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122results about How to "Lower channel resistance" patented technology

Source-drain buried graphene transistor device on diamond-like carbon substrate and manufacture method

A source-drain buried graphene transistor device on a diamond-like carbon substrate and a manufacture method are applicable to radio frequency communication. The manufacture method includes: firstly, depositing a layer of diamond-like carbon amorphous carbon smooth in surface and stable in chemical property on the substrate by the aid of a magnetic filtered cathode vacuum arc system; secondly, etching a source trench and a drain trench on the diamond-like carbon amorphous carbon insulating layer and filling electrode metal into the trenches; thirdly, planarizing and cleaning the surface of the substrate prior to transferring graphene grown by a chemical vapor deposition method to the cleaned substrate; fourthly, growing gate insulating dielectric by an atomic layer deposition method and sputtering gate electrode metal; and finally, forming a metal gate by means of reactive ion etching and depositing low-K insulating dielectric to protect the device. Carrier mobility of a graphene transistor is high, and the source-drain buried structure is capable of decreasing the graphene length of a region uncovered by the gate, so that gate-source capacitance, gate-drain capacitance and channel resistance are reduced, and high-frequency performance and efficiency of the graphene transistor are improved. The source-drain buried graphene transistor device can be widely applied to small-sized high-frequency graphene integrated circuits.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

GaN-based enhanced power electronic device and preparation method thereof

The invention discloses a GaN-based enhanced power electronic device and a preparation method thereof. The GaN-based enhanced power electronic device comprises a substrate, a thin barrier Al (In, Ga)N/GaN heterostructure formed on the substrate, and a grid electrode, a source electrode and a drain electrode formed on the thin barrier Al (In, Ga)N/GaN heterostructure, wherein AlN passivation layers are formed in access areas between the grid electrode and the source electrode and between the grid electrode and the drain electrode. The AlN passivation layers with a polarization characteristic are utilized to restore two0-dimension electronic gas in channels of the thin barrier Al (In, Ga)N/GaN heterostructure under the AlN passivation layers, so that the conducting resistance of the device is lowered, and high-voltage current collapse of the device is inhibited. According to the invention, the controllability and the consistency of a threshold voltage of the GaN-based enhanced device are improved, the technology repeatability of the GaN-based enhanced device is eliminated, the yield rate of the GaN-based enhanced electronic device is improved, and the industrialization process of the GaN-based enhanced device is promoted.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Three-gate power LDMOS

The invention belongs to the field of power semiconductor devices, and relates to a lateral three-gate power LDMOS based on a bulk silicon technology. The three-gate power LDMOS is mainly characterized by having a three-gate structure and a second conductive material electrically connected with a source or a gate or an external electrode. The three-gate power LDMOS has the main advantages that the three-gate structure increases the channel density and reduces the channel resistance, and thus, the specific on-resistance drops; the second conductive material can freely select the electrode, when the gate electrode is connected, in the positive case, electron accumulation surfaces are formed on the side surface and the bottom surface of a second groove, a multi-dimension low-resistance channel is formed, and the specific on-resistance is greatly reduced, and in the reverse case, assistant depletion of a drift region is carried out, the drift area doping concentration of the device is increased, the specific on-resistance of the device is reduced; when the source electrode is connected, gate-drain overlapping is reduced, the gate-drain capacitance of the device is reduced, and switching loss is reduced; and when the external electrode is electrically connected, multiple effects can be achieved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Transverse SOI power LDMOS

The invention belongs to the technical field of semiconductor power devices, and relates to a transverse SOI power LDMOS. Compared with the existing structure, the power LDMOS provided by the invention has a three-dimensional gate structure, and an oxide layer thickness between the part extending to a trench gate field plate of a drift region from a gate and the drift region gradually changes from the gate to a drain end. In a forward conducting state, the trench gate forms a side channel to greatly reduce the channel resistance of the device; an electron accumulation layer is formed in the drift region to constitute a low resistance current channel, so as to greatly reduce the resistance in the drift region of the device; and the conducting resistance of the device is reduced by the two aspects. In a forward blocking state, the trench gate field plate extending to the drift region has a depletion effect on the drift region, thereby improving the concentration in the drift region and reducing the resistance in the drift region. Since most open state current flows by a charge accumulation layer, the specific on-state resistance of the transverse SOI power LDMOS provided by the invention is nearly not affected by the concentration in the drift region, so that the 2.5 power contradictory relationship of the specific on-state resistance Ron, sp of the device and the withstand voltage BV.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA

