Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

47 results about "Nanoporous membrane" patented technology

Thin liquid film phase change heat dissipation device for coping with ultrahigh heat flow based on micro-channel and nano-porous film

The invention discloses a heat dissipation device and a heat dissipation method, and belongs to the technical field of heat dissipation of high-power electronic devices. The device mainly comprises a gradually-shrinking micro-channel radiator which is of a hexagonal structure, a preset number of fan-shaped micro-ribs which are distributed in a radial mode are evenly arranged in the center of the gradually-shrinking micro-channel radiator, and gradually-shrinking micro-channels which are distributed in the radial mode are arranged between the adjacent fan-shaped micro-ribs; the nano-porous membrane is of a circular structure, circular nano through holes are uniformly distributed in the nano-porous membrane, and the nano-porous membrane is located on the gradually-reduced micro-channel radiator; and the liquid supply manifold is of an outer hexagonal and inner circular structure, is located on the micro-channel radiator and surrounds the nano-porous membrane, and the vertex angle of the hexagonal structure is provided with a liquid inlet and outlet. The cooling liquid can be continuously supplied to the tail end, overtemperature damage caused by insufficient liquid supply of the micro-channel at the tail end is effectively avoided, meanwhile, the overall temperature uniformity of the radiator can be guaranteed, and the situation that the radiator is damaged due to large thermal stress is greatly reduced.
Owner:NORTH CHINA ELECTRIC POWER UNIV

Electrode foil, preparation method thereof and aluminum electrolytic capacitor

The invention belongs to the technical field of electrode materials, and particularly relates to an electrode foil, a preparation method thereof and an aluminum electrolytic capacitor, and the preparation method of the electrode foil comprises the steps: carrying out the formation of a corrosion foil, and forming an aluminum oxide film on the surface of the corrosion foil; forming a nano-porous silicon dioxide film on the surface of the aluminum oxide film to obtain an electrode foil with an aluminum oxide-silicon dioxide double-layer composite oxide film; and sequentially carrying out phosphating treatment and annealing treatment on the electrode foil. According to the preparation method, after the corrosion foil is subjected to formation treatment to form the Al2O3 film, the nano-porous SiO2 film is formed on the surface of the Al2O3 film, the SiO2 film is subjected to phosphating treatment to contain phosphorus elements, the phosphorus elements are uniformly diffused into the SiO2 film, a double-layer composite oxidation film with the Al2O3 inner layer and the SiO2 outer layer is obtained, and the specific volume, the hydration resistance and the corrosion resistance of the low-voltage electrode foil are improved.
Owner:DONGGUAN DONGYANG SOLAR SCI RES & DEV CO LTD

Multimodal measurement device, system, and method

A multimodal measurement device comprises a split analyte sensor layer, a seal layer above the sensor layer, configured to divide the sensor layer into two or more detection zones, including a detection channel associated with each detection zone, a membrane holding layer above the seal layer, comprising a holder for a nanoporous membrane chip, and delivery channels fluidly connecting two or more surfaces of the chip to the two or more detection zones of the sensor layer via the detection channels, and a cap layer above the membrane holding layer, comprising a plurality of application channels including input and output ports, wherein the application channels are fluidly connected to chip via the delivery channels of the membrane holding layer. Related systems and methods are also disclosed.
Owner:UNIVERSITY OF ROCHESTER

Electrochemical biosensor for alpha-synuclein detection

The invention provides an electrochemical biosensor used for alpha-synuclein detection. The sensor comprises a magnetic particle capture probe coated by a monoclonal antibody, a SiO2 nanoparticle signal probe for detecting antibody modification and a nano porous membrane loaded glassy carbon electrode modified by graphene. During detection, alpha-synuclein is specifically combined with the monoclonal antibody-coated magnetic particle capture probe and the detection antibody-modified cadmium-doped SiO2 nanoparticle signal probe to form a compound with a sandwich structure, the compound is directly precipitated in an external magnetic field, uncombined substances are removed through cleaning, and the detection sensitivity is high. And then re-dispersing the precipitate (compound) in the electrolyte, and immersing the glassy carbon electrode loaded by the graphene-modified nano porous membrane. After electrification, the cadmium ions in the compound are subjected to redox reaction to generate a current signal, and the current intensity of the current signal is in direct proportion to the content of alpha-synuclein. The sensor has the advantages of simplicity in operation, rapidness in detection, high sensitivity, high specificity and the like.
Owner:UNION BIOTECH TIANJIN

