214 results about "Scattering radiation" patented technology

A system includes a radiation source, an optical system, an optical element, a detection system, and a processor. The radiation source is configured to generate a radiation beam. The optical system is configured to direct the radiation beam toward a target structure and to receive the scattered radiation. The target structure is configured to produce scattered radiation comprising one or more scattered beams. The optical element is configured to control a position of the one or more scattered beams. The detection system is configured to receive a portion of the position-controlled scattered radiation and to generate a detection signal. The processor is configured to determine a property of the target structure based on at least the detection signal.

The invention relates to an electrochromic window multi-scene control method, system and device based on indoor human body thermal comfort and a medium. The method comprises the steps that a perception data set is constructed; based on the sensing data set, performing multi-parameter coupling calculation of solar incidence azimuth deviation constraint and dynamic projection overlapping to obtain a direct radiation component, performing window space coupling analysis and double space compensation calculation to obtain a scattered radiation component, and performing fusion to obtain an individual thermal radiation influence value; determining a scene category based on the perception data set, and establishing a thermal radiation evaluation benchmark by adopting a mode matched with the scene category; and if the thermal radiation evaluation benchmark exceeds a preset threshold value, the required transmissivity of the window faces is obtained through a full-transmissivity radiation distribution method, the corresponding window faces are adjusted to the target transmission gradient according to the required transmissivity, and coupling control over the wind direction and / or power of the air conditioning system is selectively triggered. According to the invention, by constructing a multi-dimensional dynamic sensing system and an intelligent control framework, collaborative optimization of human body thermal comfort and building energy efficiency is realized.

The invention provides an indoor temperature field prediction method and system considering dynamic change of solar radiation, and belongs to the field of indoor temperature field prediction.The method comprises the steps that an equivalent surface heat source intensity model of direct solar radiation and an equivalent surface heat source intensity model of scattered solar radiation are constructed respectively; respectively constructing a sub-temperature field prediction model of direct solar radiation and a sub-temperature field prediction model of scattered solar radiation; and performing linear superposition on the sub-temperature field prediction model of the direct solar radiation and the sub-temperature field prediction model of the scattered solar radiation according to moments to obtain an indoor temperature field space-time distribution prediction result under the influence of dynamic solar radiation. The method fully considers the influence of the dynamic change of the solar radiation, can predict the influence rule of the solar radiation on the indoor temperature distribution in the time and space dimensions, and further obtains an accurate prediction result.

A computer-implemented method for scattered radiation correction, comprising the steps: obtaining projection images, optimizing a measure of quality by variation of correction parameters depending on the projection images, wherein a determination algorithm, which serves to determine the measure of quality, is an algorithm trained by machine learning and processes as its input data a reconstructed three-dimensional image dataset or processing data that is chosen from the image dataset, wherein the image dataset is based on corrected projection images, wherein a respective corrected projection image results from application of a correction algorithm, wherein the correction algorithm is parameterized by the correction parameters, provision of radiation scatter-corrected projection images and / or of a radiation scatter-corrected reconstructed three-dimensional image dataset.

Disclosed is a substrate and associated patterning device. The substrate comprises at least one target arrangement suitable for metrology of a lithographic process, the target arrangement comprising at least one pair of similar target regions which are arranged such that the target arrangement is, or at least the target regions for measurement in a single direction together are, centrosymmetric. A metrology method is also disclosed for measuring the substrate. A metrology method is also disclosed comprising which comprises measuring such a target arrangement and determining a value for a parameter of interest from the scattered radiation, while correcting for distortion of the metrology apparatus used.

Multiple synthetic aperture radar “SAR” images of a target area on the earth are acquired using a satellite travelling in an orbit above the earth in a single pass of the satellite over the target area. In some methods, the data for each image is acquired from a different angle of incidence with respect to the target area. Then, the variation of quantity of backscattered radiation with respect to angle of incidence is analysed and used to identify matter imaged in a pixel or pixel group. In other methods, the data for each image is acquired from a different angle of incidence with respect to the target area, and the different angles of incidence are determined based on the specular reflection curve for a particular material. Then the quantity of backscattered radiation is analysed to determine whether the particular material is present based on the quantity of backscattered radiation. ‘Extended dwell spotlight acquisition’ geometry may be used in which image data acquisition apparatus may be locked to illuminate same target as the satellite passes over the target for a period of for example 20 seconds.

