126 results about "Ferromagnetic resonance" patented technology

The invention provides a resonance elimination device and method for suppressing ferromagnetic resonance in a power system, and relates to the technical field of power system safety prevention and control. The resonance elimination device for suppressing the ferromagnetic resonance in the power system comprises a resonance elimination module used for consuming energy generated by the ferromagnetic resonance; an acquisition module; the detection module is used for detecting excitation inrush current between the neutral point of the voltage transformer and the high-voltage damping resistor in real time; the calculation module is used for calculating the rising edge slope of the magnetizing inrush current and calculating the offset voltage of the neutral point to the ground; the judgment module is used for continuously judging the relationship between the rising edge slope of the excitation inrush current detected in real time and each threshold value and the relationship between the numerical value of the neutral point to ground offset voltage detected in real time and each threshold value, and judging whether the system has a single-phase ground fault or not; and the control module controls the input of the harmonic elimination module. The resonance elimination device can accurately and quickly eliminate ferromagnetic resonance and effectively improve the resonance elimination efficiency of the ferromagnetic resonance.

The invention discloses a C-band ultralow-loss self-bias hexagonal gyromagnetic ferrite material, and belongs to the technical field of ferrite material preparation. The ferrite material comprises a BiCaZrVIn-YIG gyromagnetic ferrite material and a LaScBiCu-BaM hexagonal gyromagnetic ferrite material, wherein the weight ratio of the BiCaZrVIn-YIG gyromagnetic ferrite material to the LaScBiCu-BaM hexagonal gyromagnetic ferrite material is 0.1 to 10; the doping agent accounts for the weight percentage of the ferrite material, and the doping agent comprises the following components in percentage by weight: 0.3-0.7 wt% of La2O3, 0.4-0.8 wt% of SiO2 and 0.5-0.9 wt% of SrTiO3. According to the invention, LaScBiCu-BaM hexagonal gyromagnetic ferrite with high Mr / Ms and Hc characteristics is grown on the surfaces of low-loss BiCaZrVIn-YIG gyromagnetic ferrite particles, and a hexagonal gyromagnetic ferrite material with high and adjustable anisotropic field Ha, high coercive force Hc and residual magnetism ratio Mr / Ms, ultralow ferromagnetic resonance line width H and dielectric loss tan delta epsilon characteristics is developed. And the engineering requirements of low loss and wide bandwidth of the C-band miniature integrated device are met.

The invention provides a PT ferromagnetic resonance overvoltage suppression system and method based on graded damping. The system comprises a secondary resonance elimination module, the secondary resonance elimination module comprises a three-stage damping branch circuit which is connected in series with an open triangle of a voltage transformer, the three-stage damping branch circuit comprises a first current-sensitive resonance eliminator, a second current-sensitive resonance eliminator and a fixed resistor which are connected in parallel, and a branch circuit of the first current-sensitive resonance eliminator is connected in series with a first switch; a branch of the second flow-sensitive resonance eliminator is connected in series with a second switch, and a branch of the fixed resistor is connected in series with a third switch; the fan is used for carrying out air cooling on the first flow-sensitive resonance eliminator, the second flow-sensitive resonance eliminator and the fixed resistor; and the control module is used for controlling on or off of the first switch, the second switch and the third switch. Resonance early recognition is achieved through transient energy comprehensive criteria, three-level damping dynamic switching and fan intelligent temperature control are combined, and the three core problems of response lag, insufficient heat dissipation and weak self-adaption in ferromagnetic resonance suppression are solved.

The invention discloses a low ferromagnetic resonance linewidth BaFe12O19 single crystal and a preparation method thereof, and belongs to the technical field of magnet materials. According to the method, growth of the BaFe12O19 single crystal is realized mainly through multiple times of temperature rising and falling and multiple times of temperature oscillation. Compared with direct cooling, the single crystal grown by the method provided by the invention has higher Curie temperature and saturation magnetization and narrower ferromagnetic resonance line width. Through collaborative optimization of high Curie temperature, high saturation magnetization and low ferromagnetic resonance line width, the BaFe12O19 single crystal can be better applied to the frontier fields of high-frequency electronic devices, high-temperature permanent magnet systems, quantum technologies and the like. The improvement of the performance of the device can promote the development of the device in the directions of high frequency, miniaturization and high energy efficiency, and has strategic significance for new-generation communication, energy and information technologies.