Single particle layer metal organic framework mixed matrix nanoporous membranes and methods of making the same

The application discloses a single-particle layer metal organic framework mixed matrix nanometer porous membrane and a preparation method thereof, and belongs to the field of functional materials and membrane separation technology. The preparation method comprises the following steps: firstly, synthesizing MOF nanoparticles; then, self-assembling the MOF particles and polystyrene balls on the water surface; after treatment, obtaining a MOF single-particle layer; finally, adding a proper amount of a polymer binder to fill the gaps between the MOF particles, so that a single-particle layer MOF mixed matrix nanometer porous membrane is obtained. The single-particle layer MOF mixed matrix nanometer porous membrane prepared by the preparation method is composed of a single-particle layer, has an ultrathin thickness and high strength, and the transmembrane transport of substances in the membrane only needs to pass through a single MOF particle, so that the nanometer porous structure of the MOF particle can be used to the maximum extent, the negative influence of polymer blockage and grain boundary between particles on the substance transport of the nanometer porous membrane is avoided, and the single-particle layer MOF mixed matrix nanometer porous membrane has high selectivity and high permeability.
Owner:ZHEJIANG UNIV

Composite film material with dynamic infrared stealth, electromagnetic shielding and thermal management functions and preparation method thereof

The application discloses a composite film material with dynamic infrared stealth, electromagnetic shielding and heat management functions and a preparation method and application thereof. The composite film material is a three-layer asymmetric structure. A first outer layer is a nanoporous film for reflecting sunlight and transmitting infrared radiation. A middle layer is a uniform and dense MXene layer for absorbing sunlight, reflecting infrared radiation and shielding electromagnetic interference. A second outer layer is a heat-insulating PDMS layer with a patterned array design for high sunlight transmission and high infrared emissivity. The spectrum-selective nanoporous film / MXene / patterned PDMS composite film material with the asymmetric structure can have good infrared stealth, electromagnetic shielding and heat management performances under high, low and humidity conditions, and can be applied to the fields of shielding stealth and heat management under complex dynamic scenes.
Owner:BEIJING UNIV OF CHEM TECH

Functionalized two-dimensional nanopore membrane containing probe modification as well as preparation method and application of functionalized two-dimensional nanopore membrane

The invention belongs to the technical field of nano material detection and application, and particularly relates to a probe-modified functionalized two-dimensional nanopore membrane and a preparation method and application thereof.The probe-modified functionalized two-dimensional nanopore membrane comprises a graphene oxide two-dimensional nanopore membrane and a crown ether probe on the graphene oxide two-dimensional nanopore membrane, according to the graphene oxide two-dimensional nanopore membrane, after flaky graphene oxide non-methylated polypeptide with carboxyl on the surface penetrates through the prepared probe-modified two-dimensional functionalized nanopore membrane and is combined with a probe through a hydrogen bond, a pore channel is blocked to cause current change, but methylated polypeptide is not combined with the probe and passes through the pore channel; therefore, the purpose of enriching methylated polypeptide is achieved. The driven solution is collected, the eluent of the functionalized two-dimensional nano-pore membrane is subjected to mass spectrum testing, methylated polypeptide is found in the driven solution, non-methylated polypeptide is found in the eluent of the functionalized two-dimensional nano-pore membrane, and therefore the enrichment effect of the functionalized two-dimensional nano-pore membrane is verified.
Owner:CHINA UNIV OF GEOSCIENCES (WUHAN)

Membranes with precision Nanopores and Method for Manufacture Thereof

PendingUS20250262598A1MembranesSemi-permeable membranesChemical physicsNanoporous membrane
This invention is for membranes with precision nanopores (also known as precision nanopore membranes or PNM) offering exceptional permeability and selectivity for separation of gas mixtures. Other applications include microfiltration. The subject PNM has high precision nanopores directly connecting the opposite sides of the membrane, thus avoiding a torturous path fort gas transport of prior art nanoporous membranes. Pores are oriented generally perpendicular to the membrane surface and may occupy a large fraction of membrane surface area. This beneficially offers reduction in membrane thickness and reduced operating pressures. This arrangement offers allow extreme reduction in membrane thickness ensuring high permeability and low driving pressures. The PNM allow for a simplified construction of the separator and a process with much reduced energy consumption compared to current commercial practice.
Owner:VETROVEC JAN