Disclosed is a metrology method comprising: obtaining metrology data relating to a measurement obtained by illuminating a periodic structure comprising at least one pitch with partial coherent illumination comprising a wavelength and capturing the resultant scattered radiation from said periodic structure at a detection plane, said scattered radiation passing through at least one angularly resolved plane between said periodic structure and detection plane, said angularly resolved plane comprising at least one mask edge; non-iteratively reconstructing a field of said scattered radiation; using said reconstructed field to determine a parameter of interest of the structure; and in an initial step: selecting said wavelength and a maximum of said at least one pitch such that the wavelength- over-pitch ratio is greater than a first distance in said angularly resolved plane.

A computer-implemented method for scattered radiation correction, comprises: receiving a plurality of projection images mapping an object; receiving or determining a virtual three-dimensional reference image mapping the object; determining at least one scattering model; subtracting the at least one scattering model from the projection images to determine corrected projection images; determining a corrected medical image as a function of the corrected projection images; comparing the corrected image with the virtual reference image; and checking whether an abort criteria is met. If the abort criteria is met, then the corrected medical image is provided. If the abort criteria is not met, then the at least one scattering model is adapted and the method is repeated based on the adapted scattering model.

An inspection apparatus includes a radiation source, an optical system, and a detector. The radiation source is configured to generate a beam of radiation. The optical system is configured to receive and direct the beam along an optical axis and toward a target so as to produce scattered radiation from the target. The optical system includes a beam displacer. The beam displacer includes two or more reflective surfaces. The beam displacer is configured to receive the beam along the optical axis, perform reflections of the beam so as to displace the optical axis of the beam, move linearly in at least a first dimension to shift the displaced optical axis, and preserve an optical property of the beam such that the optical property is invariant to the linear movement. The detector is configured to receive the scattered radiation and to generate a measurement signal based on the scattered radiation.

The invention relates to a photovoltaic array layout optimization method and device based on irradiation and shadow dynamic coupling, and the method comprises the steps: constructing a total irradiance model related to the inclination angle and azimuth angle of a photovoltaic module according to the direct solar radiation, scattered radiation and reflected radiation of the inclined surface of the photovoltaic module; calculating a shadow loss factor in combination with the critical unshielded spacing and the actual spacing of the front row and the rear row of the photovoltaic module array, and coupling the shadow loss factor to the total irradiance model to obtain an effective irradiance model; taking maximization of annual effective irradiance as an optimization objective, and constructing an optimization objective function based on an effective irradiance model; and by taking the inclination angle of the photovoltaic module, the azimuth angle of the photovoltaic module and the actual spacing as optimization variables, carrying out comprehensive balance optimization of dynamic irradiance income and shadow loss on the optimization objective function by adopting a fox-monkey optimization algorithm to obtain an optimal variable combination. According to the method, the core problems of large irradiation calculation error, shadow evaluation staticization and low optimization efficiency can be solved.

A method for training an algorithm for machine learning for a correction of recordings obtained by an imaging apparatus. A number of output images are recorded. Moreover a smaller number of first, high-quality scattered radiation images are simulated from the output images. A corresponding number of second, low-quality scattered radiation images is further simulated, wherein the simulation is undertaken with a number of photons reduced by at least an order of magnitude. The algorithm is trained with the second, low-quality scattered radiation images as input data and the first, high-quality scattered radiation images as output data.

An apparatus for measuring a parameter of a structure related to a semiconductor manufacturing process. The apparatus comprises a source assembly configured to provide measurement radiation having one or more first wavelengths for irradiating the structure on a substrate. The apparatus further comprises a filter arranged to receive scattered measurement radiation that has scattered from the structure, wherein the filter is configured to transmit the scattered measurement radiation at the one or more first wavelengths and filter out radiation at one or more second wavelengths. The filter comprises a film with a curvature in at least one direction. The apparatus further comprises a plurality of detectors, located downstream of the filter, configured to detect the filtered scattered radiation configured to measure the parameter of the structure.

An XRF borehole probe system and a method of operating an XRF borehole probe system are provided. The XRF borehole probe system includes at least a probe body, an X-ray radiation source arranged in the probe body, a detector for fluorescence and / or scattered radiation, the detector being arranged in the probe body, an evaluation device configured to evaluate the output signals generated by the detector, the evaluation device being configured for element analysis of the irradiated material, and the evaluation device being additionally configured to determine the specific density of the irradiated material and / or to determine the distance between the probe body and a borehole wall.