An acoustically driven ferromagnetic resonance (ADFMR) device has a piezoelectric element comprised of piezoelectric material, first and second electrodes arranged in a vertical stack with the piezoelectric element to activate the piezoelectric element to generate an acoustic wave, a radio frequency voltage source electrically connected to the first electrode, a magnet comprised of a magnetostrictive material to receive the acoustic wave, the magnet being in the vertical stack with the first and second electrodes and the piezoelectric element, wherein the acoustic wave resonates at a ferromagnetic resonance of the magnetostrictive material, and a readout circuit to detect a change in the acoustic wave by detecting g one of an output voltage amplitude, a change in impedance or a reflection of the acoustic wave in the magnet to measure an unknown magnetic field in which the ADFMR device resides and as experienced at the magnetostrictive element.

The invention, which belongs to the microwave communication field, discloses a multi-physics-field coupling high-Q-value magnetoacoustic resonator comprising a YIG film, a GGG film substrate, a grounding electrode and a microstrip line. The YIG film generates ferromagnetic resonance under the action of an external magnetic field, the magnetoelastic effect of a YIG material is coupled with a standing wave thickness acoustic mode in a YIG-GGG heterostructure, and the mode combines the broadband adjustable characteristic of a magnetic resonance mode and the high-quality factor (Q value) characteristic of an acoustic resonance mode, so that the magnetoacoustic resonator simultaneously meets the broadband adjustable characteristic and the high-Q value characteristic; in the process, the YIG film plays a role of a transducer, the mode of the heterogeneous film and the microstrip line is adopted, an air gap of a magnetic circuit can be reduced, the size of a bias magnetic circuit is greatly reduced, and therefore the resonator is miniaturized.

The invention discloses a PT ferromagnetic resonance adaptive collaborative suppression method and system, and the method comprises the steps: sampling a voltage signal, a current signal and a PT secondary side voltage signal monitored by a high-voltage end sensing unit in real time, and calculating a primary side voltage change rate and harmonic content; comparing the calculated primary side voltage change rate and harmonic content with corresponding preset thresholds, controlling to input a neutral point reconstruction unit, and destroying resonance conditions by changing neutral point grounding impedance; after the neutral point reconstruction unit works, the input energy feedback unit is controlled and used for absorbing resonance energy; and when it is detected that the resonance threat is eliminated, the neutral point reconstruction unit and the energy feedback unit are controlled to be turned off in sequence, and active cooling of the high-voltage end sensing unit is started by using residual energy in the energy feedback unit. According to the method, by monitoring the voltage change rate and the harmonic content in real time, a neutral point is rapidly triggered to reconstruct and damage resonance, energy is absorbed and fed back through an energy feedback unit, and finally system safety recovery is achieved.

The invention provides a risk prediction and cooperative defense system and method for ferromagnetic resonance of a power grid. The data acquisition module is used for acquiring electrical quantity data and switch state data of a plurality of nodes of the whole network in real time; the data analysis module is used for analyzing the electrical quantity data through a preset first prediction model to calculate a first risk characteristic value, and analyzing the switch state data through a preset second prediction model to calculate a second risk characteristic value; the feature fusion module is used for calculating the risk probability and grade of the magnetic resonance of the starting iron by fusing the first risk feature value and the second risk feature value; and the early warning and execution module is used for generating early warning information and a self-adaptive regulation and control strategy according to the calculated risk probability and grade of the ferromagnetic resonance, and sending out a corresponding alarm according to the generated early warning information and the self-adaptive regulation and control strategy. Through multi-source data fusion analysis, advanced prediction of the ferromagnetic resonance risk is realized, and passive response is changed into active defense.

The invention belongs to the field of magnetic materials, and particularly relates to a high-dielectric high-saturation magnetization NiCuZn-based microwave gyromagnetic ferrite material and a preparation method thereof. On the basis of spinel ferrite, Mn < 2 + > and Nb < 5 + > are introduced to replace Ba0. 6Sr0. 4TiO3 to be compounded, the doping amount of Ba0. 6Sr0. 4TiO3 is controlled, the dielectric constant of NiCuZn ferrite is effectively improved, the ferromagnetic resonance line width is controlled, and the requirement for miniaturization of microwave ferrite devices is met; a proper amount of Bi2O3 is added as a sintering aid, so that the densification degree of the sintered material is optimized, the ferromagnetic resonance line width is further reduced, and the dielectric constant is increased; the finally sintered NiCuZn-based microwave gyromagnetic ferrite material with high dielectric constant and high saturation magnetization intensity 4pi Ms is 2905-3554Gs, the dielectric constant is 22-31.6, the ferromagnetic resonance line width is 251-820Oe, and the material has high dielectric constant, high saturation magnetization intensity and low ferromagnetic resonance line width, provides a basis for further miniaturization of microwave ferrite devices, and is very beneficial to research, development and production of miniaturized circulators and isolators with high frequency bands.