Preparation method of nanopore film and related device

The embodiment of the invention provides a preparation method of a nanopore film, which comprises the following steps: firstly, forming a plurality of nano-scale metal groups on the surface of a substrate, then carrying out plasma etching on the substrate to form nanopores at target positions of the substrate, the target positions comprising the positions where the nano-scale metal groups are located, etching gas adopted in the plasma etching comprises carbon-containing gas and oxygen-containing gas; thus, in the etching process, active free radicals dissociated from the etching gas are enriched at the position of the nanoscale metal group by utilizing the carbon dissolving capacity of the nanoscale metal group, so that the etching rate at the position of the nanoscale metal group is increased, and meanwhile, the oxygen-containing gas destroys a protective film formed by the carbon-containing gas; and further increase of the etching rate at the position of the nanoscale metal group is facilitated, so that the etching rate at the position of the nanoscale metal group is far higher than that at other positions. By adopting the method, the preparation cost of the nanopore film can be reduced.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

A dry single-pull diaphragm and its preparation method

The invention discloses a preparation method of a dry-process single-pull separator, comprising the following steps: (1) feeding: after pre-treatment of the raw materials, the raw materials are transported to an extrusion system; (2) casting: the pre-treated raw materials are melt-plasticized in the extrusion system and then extruded from a die head to form a melt having a specific crystalline structure after casting; (3) heat treatment: the base film is heat-treated to obtain a hard elastic film; (4) compounding: the hard elastic film is cooled and then laminated and compounded; (5) stretching and shaping: the composite film is stretched, retracted and shaped to form a nanoporous membrane; (6) layering: the nanoporous membrane is layered through a layering device to obtain a nanoporous membrane of a target thickness, and the peeling angle during layering is 45-75 degrees; (7) slitting: the nanoporous membrane is cut into finished films. The preparation method can improve the stability of the layering process, so that the yield of the product is high, and the assembly short-circuit rate of the product is low when it is subsequently used for battery assembly.
Owner:FOSHAN YINGBOLAI TECH

Micro or nano porous membrane, manufacturing method of same, porous resin membrane complex, and filter element

ActiveUS12246292B2Vinyl etherPolymer science
The present disclosure relates to a micro or nano porous membrane composed of a stretched membrane of a fluororesin membrane, wherein the fluororesin membrane contains sintered bodies of a plurality of core-shell particles containing fluororesins, wherein the core-shell particles include cores and shells covering outer surfaces of the cores, wherein an average particle size of the core-shell particles before being sintered is greater than or equal to 100 nm and less than or equal to 1,000 nm, wherein a ratio of a volume of the shells to a volume of the cores in the core-shell particles before being sintered is greater than or equal to 2 / 98 and less than or equal to 50 / 50, wherein a fluororesin of the cores is a tetrafluoroethylene-hexafluoropropylene copolymer, a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer or a combination thereof, and a fluororesin of the shells is polytetrafluoroethylene, and wherein a first heat of fusion of the fluororesins in the core-shell particles is less than or equal to 68 J / g.
Owner:SUMITOMO ELECTRIC INDUSTRIES LTD

Microbial power generation device and microbial power generation method

PCT designated stageWO2025220543A1Biochemical fuel cellsMicroorganismElectron donor
A microbial power generation device according to the present invention comprises: an anode chamber that holds microorganisms and receives a supply of raw water that includes an organic substance that is an electron donor; and a cathode chamber that is partitioned from the anode chamber by an ion-permeable but non-electroconductive nanoporous or sub-nanoporous film and receives a supply of an oxygen-containing gas an electron acceptor. The microbial power generation device is characterized by comprising a circulation passage that recycles some anode chamber outflow water and supplies the anode chamber outflow water to the anode chamber.
Owner:KURITA WATER INDUSTRIES LTD

Sound wave-assisted fishbone microfluidic separation system for ultrahigh-flux separation of exosome as well as preparation method and application of sound wave-assisted fishbone microfluidic separation system

