Non-refrigerant thermopile infrared detector and manufacturing method thereof

A technology for infrared detectors and manufacturing methods, applied in electric radiation detectors, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., can solve problems that cannot be monitored , low device test efficiency, and the inability to reduce device costs, etc., to achieve the effects of reducing test costs, simplifying test steps, and improving test efficiency
CN101776483AActive Publication Date: 2010-07-14SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2010-07-14

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Abstract

The invention relates to a non-refrigerant thermopile infrared detector and a manufacturing method thereof. The invention is characterized in that a micro heater is arranged in the infrared absorption area of a non-refrigerant thermopile infrared detector. Because the manufacturing process of the micro heater is completely compatible with that of the thermopile, the two processes are integrated on one chip. By using the micro heater to measure the thermal conduction of the encapsulated infrared detector, the invention realizes the measurement of the vacuum degree of an encapsulated device; and by using the micro heater to simulate the operation state of the thermopile infrared detector, the invention realizes the wafer level self-test of the infrared performance of the detector. The invention can be used for mass production, can monitor the key process step of wafer level bonding and vacuum encapsulation, and can realize the wafer level measurement of the infrared performance of the detector. Besides, the invention improves the device-testing efficiency, reduces the testing cost, and can realize a low-cost and high-performance non-refrigerant thermopile infrared detector.
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Description

technical field

[0001] The invention relates to an uncooled thermopile infrared detector and a manufacturing method thereof, belonging to the technical field of uncooled infrared detection and microprocessing. Background technique

[0002] With the increasing status of infrared detection technology in the military and civilian fields, the application range of infrared detectors is also increasing. According to the working mechanism, infrared detectors can be divided into thermal detectors and photon detectors (C G Mattsson, K.B., G H-E Nilsson and H Martin, Thermal simulation and design optimization of a thermopile infrared detector with SU-8 membrane. Journal of Micromechanics and Microengineering, 2009.19(5): p.055016.). Among them, thermal detectors are mainly divided into three types: thermocouple / thermopile, thermistors (Bolometers) and pyroelectric detectors (Pyroelectric); photon detectors are mainly divided into intrinsic type (Intrinsic), non- There are several k...

Claims

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