurality of rows of linear optical grating arrays different in cycles. The aluminum nitride-based guided-mode resonant multichannel light filter of a visible light waveband is realized on a silicon substrate aluminum nitride chip; techniques such as electron beam lithography, ion beam etching, photoetching and deep reactive ion etching are adopted to define and etch the device, and a back registration process and a deep silicon etching technique are adopted to remove the silicon substrate under the aluminum nitride optical grating, so that the aluminum nitride layer is completely suspended. The light filter realizes multichannel light filtration within the visible light waveband by use of the guided-mode resonance characteristic of the optical gratings different in cycle.

Description

technical field [0001] The invention belongs to the technical field of information materials and devices, and relates to an aluminum nitride-based guided mode resonance multi-channel filter and a preparation method thereof. Background technique [0002] Aluminum nitride is a covalent compound of group III-V, and is the semiconductor with the largest energy gap value (about 6.2eV) in group III-V. Aluminum nitride material has good chemical stability, high melting point, high mechanical strength, and good electrical insulation performance. Because of its high refractive index, high transmittance, low extinction coefficient and other characteristics, it has broad application prospects in the fields of machinery, microelectronics, and optics. [0003] The guided mode resonance of a diffraction grating refers to the phenomenon that the diffracted wave energy changes greatly when the incident wavelength, incident angle or medium parameters are changed slightly. Guided mode res...

Claims

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Application Information

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IPC IPC(8): G02B6/122G02B6/13
CPCG02B6/12007G02B6/13
Inventor 王永进许银高绪敏施政李欣朱洪波
Owner NANJING UNIV OF POSTS & TELECOMM
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