Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor

An orthogonal dual-channel, micro-electromechanical technology, applied in the direction of electromagnetic field characteristics, etc., can solve the problems of small signal amplitude, DC power consumption, and measurable phase only half a cycle, etc., to achieve the effect of increasing the amplitude and broadening the frequency bandwidth.

Inactive Publication Date: 2007-09-12
SOUTHEAST UNIV
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Problems solved by technology

Traditional microwave phase detectors are all based on diode or normal effect tube structures, they all need to consume DC power, and some of them have the following problems: the ...

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  • Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor
  • Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor
  • Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor

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Embodiment Construction

[0026] The microwave phase on-line detector of the present invention uses the GaAs substrate as the substrate, and the specific implementation scheme is as follows:

[0027] The micro-electromechanical orthogonal dual-channel microwave phase on-line detector is characterized in that port one of the first power divider a is connected to a reference signal, and port two and port three of the first power divider a respectively output a reference signal one U r1 and reference signal two U r2 And respectively connected to port 2 of the first power combiner c and the second power combiner d; port 1 of the second power divider b is connected to the signal under test, and its port 2 and port 3 respectively output the signal under test-U s1 and the measured signal two U s2 And connect the port three of the first power combiner c and the 90° phase shifter g respectively, form a third signal at the port one of the first power combiner c and receive the signal input end of the first fixe...

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Abstract

this invention relates to power in direct-current circuits. The invention takes gallium arsenide as foundation (1). On the foundation has power divider, power synthesizer, 90deg phaser, solid beam structure. Power divider and power synthesizer composed by port one (7), port two(8), port three(8), dissymmetry coplane band line(10), nitride tantalum electric resistance. Solid beam structure includes signal input port(16), pier(5), solid beam(13), pedestal structure(6), sensing electrode(4), sensing electrode leader(12), capacitance detecting port(15), air bridge(14). There are nitriding silicon medium layer on the transmission line, pedestal structure and sensing electrode under solid beam, and sensing electrode leader under Air Bridge.

Description

technical field [0001] The invention proposes an orthogonal dual-channel microwave phase on-line detector based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave phase is an important parameter to characterize microwave signal characteristics, and the measurement of microwave phase plays a very important role in microwave wireless applications and measurement technologies. Traditional microwave phase detectors are based on diode or normal effect tube structure, they all need to consume DC power, and some of them have the following problems: the measured signal amplitude is relatively small, the bandwidth of the measured signal is small, and the measurement accuracy is not high , The measurable phase is only half a cycle, etc. [0003] In the past 20 years, with the rapid development of MEMS technology, many MEMS structures and devices,...

Claims

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Application Information

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IPC IPC(8): G01R29/08
Inventor 廖小平焦永昌
Owner SOUTHEAST UNIV
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