Large-field-of-view high-resolution microscopic imaging device and iterative reconstruction method based on a large illumination numerical aperture

Abstract

The invention discloses a large-field-of-view high-resolution microscopic imaging device and iterative reconstruction method based on a large illumination numerical aperture. The large-field-of-view high-resolution microscopic imaging device comprises an LED array, an objective table, a condenser lens, a microscopic objective lens, an imaging mirror, and a camera. The LED array is arranged on the front focal plane of the condenser lens. The light emitted by the i-th illuminated LED unit on the LED array is converted into parallel light by the convergence of the condenser lens to be emitted to a sample to be detected. The sample to be detected is placed on the objective table. A part of diffractive light transmitting the sample to be detected is collected by a microscopic objective lens and is emitted to the image plane of the camera by the convergence of the imaging mirror. A formed light intensity map is recorded by the camera. The large-field-of-view high-resolution microscopic imaging device ensures the programming controllability of the lighting direction, ensures that the illumination numerical aperture as high as 1.20 so as to obtain a reconstructed resolution up to 0.15[mu]m.

Description

technical field [0001] The invention belongs to optical microscopic imaging technology, in particular to a large field of view high-resolution microscopic imaging device and an iterative reconstruction method based on a large illumination numerical aperture. Background technique [0002] In the field of microscopic imaging, higher resolution has always been the goal of pursuit, but there is a key problem while improving the resolution, that is, the spatial bandwidth product of the microscope does not increase with the resolution. From the perspective of the imaging system, in order to achieve high resolution, the numerical aperture of the microscope objective lens must be increased, but the improvement of spatial resolution and the expansion of the field of view are often a pair of contradictions that are difficult to reconcile. In short, the whole picture of the inspected object can be seen under the low magnification lens, but only a small part of the inspected object can ...

AI Technical Summary

Problems solved by technology

However, because the condenser is discarded in the imaging system, the numerical aperture of the illumination is difficult to exceed 0.7, which makes the reconstruction resolution generally unable to reach 300nm

Images