The application discloses a multiple deep-groove insulating column high-
conductivity insulated gate bipolar transistor and a manufacturing method thereof, and relates to the technical field of power
semiconductor manufacturing. The application discloses a multiple deep-groove insulating column high-
conductivity insulated gate bipolar transistor and a manufacturing method thereof, and relates to the technical field of power
semiconductor manufacturing. The emitter end comprises an emitting area, a base area and an insulating layer, and the base area is provided with groove type gates on both sides. The emitter end further comprises a potential floatable P type area and a plurality of deep-groove insulating columns in the P type area. The P type area is formed by
doping P ions on the sidewalls and the bottom of the insulating column grooves, and the deep-groove insulating columns are filled with insulating materials. The emitting area comprises two N+ emitter areas and a P+ area between the N+ emitter areas. By increasing the number of insulating columns, performing sidewall
ion implantation and backfilling insulating material process, the
processing difficulty of the potential floatable P type area is reduced, and the process reliability is improved. The above structure changes the hole flow direction to realize low
saturation voltage between the collector and the emitter end, reduces excessive carriers of the emitter end, shortens the
switching time, reduces the switching loss, reduces the
electric field intensity at the bottom of the gate, and improves the
breakdown voltage.