The invention discloses a sound wave-assisted fishbone microfluidic separation system for ultrahigh-flux separation of exosomes and a preparation method and application thereof, a core component of the system comprises a microfluidic chip with an upper and lower layer structure, a fishbone-shaped channel and three access ports are arranged in the chip, and a pair of piezoelectric transducers is arranged outside the chip. The nano-porous AAO film is placed between the upper layer and the lower layer of the chip, and the chip is tightly sealed. The design of the fishbone-shaped microfluidic channel aims at strengthening the mixing effect of particles in a solution and the contact between the particles and a membrane interface. The nano-porous AAO film is induced to oscillate through sound waves generated by the piezoelectric transducer, and the mechanism effectively relieves the problem that the exosome is blocked in the nano-pores. Due to the size selectivity of the nano porous membrane, small molecular substances such as protein and nucleic acid are allowed to pass through smoothly, and the exosome with larger volume is intercepted in the micro-fluidic channel, so that the efficient enrichment of the exosome is realized. By utilizing the device, the exosome can be collected and eluted in situ within a short time.
Owner:NANJING DRUM TOWER HOSPITAL

Composite membrane material for reducing the content of Au / Ag / Pt / Ni / Bi in electronic grade sulfuric acid and preparation method thereof

The application discloses a composite membrane material for reducing the content of Au / Ag / Pt / Ni / Bi in electronic-grade sulfuric acid and a preparation method thereof. The composite membrane material comprises a PVDF / SGO nanoporous membrane material and a PVDF / GO electrostatic spinning membrane material which is compounded on the surface of the nanoporous membrane material. The nanoporous membrane material is prepared by using N-methyl pyrrolidone as a solvent, polyvinylidene fluoride as a polymer, glass fiber and graphite powder as additives, and SGO as a complexing agent, and then being coated by a blade coating method to obtain the PVDF / SGO nanoporous membrane material. The electrostatic spinning membrane material is prepared by using N,N-dimethylformamide as a solvent, polyvinylidene fluoride as a polymer, and graphene oxide as a complexing agent, and then being spun to obtain the PVDF / GO electrostatic spinning membrane material. The composite membrane material can effectively solve the problem of high content of specific metal ion impurities such as Au, Ag, Pt, Ni and Bi in the existing high-purity sulfuric acid purification.
Owner:FOSHAN XILONG CHEM CO LTD

Devices and methods for improving bioavailability of therapeutic agents

The present disclosure provides a device for sustained release of a therapeutic agent, comprising: a capsule configured for implantation and having a reservoir; a nanoporous membrane having a plurality of pores; a therapeutic agent disposed within the reservoir; wherein the nanoporous membrane provides a diffusion path for the therapeutic agent out of the reservoir; and the device further comprises an anti-inflammatory drug.
Owner:NANO PRECISION MEDICAL INC

Functionalized porous membranes and methods of manufacture and use

A functionalized microporous, mesoporous, or nanoporous membrane, material, textile, composite, laminate, or the like, and / or a method of making or using such functionalized membranes. The functionalized porous membrane may be a functionalized microporous, mesoporous, or nanoporous membrane that has a functional molecule attached, such as a functional polymer, to the surface and / or internal fibrillar structure of the membrane.
Owner:CELGARD LLC

Supramolecular Coordination Framework Compounds and Their Preparation Methods, Nanoporous Membranes Modified with Supramolecular Coordination Frameworks and Their Applications

ActiveCN116162259BSemi-permeable membranesNanoporous membranePorphyrin
The present invention belongs to the technical field of ion efficient separation materials, and specifically relates to a supramolecular coordination framework compound and a preparation method thereof, a supramolecular coordination framework modified nanochannel membrane and an application thereof. The present invention provides a supramolecular coordination framework compound having the structure shown in Formula 1. The supramolecular coordination framework compound provided by the present invention has a porphyrin group in its structure. When the supramolecular coordination framework compound is used as a sieving host and chemically modified in the nanochannels of the nanochannel membrane, there is a strong coordination interaction between the porphyrin group in the framework and divalent ions, thereby preventing the passage of divalent ions. Therefore, monovalent ions can be selectively passed through, forming a monovalent / divalent ion selective transport. The supramolecular coordination framework compound provided by the present invention shows significant ion sieving performance when used as a sieving host and modified in the nanochannels, and has excellent sieving performance for monovalent / divalent ions.
Owner:TIANJIN POLYTECHNIC UNIV

Preparation method and application of nano porous membrane based on heavy ion irradiation

