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246 results about "Local variation" patented technology

Process local variation is defined as the parametric changes of identical MOSFETs across a short distance, while global variation refers to such changes for identical MOSFETs separated by a longer distance or fabricated at different time.

Method and apparatus for alignment, comparison and identification of characteristic tool marks, including ballistic signatures

Systematic use of infrared imaging characterizes marks made on items and identifies the particular marking tool with better accuracy than use of visual imaging. Infrared imaging performed in total darkness eliminates shadows, glint, and other lighting variations and artifacts associated with visible imaging. Although normally used to obtain temperature measurements, details in IR imagery result from emissivity variations as well as thermal variations. Disturbing an item's surface texture creates an emissivity difference producing local changes in the infrared image. Identification is most accurate when IR images of unknown marks are compared to IR images of marks made by known tools. However, infrared analysis offers improvements even when only visual reference images are available. Comparing simultaneous infrared and visual images of an unknown item, such as bullet or shell casing, can detect illumination-induced artifacts in the visual image prior to searching the visual database, thereby reducing potential erroneous matches. Computer numerically controlled positioning of the toolmark relative to imaging sensors which use fixed focus optics with shallow depth of focus, varying focus distance and orientation systematically to construct a sequence of images, maximizes reliability of resulting images and their comparisons.
Owner:PROKOSKI FRANCINE J

Method for determining the image quality of an optical imaging system

The invention is directed to a method for determining the image quality of an optical imaging system and to the use of the method according to the invention for determining the influence of samples on the amplitude distribution and phase front distribution of the illumination light, of which the amplitude distribution is known in particular. The invention comprises the following steps: adjusting the subassemblies relative to one another in such a way that it is possible to project images of a sample on the detection device; recording a plurality of images of the sample from different reference planes near the focus plane; improving the image quality by image processing, particularly to reduce noise, to compensate for local variations in sensitivity of the detection device, and to center the intensity centroids respectively on a predetermined location in the images; computational linking of the spatially resolved image information, of adjustment values and system variables relating to the optical imaging system, and of information concerning the sample with the aim of determining characteristic numbers that are characteristic of the wavefront deformation caused by the imaging system; and outputting the characteristic numbers and associating them with the imaging system for describing the image quality.
Owner:CARL ZEISS SMT GMBH

Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site

A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis. The system also includes a first controller for controlling the x-y stage based on reference data which represents 3-D locations of microstructures to be processed within the site, a second controller, and a first voice coil coupled to the second controller for positioning the first air bearing sled along the optical axis also based on the reference data. The reference data is generated by the system which includes a modulator for reducing power of the material-processing laser beam to obtain a probe laser beam to measure height of the semiconductor wafer at a plurality of locations about the site to obtain reference height data. A computer computes a reference surface based on the reference height data. A trajectory planner generates trajectories for the wafer and the waist of the laser beam based on the reference surface. The x-y stage and the first air bearing sled controllably move the wafer and the focusing lens subsystem, respectively, to precisely position the waist of the laser beam so that the waist substantially coincides with the 3-D locations of the microstructures within the site. The system also includes a spot size lens subsystem for controlling size of the waist of the laser beam, a second air bearing sled for moving the spot size lens subsystem along the optical axis, a third controller for controlling the second air bearing sled, and a second voice coil coupled to the third controller for positioning the second air bearing sled along the optical axis.
Owner:ELECTRO SCI IND INC

Scanning system for inspecting anamolies on surfaces

An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity / autoposition channel, an alignment / registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity / autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment / registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal / background ratio of the present system.
Owner:NIKOONAHAD MEHRDAD +3

Spatial surface prior information reflectance estimation (SPIRE) algorithms

A new class of algorithms has been developed to estimate spectral reflectance in remote sensing imagery. These algorithms are called Surface Prior Information Reflectance Estimation (SPIRE) algorithms and estimate surface spectral reflectance using prior spatial and spectral information about the surface reflectance. This paper describes SPIRE algorithms that employ spatial processing of single channel data to estimate local changes in spectral reflectance under spatially and spectrally varying multiplicative and additive noise caused by variations in illumination and atmospheric effects. Rather than modeling the physics of the atmosphere and illumination (using a physics-based code such as ATREM), or using ground truth spectra at known locations to compensate for these effects (using the Empirical Line Method), prior information about the low spatial frequency content of the scene in each spectral channel is used instead. HYDICE VNIR-SWIR hyperspectral data were used to compare the performance of SPIRE, ATREM, and ELM atmospheric compensation algorithms. The Spatial SPIRE algorithm performance was found to be nearly identical to the ELM ground-truth based results, while Spatial SPIRE performed better than ATREM overall, and significantly better under high clouds and haze.
Owner:AIR FORCE GOVERNMENT OF THE US SEC THE
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