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Calibration method of spot scanning three-dimensional topography measuring system

A measurement system and three-dimensional topography technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve problems such as difficult to obtain calibration results, difficult to accurately align laser points and known reference points, etc.

Active Publication Date: 2013-02-27
BEIHANG UNIV
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Problems solved by technology

For the point-scanning 3D shape measurement system, it is difficult to achieve good calibration results due to the difficulty in aligning the laser point and the known reference point precisely.

Method used

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  • Calibration method of spot scanning three-dimensional topography measuring system
  • Calibration method of spot scanning three-dimensional topography measuring system
  • Calibration method of spot scanning three-dimensional topography measuring system

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Experimental program
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specific Embodiment approach

[0041] Aiming at the calibration problem of the point-scanning three-dimensional shape measurement system, a method based on the precise movement and rotation of the standard plane target is used to realize the precise calibration of the system. The specific implementation is as follows:

[0042] See figure 1 , a structural schematic diagram of a point-scanning three-dimensional shape measurement system, taking the system as an example to apply the method of the present invention for system calibration.

[0043] See Image 6 , a method for calibrating a point-scanning three-dimensional shape measurement system according to the present invention, the specific steps of the method are as follows:

[0044] Step 1: System modeling. Establish a mathematical model according to the system measurement principle, and determine the parameters to be calibrated.

[0045] The beam emitted by the laser passes through the front of the X galvanometer, the left reflector, and the left end o...

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Abstract

The invention discloses a calibration method of spot scanning a three-dimensional topography measuring system. The calibration method comprises three major steps as follows: firstly establishing a measuring system model and determining parameters to be calibrated, then taking a precise displacement platform, a precise rotating platform and a standard plane target as calibration devices, adjusting positions and postures of the calibration devices, so as to meet calibration requirements, driving the standard plane target to move and rotate through the precise displacement platform and the precise rotating platform, so as to obtain calibration data in all directions, and finally, solving the parameters to be calibrated through a method of maximum likelihood estimation, determining a system model, and realizing accurate calibration of the system. The calibration method has higher practical value and wide application prospect in the field of photoelectric measurement.

Description

technical field [0001] The invention relates to a calibration method for a point-scanning three-dimensional shape measurement system, which belongs to the field of photoelectric measurement and is suitable for the application of theoretical research and engineering technology related to three-dimensional shape measurement. Background technique [0002] Due to the limitations of low efficiency and easy damage to the measured object of the contact measurement method, in recent years, the optical non-contact measurement technology has been rapidly developed and widely used due to its advantages of automation, high efficiency, and high resolution. Among them, the active triangulation method using laser light source is simple in principle and suitable for long-distance and large-scale measurement. The related theoretical research is relatively mature and widely used. The single-point triangulation method can only measure the three-dimensional information of one point at a time, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 李旭东赵慧洁边赟李成杰姜宏志
Owner BEIHANG UNIV
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