The invention relates to the technical field of surface treatment, and discloses a high-
hardness sawtooth sputter
coating method which comprises the steps of multi-element
corrosion inhibitor composite conversion film treatment,
boron-containing
nitride double-layer sputter
coating,
sol-gel compact sealing layer treatment,
chemical vapor infiltration strengthening treatment and low-temperature
plasma polymerization hole sealing treatment. According to the method, a Cr-Mo-W-
rare earth-organic phosphonic acid composite conversion film, an AlTiB (C) N superhard bottom layer, an AlCrNO
corrosion-resistant
surface layer, a SiO2-Al2O3 compact gel layer, a CVI strengthening layer and a SiOC
polymer hole sealing layer are sequentially formed on the surface of a sawtooth base body, and a sextuple synergistic protection structure is constructed. The surface
hardness of the obtained
coating reaches HV4500-5000, the
corrosion resistance to various corrosive media such as acidity,
alkalinity, salt mist and
sulfide is remarkably improved, the service life is prolonged by 4-6 times, and the problem of rapid failure of the high-
hardness boron-containing
nitride coating in a complex corrosive environment is solved.