A computer-implemented method for determining an estimation of a two-dimensional scattered radiation distribution in a two-dimensional X-ray image that is based on an imaging procedure performed by an X-ray detector is provided. The method includes receiving the X-ray image, applying an estimation algorithm to the X-ray image or to a two-dimensional intermediate image determined from the X-ray image. The estimation algorithm determines a respective two-dimensional partial scattered radiation image for a plurality of physical scatter processes such that image values of pixels of the respective partial scattered radiation image in each case describe an estimated value for a respective scattered radiation dose that was applied to a respective detector region of the X-ray detector assigned to the respective pixel during acquisition of the X-ray image by the respective physical scatter process. The estimation of the scattered radiation distribution is determined based on the plurality of partial scattered radiation images.

The invention relates to a method for protecting an adhesive layer (20) on an optical component (11), in particular on an optical component (11) for wavefront deformation, from scattered radiation (22), in particular from scattered radiation (22) in the UV wavelength range, comprising: protecting the adhesive layer (20) from the scattered radiation (22) by introducing an internal engraving (23) into a material of the optical component (11) and / or protecting the adhesive layer (20) from the scattered radiation (22) by applying at least one protective layer (24) to at least one surface (19a) of the optical component (11) not covered by the adhesive layer (20). The invention also relates to an optical component (11) and to a semiconductor technology system.

Processes and systems for monitoring one or more gases dissolved in a liquid. In some embodiments, the process can include introducing a fluid into an inlet of a sample cell, where the fluid includes at least one gas dissolved in a liquid. The fluid can flow through the sample cell such that at least a portion of the fluid flows past an optical window such that the fluid is viewable within the sample cell through the optical window. The fluid can be recovered from an outlet of the sample cell. An electromagnetic radiation signal can be emitted into the sample cell through the optical window for at least a portion of the time the fluid is viewable through the optical window. The fluid can be contacted with the electromagnetic radiation signal within the sample cell. A scattered electromagnetic radiation signal that can include elastic scattered radiation and inelastic scattered radiation emitted from the sample cell through the optical window can be directed into a filter to remove at least a portion of the elastic scattered radiation to produce a primarily inelastic scattered radiation signal. The primarily inelastic scatted radiation signal can be directed to a detector to detect a Raman signal indicating the presence of the at least one dissolved gas in the liquid.

The present disclosure describes methods and systems for measuring crosswind speed by optical measurement of laser scintillation. One method includes projecting radiation into a medium, receiving, over time, with a photodetector receiver, a plurality of scintillation patterns of scattered radiation, comparing cumulative a radiation intensity for each received scintillation pattern of the received plurality of scintillation patterns, and measuring a cumulative weighted average cross-movement within the medium using the compared cumulative radiation intensities.

The invention relates to a DUET photovoltaic power generation power prediction method and system based on space-time bi-clustering and dynamic gating fusion, and belongs to the technical field of new energy power system prediction. For the problems of low prediction precision and poor robustness caused by meteorological dynamic disturbance of photovoltaic power, a time clustering module TCM is adopted to extract potential distribution and a linear mode of historical power data, and a time drift error is solved; key control variables such as scattered radiation and temperature are screened through a channel clustering module (CCM) in combination with causal sparse constraint and a frequency domain attention mechanism, and periodic features are enhanced; a bidirectional space-time cross attention and adaptive gating technology of a fusion module FM is utilized to dynamically integrate a time sequence self-correlation characteristic and a cross-channel joint influence. According to the method, the prediction precision in sudden weather change is remarkably improved, the generalization ability and the real-time performance of the model are enhanced, and reliable decision support is provided for power grid dispatching.

For particularly rapid and effective scattered-radiation correction of 2D X-ray images, a method is provided for scattered-radiation correction for an X-ray image or a series of X-ray images, which images may be acquired by an acquisition system having an X-ray source, an X-ray detector, and a collimator that shapes the primary X-ray radiation. The method includes: providing the X-ray image acquired in a first setting of the collimator in which setting the object under examination is illuminated; providing an auxiliary X-ray image acquired in a second setting of the collimator in which second setting are illuminated, in particular solely one or more sub-regions of the X-ray detector; subtracting the auxiliary X-ray image from the X-ray image; determining a scattered-radiation correction using image data from the X-ray detector obtained from the subtraction at least in the region of the sub-regions; and correcting the X-ray image using the determined scattered-radiation correction.