The invention relates to the technical field of electromagnetic measurement and state monitoring, and discloses a global state sensing system and method for an electromagnetic voltage transformer. The technical problems that in the prior art, data robustness is insufficient and actual working condition changes of a power grid are difficult to adapt due to the fact that accurate resonance circuit parameters are depended and a single calculation path is adopted are solved. According to the method, ferromagnetic resonance phenomena under various faults are simulated based on electromagnetic transient simulation, phenomenon data are obtained, and influence factors are analyzed to obtain influence rule data. And taking the rule data as input, and adopting a comprehensive solving method combining programming calculation, system structure chart calculation and electromagnetic transient software simulation to obtain a high-reliability state quantity time sequence. Based on the time sequence, a nonlinear model which takes loss into account and does not depend on precise resonant circuit parameters is derived, and explicit mathematical functions of primary current and transient overvoltage of the voltage transformer are obtained.

The invention relates to the technical field of material physical property testing, in particular to a ferromagnetic resonance linewidth automatic testing system and method, and the system comprises a main control unit, a signal generator, a spectrum analyzer, a magnetic field generation device, a gauss meter, a microwave transmission structure and two attenuators. The signal generator, the spectrum analyzer, the magnetic field generation device and the gauss meter are electrically connected with the main control unit, one attenuator is connected between the signal generator and the microwave transmission structure, the other attenuator is connected between the microwave transmission structure and the spectrum analyzer, and a crystal oscillator synchronization line is connected between the spectrum analyzer and the signal generator. The method comprises the following steps of: scanning point by point to read the readings of a spectrum analyzer influenced by a sample under different frequencies and different magnetic field intensities, and performing data curve fitting according to three groups of data of the frequency, the magnetic field intensity and the power to obtain a ferromagnetic resonance line width result of the sample; the signal generator and the spectrum analyzer are cheaper than the network analyzer.

Apparatuses (e.g., system and devices, including sensors) and methods that may include single layered or multilayered stack-based acoustically driven ferromagnetic resonance (ADFMR) sensors that incorporate Fe—Ga—B materials (or in some cases Fe—Ga and C, Fe—Si and B, Fe—Si and C, Co—Fe and B, Co—Fe and C) as all or part of the thin-film magnetic element of the ADFMR sensors (e.g., the ferromagnetic film). These apparatuses and methods may have enhanced sensitivities when implemented as part of an ADFMR device. An Fe—Ga—B multilayered thin-film may be, e.g., between about 1 nm-1000 nm in total thickness.

The invention discloses a YIG gyromagnetic ferrite material capable of effectively reducing ferromagnetic resonance line width and a preparation method thereof, the chemical formula of the YIG gyromagnetic ferrite material is Ca < 0.3 > CexY < 2.7-x > Mn < 0.05 > Zr < 0.45 > Fe < 4.5 > O12, x is greater than or equal to 0 and less than or equal to 0.5, the YIG gyromagnetic ferrite material has a complete garnet structure, Ca < 2 + > and Ce < 3 + > replace dodecahedral Y < 3 + > ions of a YIG ferrite lattice structure, and Mn < 2 + > and Zr < 2 + > respectively replace octahedral Fe < 3 + > of the YIG ferrite lattice structure; meanwhile, Bi2O3 is introduced as a sintering aid to promote the YIG ferrite to be fully sintered at 1280 DEG C, so that the microwave characteristics of the material are improved, the saturation magnetization is higher, the coercive force is lower, more importantly, the ferromagnetic resonance line width can be greatly narrowed, and the material becomes a base material of a microwave ferrite device with high integration level, small size and excellent electromagnetic performance.

