The invention provides a SiC groove type
JFET (junction
field effect transistor) integrated with an SBD (
Schottky barrier diode). The drain
metal, the N + substrate region, the N-drift region, the
JFET channel region and the N + source region are sequentially arranged from bottom to top; the
JFET channel region is located on the upper surface of the N-drift region; the P + region is located on the upper surface of the N-drift region; the N + source region is located on the upper surfaces of the
N channel region, the left P + region and the right P + region; the gate
metal layer is located on the upper surface of the left P + region; the source
electrode metal layer is divided into two parts, the top source
electrode metal layer is located on the upper surface of the N + source region, and the right side source
electrode metal layer is located on the outer surface of the right side P + region and the upper surface of the SBD through-flow region. The phase electrode
coupling area is reduced, the gate-drain
capacitance and the gate-drain charge are reduced, the switching speed is higher, and the switching loss is lower; when the device works in a third quadrant, the
Schottky barrier diode is introduced, the turn-on
voltage is greatly reduced, the
conduction loss is greatly reduced, SBD conduction is unipolar conduction, the bipolar degeneration effect is avoided, and the
reverse recovery characteristic is excellent.