The application discloses a
semiconductor device and a preparation method thereof. The
semiconductor device comprises a substrate, at least two super junction structure
layers arranged on one side of the substrate, wherein the super junction structure layer comprises P-type strip buried regions and N-type strip buried regions which are arranged alternately and have the same extending direction, and the extending directions of the P-type strip buried regions in adjacent super junction structure
layers are different; and an N-type buried layer arranged between the adjacent super junction structure
layers. The longitudinal super junction structure layer is added, so that the withstand
voltage performance of the whole device is improved, and the super
high voltage super junction IGBT is realized. The N-type buried layer is arranged, so that the outflow of holes is prevented. The accumulation of holes appears below the N-type buried layer. When the number of holes is greater than that of electrons, the area cannot maintain charge balance, more
electron current is injected into the area by the emitter, the concentration of carriers locally increases, and the reduction of on-state
voltage drop is realized.