The invention relates to the technical field of material detection, and discloses a
semiconductor chip defect online detection
system based on optical physical characteristics, which comprises a coherent light projection module, a reference light projection module, a displacement driving feedback unit, a discrete photoelectric detection array, a material support body and a logic
processing unit, the displacement driving feedback unit acquires a rotating speed pulse
signal, the logic
processing unit calculates a
laser sampling frequency and adjusts a pulse triggering
time sequence, so that the
axial displacement of the strip to be measured is constantly within a preset resolution range, the coherent light projection module and the reference light projection module project light beams at different angles, and a differential
optical path is constructed; the discrete photoelectric detection array collects composite optical signals, the logic
processing unit counteracts background
phase noise by means of
signal differential logic and extracts phase features of a
speckle pattern to determine defect space coordinates, mechanical interference is stripped at a sensing source by means of a physical hedging mechanism, and optical dynamic
ambiguity under the high-speed working condition is effectively eliminated.