The application discloses a kind of single crystal resonator ferromagnetic resonance line width fast screening device for magnetic tuning filter, belong to microwave component testing field, the testing device includes resonator (1), resonator (2), adjustable DC power supply (3) and vector network analyzer (4);Wherein, the resonator (2) after orientation is placed in resonator (1), the resonator (1) is connected with vector network analyzer (4) and adjustable DC power supply (3) respectively by data line, the application also discloses the method for using the above device to carry out single crystal resonator ferromagnetic resonance line width fast screening for magnetic tuning filter;The screening device of the application can realize the screening of one sample in 30 seconds, and the testing accuracy is good, can meet the demand of batch product screening test, is favorable for improving the tuning efficiency of magnetic tuning filter, reduces production cost, has very strong practical value.

The present invention provides a method for detecting the concentration of magnetic nanomaterials, and relates to the technical field of detecting trace magnetic nanomaterials. In the process of detecting the concentration of magnetic nanomaterials by using the spin-torque ferromagnetic resonance (ST-FMR) technology, a microwave current is introduced into the SOT source layer along the X direction to generate a spin current perpendicular to the plane direction of the film, which acts on the magnetic moment of the adjacent ferromagnetic layer to generate a torque, causing it to precess. When the magnetic nanomaterial is dripped onto the surface of the ferromagnetic layer film, the resonance condition during the ST-FMR test is affected, so that the damping factor of the system increases with the increase in the amount of magnetic nanomaterials, thereby achieving quantitative and accurate detection of low-concentration (≤0.5 mg / mL) magnetic nanomaterial solutions. The method has low testing cost, short detection time, and high detection sensitivity.

Methods and apparatuses (devices, methods, etc.) for determining gestures, e.g., hand gestures, from a wrist and / or forearm worn array of magnetometers. These methods and apparatuses may use a trained machine-learning agent to identify gestures from magnetic signals that have been preprocessed to optimize gesture detection. The trained machine learning agent may apply a hierarchical classification that first identifies a first category of gestures from a second category of gestures and then classifies between the individual gestures within each category. The methods and apparatuses described herein may be of particular use with acoustically driven ferromagnetic resonance (ADFMR) sensors.

The invention relates to the technical field of ferrite single-crystal materials, in particular to a treatment method for improving the ferromagnetic resonance line width of spinel NiZn ferrite single-crystal pellets, which comprises the following steps: annealing the spinel NiZn ferrite single-crystal pellets under the conditions of high oxygen pressure and high temperature, slowly cooling to room temperature, and releasing the pressure after the annealing is finished, thereby obtaining the spinel NiZn ferrite single-crystal pellets. According to the method, the NiZn ferrite single crystal pellets are subjected to annealing treatment by adopting a high-oxygen-pressure high-temperature annealing treatment process, the pellet processing stress can be released under the condition of inhibiting Zn element volatilization, the ferromagnetic resonance line width of the NiZn ferrite single crystal pellets can be effectively reduced, and subsequent pellet surface polishing treatment is also facilitated.

The application relates to a quick-disassembly waveguide structure for testing the line width of ferrite ferromagnetic resonance, belonging to the field of microwave and millimeter wave band magnetic material parameter testing. The quick-disassembly waveguide structure comprises a main waveguide tube and a quick-disassembly resonant cavity, and the main waveguide tube comprises a first rectangular waveguide, a second rectangular waveguide, a connecting bridge, a waveguide flange and a positioning pin. The quick-disassembly waveguide structure for testing the line width of ferrite ferromagnetic resonance is characterized in that the rectangular waveguide, the waveguide flange, the connecting bridge and the coupling sheet of the resonant cavity are integrally connected to form the main waveguide tube, the quick-disassembly resonant cavity is placed in the gap formed by the connecting bridge, and the quick-disassembly resonant cavity is achieved; the sample loading method of 'filling medium in the cavity and loading the sample through the medium sheet' is adopted, and the loading problem of the 30GHz and above millimeter wave band ferrite FMR test sample is solved.