The invention discloses a preparation method and application of a nano-porous membrane based on heavy ion irradiation. The preparation method comprises the following steps: treating a polymeric membrane in a manner of heavy ion irradiation and ultraviolet-induced oxidation etching in sequence to obtain the nano-porous membrane; the heavy ion irradiation refers to that 1-5GeV bismuth ions, gold ions or silver ions are adopted, and the irradiation dose is 107-1012cm <-2 > to carry out heavy ion irradiation on the polymeric membrane. According to the method, the evaporation rate of the hydrogel can be remarkably increased, the temperature rise amplitude of the electronic equipment is reduced, stable operation of the electronic equipment is effectively guaranteed, the evaporation rate of the hydrogel can be increased to three times or above, and the temperature of an electronic device in operation is reduced by 24 DEG C. Compared with natural cooling, the heat exchange efficiency can be improved by two times through the nano porous membrane enhanced hydrogel evaporation heat dissipation method.
Owner:SHANGHAI JIAOTONG UNIV

Alternating current droplet generation with hydrophobic nanoporous membrane

Described herein is an alternating current electrospray technology comprising a hydrophobic nanoporous membrane that can generate monodisperse micron sized droplets at remarkably high throughput. The droplets can be used for ddPCR applications or for encapsulating extracellular vesicles or cells.
Owner:UNIV OF NOTRE DAME DU LAC

Nanoporous membrane

A method of making a nanoporous membrane is constructed using an array of sacrificial nanopillars that print removable material on a substrate. After continuous deposition or even of covering layers with different properties, the sacrificial nanostructure is dissolved, and finally the nanoporous membrane with nanopores, channels and cavities designed with nanoscale sizes and geometrical shapes is formed. Thus, unprecedented unique functions are achieved in various technical fields (e.g., bioartificial organs, nanoelectronics, bioelectronics, molecular sensors and biomedical applications).
Owner:OSTIA TECHNOLOGY CO LTD

Nanoporous membrane support in an electrolyzer cell

PendingEP4476385A4CellsOrganic diaphragmsMedicineNanoporous membrane
An electrolyzer cell comprises a first half cell with a first electrode, a second half cell with a second electrode, a separator separating the first half cell from the second half cell, wherein a compressive load is applied between the separator and the first electrode or between the separator and the second electrode, or between both the first and second electrodes and the separator, and a nanoporous support structure located between the first electrode and the separator.
Owner:VERDAGY INC

Construction method of polycarbophil calcium tablet enhanced anti-diarrhea release system

The invention discloses a construction method of a polycarbophil calcium tablet enhanced anti-diarrhea self-adaptive release system. According to the method, calcium polycarbophil and an ion-exchangeable multivalent metal salt carrier are treated under controlled humidity to form a microporous structure, so that the calcium polycarbophil and the ion-exchangeable multivalent metal salt carrier can be replaced and released by monovalent cations in intestinal fluid. The obtained pretreated component and a biodegradable porous polymer matrix are mixed and pressed at low temperature, and pH responsive microcapsules are distributed in the matrix. A composite blocking layer cross-linked by hydrophilic and hydrophobic polymers is formed on the surface of the matrix, so that the expansion rate of the composite blocking layer dynamically changes along with local pH; the outer layer is provided with a controllable degradation nano-porous membrane, and the pore size distribution is reconfigured under the induction of the ion concentration gradient. After constant-temperature and constant-humidity compaction treatment, the obtained system shows a self-adaptive release curve in an in-vitro simulation experiment, and delayed effect and stable release can be realized under different individual intestinal tract conditions. According to the method, the treatment effect of the anti-diarrhea medicine is remarkably improved through a multi-response mechanism.
Owner:NANJING LINGNUO BIOMEDICAL TECH RES INST CO LTD

Devices and methods to improve bioavailability of therapeutic agents

The disclosure provides a device for sustained release of a therapeutic agent, comprising a capsule configured for implantation and having a reservoir; a nanoporous membrane with a plurality of pores; the therapeutic agent disposed within the reservoir; wherein the nanoporous membrane provides a diffusion path for the therapeutic agent out of the reservoir; and the device further comprising an anti-inflammatory agent.
Owner:NANO PRECISION MEDICAL INC

Nanoporous membrane support in electrolytic cell

InactiveJP2025504177ACellsOrganic diaphragmsElectrical batteryNanoporous membrane
The electrolytic cell comprises a first half-cell with a first electrode, a second half-cell with a second electrode, a separator separating the first half-cell from the second half-cell, where a compressive load is applied between the separator and the first electrode, or between the separator and the second electrode, or between both the first and second electrodes and the separator, and a nanoporous support structure located between the first electrode and the separator, the nanoporous support structure being 100 micrometers thick or less.
Owner:VERDAGY INC

