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Ferro-electric field effect transistor based on structured carbon nano tube striped array and manufacturing method thereof

The invention discloses a ferro-electric field effect transistor based on a structured carbon nano tube striped array and a manufacturing method of the ferro-electric field effect transistor. According to the unit structure of the transistor, a bottom electrode layer (1) is arranged on the bottom layer, a ferro-electric film insulated gate layer (2) and a structured carbon nano tube striped array channel layer (3) are sequentially arranged on the middle layer, and a top layer is arranged on the structured carbon nano tube striped array channel layer (3) and comprises a transistor source electrode (4) and a transistor drain electrode (5); carbon nano tubes are single-walled carbon nano tubes, or double-walled carbon nano tubes or multi-walled carbon nano tubes. According to the ferro-electric field effect transistor, the on-state current and the switch ratio are large, carrier mobility is high, the starting voltage is small, the storage window is wide, and meanwhile the ferro-electric field effect transistor has the advantages of being simple in structure and a buffering layer is not needed, interface contact between a ferro-electric layer and a semiconductor layer is good, and large-area soft devices are easy to obtain. The manufacturing method is simple in technology, convenient to operate and low in cost and dispense with expensive equipment, and large-area and large-scale industrial production is easy to realize.
Owner:XIANGTAN UNIV
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