The invention discloses a method for synthesizing a ZnFe2O4 photocatalyst based on ferromagnetic resonance absorption effect mediation. The synthesis method comprises the following steps: dissolving Zn (NO3) 2.3 H2O and Fe (NO3) 3.9 H2O in deionized water, and stirring to obtain a mixed solution; adding a NaOH solution to adjust the pH value; continuously heating and stirring, filtering after low-power short-time microwave heating, washing with water until the pH value of supernate is 7, and naturally drying; and continuously calcining the dried product, and then carrying out low-power short-time microwave heating to obtain the ZnFe2O4 photocatalyst with the specific surface area of 49.3-50.6 m < 2 > / g, the visible light absorption range of 580 nm and the saturation magnetization of 46.5-47.33 emu / g. The obtained photocatalyst is large in specific surface area, high in visible light absorption capacity, low in photogenerated charge recombination efficiency, easy to separate and recycle, high in photocatalytic capacity and capable of effectively removing norfloxacin in wastewater.

A method for preparing high-dielectric, moderately saturated magnetized yttrium iron garnet ferrite belongs to the field of microwave and magnetic materials technology. This invention utilizes a method that substitutes the dodecahedral Y-site in the garnet structure. 3+ Octahedral and tetrahedral Fe 3+ The formulation and secondary granulation process result in a material with moderate saturation magnetization (1050G < 4πMs < 1250G), suitable for low-frequency microwave ferrite devices. It also possesses high dielectric constant ε' > 20, low ferromagnetic resonance linewidth ΔH ≤ 24Oe, and low dielectric loss tanδ. ε <1×10 ‑4 This can reduce the design size of the device, which is beneficial for the miniaturization and weight reduction of microwave ferrite devices.

Systems and methods for signal conditioning of an acoustic driven ferromagnetic resonance (ADFMR) sensor device to improve the performance of the sensor. The apparatuses (e.g., system, devices, etc.) and methods described herein can preferably measure an EM field using magnetic resonance and then utilize this information to determine the magnitude and / or gradient of the field. In particular, any of these systems and methods may include one or more of: low-frequency cancellation (e.g., DC cancellation), RF subtraction, frequency modulation, and the use of one or more pilot tones (e.g., Walsh codes, etc.), either individually or in combination.

The application discloses a 10KV resonance identification and harmonic elimination method, comprising the following steps: S1, collecting open delta voltage, and using different scales to carry out wavelet decomposition on the collected open delta voltage to extract signal components of different frequency bands; S2, establishing a signal component maximum absolute value M matrix according to the extracted signal components of different frequency bands; S3, comparing the signal component maximum absolute values of the frequency bands to complete amplitude, frequency identification and harmonic identification of waveform singularity; and S4, calculating to obtain a harmonic elimination condition and a damping resistance. The application can accurately identify resonance and select a harmonic elimination damping resistance, and has sensitivity and reliability for eliminating ferromagnetic resonance of a voltage transformer.

A method for preparing high dielectric constant, small linewidth yttrium iron garnet ferrite material belongs to the field of ferrite material preparation technology. This invention utilizes the dodecahedral Y-axis in the garnet structure... 3+ octahedral Fe 3+ Instead of using a traditional method, this invention employs a two-stage pre-calcination process and a three-stage ball milling process (low speed followed by high speed), requiring only three ball milling operations, one granulation operation, and one sintering operation to produce yttrium iron garnet ferrite materials. The two-stage pre-calcination process results in better powder activity, a higher degree of solid-state reaction completion during sintering, and superior material properties. The three-stage ball milling process, using a low-speed followed by a high-speed process, enhances the particle size uniformity of the milled powder. The resulting ferrite exhibits a high dielectric constant ε' > 20, a low ferromagnetic resonance linewidth ΔH ≤ 25Oe, and a low dielectric loss tanδ. ε <1×10 ‑4 .

A C-band ultra-low loss self-biased hexagonal gyromagnetic ferrite material belongs to the technical field of ferrite material preparation. The ferrite material includes BiCaZrVIn‑YIG gyromagnetic ferrite material and LaScBiCu‑BaM hexagonal gyromagnetic ferrite material in a weight ratio of 0.1 to 10; the weight percentage of the dopant in the ferrite material, calculated as oxide: 0.3 to 0.7wt% La2O3, 0.4 to 0.8wt% SiO2 and 0.5 to 0.9wt% SrTiO3. The present invention grows a high M hexagonal ferrite on the surface of low-loss BiCaZrVIn‑YIG gyromagnetic ferrite particles. r / M s and H c The LaScBiCu‑BaM hexagonal ferrite with high and adjustable anisotropy field H a , high coercivity H c and remanence ratio M r / M s , ultra-low ferromagnetic resonance linewidth △H and dielectric loss tanδ ε The characteristic hexagonal spin magnetic ferrite material meets the engineering requirements of low loss and wide bandwidth for C-band micro-integrated devices.