An electrochemical aptamer sensor for detecting mycotoxins in agricultural products, and its preparation method and detection method

This invention relates to the field of electrochemical sensing, specifically disclosing an electrochemical aptamer sensor for detecting mycotoxins in agricultural products, its preparation method, and detection method. The sensor includes a working electrode, a reference electrode, and a counter electrode modified with a silica nanoporous membrane. The detection solution contains a composite probe of graphene oxide-mycotoxin aptamer-hexaammineruthenium trichloride. This invention uses hexaammineruthenium trichloride and mycotoxin aptamers as the electrochemical signal molecule and specific recognition element, respectively. They are adsorbed onto the surface of graphene oxide through electrostatic interactions or π-π interactions, forming the graphene oxide-mycotoxin aptamer-hexaammineruthenium trichloride composite probe. Combined with the signal amplification effect of the silica nanoporous membrane, the constructed homogeneous electrochemical aptamer sensor exhibits high detection sensitivity, a wide detection linear range, and a low detection limit, showing significant application potential in the field of food safety monitoring.
Owner:THE FIRST AFFILIATED HOSPITAL ZHEJIANG UNIV COLLEGE OF MEDICINE +2

Nanopore membrane and application thereof in gas separation

PendingCN120677009AMembranesSemi-permeable membranesNanoporous membraneNanoporous carbon
The present invention relates to a process for the manufacture of nanoporous carbon membranes, membranes obtainable by this process, methods for gas separation using these membranes and the use of such membranes.
Owner:CARL FREUDENBERG KG

Identification of viral particles and extracellular vesicles using nanopore in combination with optical detection

PendingCN121866471ABiological testingExtracellular vesicleNanoporous membrane
The present invention relates to methods for identifying the type and / or subtype of viral particles and / or extracellular vesicles using nanoporous membranes in combination with optical detection. The invention also relates to the use of this method, in particular for identifying / naming the type and / or subtype of viral particles and / or extracellular vesicles present in a biological sample. More specifically, the transport of viral particles and extracellular vesicles through the nanopore enables identification of the type of particles by specific interactions of viral particles and extracellular vesicles with said nanopore and modeling of this phenomenon, in particular using a bottleneck model.
Owner:CENT NAT DE LA RECH SCI (C N R S) +2

Diaphragm and method of making and using same

This invention discloses a separator, its preparation method, and its application, relating to the field of battery separator technology. By first layering a stretched multilayer nanoporous membrane and then subjecting it to aging treatment, the membrane thickness is reduced and physical constraints are removed after layering, resulting in a smoother and more responsive release path for residual stress within the membrane. This effectively alleviates the localized high stress concentration phenomenon caused by the combined effects of thickness accumulation and memory effect. Furthermore, this invention utilizes a roll-up mechanism with adhesive strips. The spacing between the adhesive strips provides physical space for the membrane to freely retract during aging, further reducing the additional internal stress induced by hindered retraction. This makes the membrane deformation more uniform and reversible, ultimately significantly suppressing the occurrence of permanent appearance defects such as waviness and sagging edges.
Owner:康辉南通新材料科技有限公司

A thin film hydrogen sensor based on inorganic-organic hybrid nanoporous membrane / semiconductor metal oxide and a method for preparing the same

ActiveCN116794116BSimple structureReduced operating temperature rangeMaterial nanotechnologyNanosensorsNanoporous membraneThin membrane
The application discloses a kind of thin film hydrogen sensor based on inorganic-organic hybrid nanoporous membrane / semiconductor metal oxide and preparation method thereof, belong to hydrogen sensor field, the present application combines traditional semiconductor metal oxide with mesoporous inorganic-organic hybrid layer, on insulating inorganic or polymer substrate using molecular layer / atomic layer deposition technology, by introducing a porous hydroquinone zinc film (Zn-HQ), then depositing semiconductor metal oxide (MO) film, prepared MO / Zn-HQ composite film type hydrogen sensor, in the case where there is no noble metal modification, obtained sensitivity high, response fast, good selectivity, low-temperature workable semiconductor oxide film type hydrogen sensor.The hydrogen sensor structure is simple, hydrogen-sensitive performance is excellent, and the preparation process is compatible with microelectronic process, and it is convenient to be applied to integrated, miniaturized and intelligent microelectromechanical system and multifunctional sensor.
Owner:NANJING UNIV