The invention provides a GaN HEMT (
High Electron Mobility
Transistor) with strong non-clamping inductive switching capability in an
irradiation scene and a preparation method thereof, and belongs to the technical field of semiconductors. Comprising a substrate layer, a
gallium nitride layer, a
passivation layer, a channel layer, a
barrier layer and an
electrode structure layer, the
electrode structure layer comprises a grid
electrode structure, a source electrode structure and a drain electrode structure, the source electrode structure and the drain electrode structure are arranged on the two sides of the grid electrode structure, the grid electrode structure is in a strip shape and arranged above the
barrier layer in the first direction, and the source electrode structure and the drain electrode structure are connected with the channel layer; a plurality of rectangular P-type
gallium nitride layers arranged in groups are arranged between the grid electrode structure and the drain electrode structure, the plurality of rectangular P-type
gallium nitride layers arranged in groups are uniformly arranged at intervals along a first direction and are connected through a
metal wire, the top of the
metal wire is connected with a
negative potential electrode, and an area between the potential
barrier layer and the
negative potential electrode is filled with a
dielectric layer. The technical problems that the normal switching capability of a device is affected and the
overvoltage robustness is degraded due to hole accumulation after
irradiation of a traditional HEMT can be solved.