Provided is a novel antigen detection method capable of detecting an antigen, as a substance to be detected, by using a signal transmission line for transmitting a high-frequency signal. This antigen detection method for detecting an antigen in a sample comprises: a step in which a sample, containing an antigen reacted with both a primary antibody for fixing the antigen to a carrier and a secondary antibody labelled with magnetic particles, is produced; a step in which the sample is placed close to or in contact with a probe in which a signal transmission line is formed; a step in which a DC magnetic field in a direction along the signal transmission line is applied to the sample by a magnetic field application means; a step in which a high-frequency signal is supplied to the signal transmission line by a signal measurement instrument electrically connected to the signal transmission line; a step in which a signal being transmitted along the signal transmission line in a state in which the DC magnetic field is being applied is measured by the signal measurement instrument over a predetermined frequency band; and a step in which the antigen is detected by an arithmetic processing means on the basis of a signal corresponding to the resonance frequency of ferromagnetic resonance observed in the predetermined frequency band.

Described herein are methods and apparatuses to provide accurate measurement of relatively small magnetic fields under ambient conditions while being worn on an ambulatory subject. These methods and apparatuses may allow accurate and reliable detection of biomagnetic fields from organs such as the brain, heart, and muscles, using a magnetometer, and in particular, using an Acoustically Driven Ferromagnetic Resonance (ADFMR) sensor. These methods and apparatuses may incorporate one or more of: a synthetic gradiometer, flexible and / or thin-film / foil shielding, and / or denoising.

A system for an acoustically driven ferromagnetic resonance (ADFMR) based sensor. The system may include a power source, that provides an electrical signal to power the system, at least one circuit comprising a set of ADFMR circuits, sensitive to external electromagnetic fields, a power splitter, a power combiner and a detector circuit. The system functions to detect and measure external electromagnetic (EM) fields by measuring a perturbation of the electrical signal through the ADFMR circuits due to the EM fields.

The application provides a ferrite ferromagnetic resonance line width measurement system and a test method based on accurate adjustment of a static magnetic field. The measurement system is based on a resonant cavity method for measurement, a high-Q cavity is used to improve the test sensitivity, and an n-layer Helmholtz coil device is innovatively designed. Through the combination of the n-layer Helmholtz coil device and an electromagnet, accurate adjustment of the static magnetic field loaded on the sample to be measured is realized, thereby overcoming the problem of small measurement range of a high-precision gauss meter, and improving the measurement precision.

The present invention discloses a high-power high dielectric constant microwave garnet ferrite material and a preparation method thereof. The chemical formula of the garnet ferrite material is: Y 3‑x‑y‑a‑b‑2c Bi x G y Ca a+b+ 2c Sn a Zr b (CoGe) ε V c Fe 5‑a‑b‑c‑2ε‑θ O 12 , wherein 0.8≤x≤1.2, 0.01≤y≤0.5, 0.01≤c≤0.08, 0.005≤ε≤0.03, θ is the iron deficiency; the values ​​of a and b satisfy: 0≤a≤0.5, 0.15≤b≤0.5, and 0.15≤a+b≤0.5. The garnet ferrite material of the present invention has a high dielectric constant, a low ferromagnetic resonance line width and a high spin wave line width, so that the magnetic loss and power resistance characteristics of the material can be taken into account, and can be used as a high-power microwave material in small-size high-power microwave devices.

The utility model provides a ferromagnetic resonance detection probe which comprises an angle absolute value encoder, a first displacement assembly, a second displacement assembly, a supporting arm and a coplanar waveguide, and the coplanar waveguide can be driven by the first displacement assembly and the second displacement assembly to extend into a narrow space by means of the supporting arm. Ferromagnetic resonance detection can be carried out in a narrow space; when power-off and power-on do not affect the acquisition of the distance between the supporting arm and the surface of the measured object, and after power-off and power-on, the position of the supporting arm affected by the electric control driver does not need to be calibrated, so that the position change and error of the supporting arm in the vertical direction can be effectively avoided; therefore, the support arms and the corresponding coplanar waveguides are prevented from colliding with other components or measured objects, so that the measured objects and detection equipment are protected, and nondestructive ferromagnetic resonance measurement of wafers can be realized.