The invention discloses a micro-well based gas sensor array and its making method. According to the invention, (1) the gas sensor array adopts an MEMS (Micro-Electro-Mechanical Systems) technology, an interdigital electrode is prepared on an SOI wafer surface, an SU-8 photoresist is used to make a micro-well isolation layer for preventing cross contamination of sensitive materials among different interdigital electrodes during sensitive membrane preparation, and each sensor array at least includes 4 interdigital electrode units; (2) an independent heating unit is located under each interdigital electrode, thus greatly improving the sensitivity and response recovery time of the sensor; (3) an organic membrane, an organic/inorganic composite membrane or an organic-inorganic multilayer membrane is taken as the sensitive membrane, and by determining the resistance change during gas adsorption of the sensitive membrane, qualitative and quantitative detection of a gas can be realized; and (4) using a droplet coating, gas jet or electronic injection technique to prepare the sensitive membrane. The gas sensor array has broad application prospects in the fields of atmospheric environment monitoring, aerospace sealed cabin air quality testing and food security, etc.