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In plane scanning method and system for point scanning laser confocal microscope

A confocal microscope and point scanning technology, applied in the field of photoelectric detection, can solve the problems of complex system structure, difficult practical application, and strict quality requirements of optical system, and achieve the effect of overcoming complex mechanism

Inactive Publication Date: 2008-02-20
XI AN JIAOTONG UNIV
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Problems solved by technology

The advantage of the former is that the measurement speed can be greatly improved, but the system structure is complex and has strict requirements on the quality of the optical system; the latter has a stable optical path and a simple system structure, and because it only needs to consider eliminating point aberration on the axis, the cost of the optical system is reduced , but the scanning speed is slow and difficult to be practical

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  • In plane scanning method and system for point scanning laser confocal microscope

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Embodiment Construction

[0021] Referring to Fig. 1, the laser confocal scanning microscope system that the scanning confocal microscope measurement objective lens that the present invention relates to constitutes, comprises light source system and measuring system; Light sheet 2, converging lens 3, first pinhole 4, collimating lens 5, neutral filter 6, beam splitter 9 and observation system 10;

[0022] The measurement system includes a microscopic objective lens 7, and the microscopic objective lens 7 is provided with a second optical filter 11, a light collecting lens 12, a second pinhole 13, a photodetector 14, and an amplifying circuit 15;

[0023] The microscope objective lens 7 of the measurement system is aligned with the test sample 10;

[0024] The sample stage is used to place the tested sample 10, and the sample stage mainly includes a z-direction scanning mechanism, a rotating mechanism and an X displacement platform; the sample stage is connected with a computer 16, and the computer 16 i...

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Abstract

The utility model discloses a scanning method and system used for scanning laser cofocal microscope, which is characterized in that: first a sample table, a computer and a scanning cofocal microscope measuring objective lens are combined to a 3D scanning system of laser cofocal scanning microscope so as to realize automatic scanning control; and then the to-be-measured sample is located on the sample table; the 3D scanning system makes the sample table rotate and move horizontally in one-dimensional direction in order until one layer of the to-be-measured sample is scanned, following the 3D scanning system resets and then scans the next layer of the to-be-measured sample until the to-be-measured sample measurement is finished. In the case of no changing light way, scanning is finished by the rotation of the sample table, thereby overcoming the defect that the prior scanning table has complicated mechanism and slow scanning speed. The utility model is mainly applied in the laser cofocal microscope for spot scanning, and can also be applied in similar spot scanning measurement system.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection for biological, medical, micro-nano manufacturing and other scientific instruments, and relates to a scanning method for a laser confocal scanning microscope, in particular to an in-plane scanning method and system for a point-scanning laser confocal microscope. Background technique [0002] Compared with ordinary microscopes, laser confocal scanning microscopes have higher resolution and tomographic imaging capabilities, and are widely used in scientific instruments such as biology, life, medical treatment, micro-nano manufacturing, and materials. The in-plane (X, Y) scanning method in the existing laser confocal scanning microscope mostly adopts the beam scanning method, and usually uses devices such as vibrating mirrors to realize X, Y scanning. The scanning methods using object movement are two-dimensional linear scanning. The advantage of the former is that the measurement sp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00
Inventor 王昭王春勇赵宏
Owner XI AN JIAOTONG UNIV
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