A method for adjusting heart rate measurement accuracy of a wearable device includes: obtaining, by a data module, a plurality of pieces of data including user activity data, user information, and environment conditions related to a user from a plurality of data sources; determining a skin attribute of the user based on the obtained plurality of pieces of data; emitting, by a transmitter module, infrared (IR) radiation and visible light at an intensity level for measuring a heart rate of the user; receiving, by a receiver module, scattered IR radiation resulting from interaction of the transmitted IR radiation and the transmitted visible light based on a skin condition of the user and the environment conditions; determining, by a correlation module, a scattered radiation vector based on the scattered IR radiation; determining, by a detection module, a wavelength of the visible light to be adjusted based on the scattered radiation vector; and adjusting, by the transmitter module, the wavelength of the visible light.

The invention discloses a DEM-based earth surface solar radiation prediction method, equipment and a medium. The method comprises the following steps: correcting a direct radiation reference value based on nonlinear attenuation of a cloud layer to direct radiation to obtain actual direct radiation; based on the enhancement effect of the cloud layer on the scattered radiation, correcting the scattered radiation reference value to obtain first actual scattered radiation; according to a preset shadow judgment criterion, calculating actual horizontal plane direct radiation after the actual direct radiation reaches the earth surface by taking the condition that the slope surface back to the sun has no direct radiation as a constraint; calculating second actual scattered radiation after the first actual scattered radiation reaches the earth surface according to the control of the sky vision field factor of the earth surface area on the scattered radiation; calculating reflected radiation generated after the actual direct radiation and the first actual scattered radiation reach the earth surface based on the Lambert reflection law; therefore, the total solar radiation is obtained. According to the invention, high-precision quantification of earth surface solar radiation under complex terrain conditions is realized.

A method of determining a parameter of interest of a structure comprising at least one first feature oriented along a first axis of a structure coordinate system and at least one second feature oriented along a second axis of the structure coordinate system. The method comprising: illuminating the first feature and the second feature with first illumination from a first direction oblique to said first axis and second axis, so as to generate first scattered radiation from the first feature and second scattered radiation from the second feature, detecting a first interference pattern formed by interference between a portion of the first scattered radiation and first reference illumination; detecting a second interference pattern formed by interference between a portion of the second scattered radiation and the first reference illumination; and determining the parameter of interest of the structure using the first interference pattern and the second interference pattern.

The present application relates to the technical field of photovoltaic power generation, and discloses a photovoltaic power station equipment operation optimization method, system, device and readable storage medium, the present application obtains a radiation type index by using horizontal plane total radiation data and component surface direct radiation data of the photovoltaic power station equipment, to construct a proportional quantization model about direct radiation and scattered radiation, to facilitate capturing the radiation mutation of the actual operation of the photovoltaic power station under the condition of sand and dust; then by inputting the current radiation type index and real-time environmental data into the trained random forest prediction model, the present application breaks through the limitation of the traditional power prediction model which only depends on total radiation, and can obtain more accurate predicted power; by predicting the power, the current radiation type index and the working mode type, an intelligent decision model is used for decision-making to obtain the optimal equipment operation rule, and the operation state of the photovoltaic power station equipment is optimized by using the optimal equipment operation rule, so as to ensure the efficient and reliable operation of the photovoltaic power station equipment.

A system for determining at least one biomechanical property of a reproductive cellular structure includes a radiation source for generating illuminating radiation, at least one optic for directing the illuminating radiation onto at least a portion of the reproductive cellular structure, a detector for detecting at least a portion of radiation scattered from the reproductive cellular structure, a spectrometer for generating a frequency spectrum of the detected scattered radiation, and an analyzer. The analyzer is configured to identify at least one Brillouin frequency shift in the frequency spectrum for the at least a portion of the reproductive cellular structure, and determine viability of the reproductive cellular structure based on the at least one Brillouin frequency shift.

