The application discloses a piezoelectric
single crystal MEMS pressure sensor and a preparation method, and belongs to the technical field of MEMS and piezoelectric materials. The sensor comprises, from top to bottom, an
electrode layer, a piezoelectric layer, a structure layer and a load action layer. The
electrode layer comprises interdigital electrodes and reflective gratings, which are designed according to the
acoustic wave wavelength λ / 4; the piezoelectric layer adopts a piezoelectric
single crystal material as a sensitive film; the structure layer comprises a sealed cavity formed by
etching; and the load action layer is a flexible
silicon substrate. The application realizes a force transmission path of back force and front response through a 'air pressure
coupling' mechanism. After
external pressure acts on the load action layer, the air static pressure in the sealed cavity is changed and uniformly transmitted to the piezoelectric layer, so that the piezoelectric layer is driven to produce deformation and cause a
frequency shift of the
surface acoustic wave. The design discards the traditional top
needle type force transmission structure, avoids the
stress concentration problem, significantly improves the sensitivity,
linearity and integration of the device, and expands the application in the field of air
pressure detection.