The invention relates to the technical field of atmospheric remote sensing detection, in particular to a cut height offset calculation method, which comprises the following steps of: acquiring limb scattered radiation corresponding to a plurality of predetermined engineering control cut heights; randomly initializing a plurality of cut-up particles, wherein the position of each cut-up particle represents a guess value of cut-up offset; defining a fitness function; multiple rounds of iteration are executed, and in each round of iteration, for each cut-up particle, the position of the cut-up particle is calculated according to the individual extreme value and the global extreme value of the cut-up particle; based on a fitness function and the updated position of each cut-up particle, calculating a fitness value corresponding to each cut-up particle in the current iteration, and updating an individual extreme value of each cut-up particle and a global extreme value of all cut-up particles; and after a preset iteration ending condition is met, taking the global extreme value of the last iteration as the finally obtained cut-up offset. According to the method, the precision and the range of an inversion result are effectively improved, complex model calculation is avoided, and meanwhile, the accuracy of an optimization process is improved.

A lithographic apparatus includes a projection system and an inspection system including a radiation system, a photonic integrated circuit system, and a detector system. The projection system projects an image of the patterning device onto a substrate. The radiation system directs radiation toward a target on the substrate to generate scattered radiation from the target. The radiation system includes a radiation source for generating radiation and an optical system for focusing the radiation onto a target. A photonic integrated circuit system includes a waveguide system integrated on a board and a radiation coupler disposed at a waveguide of the waveguide system. The radiation coupler initiates at least a portion of the scattered radiation into the waveguide system. A detector system receives the scattered radiation from the waveguide system and generates a measurement signal based on the scattered radiation.

The invention discloses an antenna near-field coupling partitioning method for scattered radiation collaborative design of a planar antenna, and relates to the technical field of antennas. The method comprises the following steps: acquiring electromagnetic field distribution data of an antenna under a target working frequency; then, according to the electromagnetic field distribution data, calculating a field function partition criterion index of the space around the antenna, so as to divide a function area of the near field of the antenna; and finally, according to the field function partition criterion index, dividing the function areas of the near field of the antenna, and loading different electromagnetic function structures in different function areas. According to the method, a systematic and quantifiable design criterion is adopted, the method is used for near-field coupling partition of the planar antenna, the layout of electromagnetic functional structures with different functions is guided, and therefore the collaborative decoupling design of the radiation performance and scattering performance of the antenna is achieved.

The invention relates to a semiconductor technology system, in particular an EUV lithography system, comprising: at least one reflective optical element (7, M1, M2), a radiation source for irradiating a surface (7a, M1a, M1b) of the reflective optical element (7, M1, M2) with useful radiation, preferably with EUV radiation (16), at least one heating radiation source (30) for irradiating the surface (7a, M1a, M1b) of the reflective optical element (7, M1, M2) with IR radiation (31), and a housing (26), preferably for encapsulating a beam path (25) of the EUV radiation (16). The housing (26) has at least one shield (29) with a surface (29a) which is preferably formed from a material which absorbs scattered IR radiation (32), in particular a gas-binding material, wherein the surface (29a) has a profiling (33) for suppressing scattered radiation, in particular EUV scattered radiation (27) and / or scattered IR radiation (32).

A method may include directing radiation toward at least two targets using an optical scanning system to generate a first portion and a second portion of scattered radiation. The first target may include a plurality of first grating line structures including a feature having a first offset value. The second target may include a plurality of second grating line structures including features having a second offset value. The method may include detecting a first portion and a second portion of scattered radiation, generating a first measurement signal indicative of a first target position based on a first bias feature, and generating a second measurement signal indicative of a second target position based on a second bias feature. The method may include analyzing effects of the first bias value and the second bias value on the first position and the second position to determine at least one characteristic of the target set.

An embodiment of the present invention relates to an infrared scene simulation system and method. The system includes a model construction module for constructing a model to be simulated, where the model to be simulated includes a background model and a target model; a scene construction module for setting the positions and movement trajectories of the background model and the target model to form a preset visible light scene and setting scene parameters of the visible light scene; an atmosphere calculation module for calculating the atmospheric transmission transmittance, the background and surface scattering radiation intensity, and the direct solar irradiance under the scene parameters; a thermal feature solving module for calculating the temperature fields of the background model and the target model; an infrared characteristic calculation module for calculating a first infrared radiance image of the visible light scene based on the temperature fields and simulation parameters; and a sensor effect calculation module for introducing sensor effects to the first infrared radiance image based on sensor parameters to generate a final infrared simulation image. This system can obtain infrared images under any scene with high imaging efficiency.