4H-silicon carbide based N-channel accumulating high-voltage insulated gate bipolar transistor

InactiveCN104617136ALower channel resistanceGood on-state characteristicsSemiconductor devicesHigh pressureGate voltage
The invention discloses a 4H-silicon carbide based N-channel accumulating high-voltage insulated gate bipolar transistor. The 4H-silicon carbide based N-channel accumulating high-voltage insulated gate bipolar transistor is characterized in that the traditional inversion channel is replaced by an accumulation channel and an N type base region is adopted between a P type shielding layer and a gate oxide layer. The thickness and the dosage concentration of the N type base region are selected to guarantee that the region is completely deleted when the gate voltage is zero, and therefore, the bipolar transistor is closed in a normal state. When the gate voltage is high enough, the accumulation channel is formed at the interface of SiO2/SiC so that the bipolar transistor can be switched on. Current carriers in an accumulation layer are distributed farther away from the surface than current carriers in an inversion layer and a higher effective migration rate of the accumulation channel can be expected, and therefore, the differential on resistance of the 4H-SiC based high-voltage N-channel IGBT and the on voltage drop under specific on current density and gate voltage can be effectively reduced by replacing the traditional inversion channel with the accumulation channel, and consequently, the energy loss of the bipolar transistor in the on state can be effectively reduced.
Owner:SHANDONG UNIV

4H-SiC metal semiconductor field effect transistor with slope-shaped grid and manufacturing method

The invention discloses a 4H-SiC metal semiconductor field effect transistor with a slope-shaped grid. The 4H-SiC metal semiconductor field effect transistor comprises a 4H-SiC semi-insulating substrate, a P-type buffer layer and an N-type channel layer from bottom to top, a source electrode cap layer and a drain electrode cap layer are arranged on the surface of the N-type channel layer, a source electrode and a drain electrode are arranged on the surface of the source electrode cap layer and the surface of the drain electrode cap layer respectively, a slope-shaped groove inclined towards one side of the source electrode cap layer is formed in the upper end face of the N-type channel layer, the slope-shaped grid is arranged is arranged in the slope-shaped groove, the lower end face of the slope-shaped grid is matched with the slope-shaped groove, the upper end face of the slope-shaped grid is parallel to the upper end face of the N-type channel layer, and the distance between the slope-shaped grid and the source electrode cap layer is smaller than that between the slope-shaped grid and the drain electrode cap layer. The field effect transistor has the advantages of being high in drain electrode output current and excellent in frequency property.
Owner:XIDIAN UNIV

VDMOS device and manufacturing method thereof

The invention provides a VDMOS device and a manufacturing method thereof. The manufacturing method comprises the following steps that: a gate oxide layer is formed in gate trenches of a silicon substrate, and the gate trenches of the silicon substrate are filled with polycrystalline silicon; a body region is formed; first ions and second ions are sequentially injected into the silicon substrate, and the silicon substrate is subjected to annealing treatment, and therefore, source contact regions can be formed at two sides of each gate trench, and the first ions and the second ions have the same type, and the energy of the first ions is larger than that of the second ions, and the dosage of the first ions is smaller than that of the second ions; a dielectric layer is formed; after a source trench mask is formed on the dielectric layer, and the silicon substrate is etched, and therefore, source trenches can be formed between the source contact regions; and the source trench mask is removed, and a metal layer is formed on the silicon substrate. With the manufacturing method provided by the invention adopted, the contact resistance of the VDMOS device can be decreased without changing the structure of the device, increasing the manufacturing process difficulty of the device and increasing the manufacturing cost of the device, and therefore, the performance of the device can be improved.
Owner:PEKING UNIV FOUNDER GRP CO LTD +1

Display device

The present application relates to a display device comprising: a power supply chip for outputting a gate turn-on voltage; a gamma chip which is used for providing gamma voltage; a detection resistorwhich is provided with a first end and a second end which are used for electrical connection, wherein the first end is grounded; a display panel which comprises a plurality of sub-pixels, a pluralityof driving transistors and at least one detection transistor, wherein the grid electrodes of the driving transistors receive a grid electrode turn-on voltage, the first electrodes of the driving transistors receive a gamma voltage, and the second electrodes of the driving transistors are electrically connected with the corresponding sub-pixels, the grid electrode of the detection transistor receives a grid electrode turn-on voltage, the first electrode of the detection transistor receives a test voltage, and the second electrode of the detection transistor is electrically connected with the second end of the detection resistor; and a control module which is electrically connected with the second end of the detection resistor and is used for controlling the power supply chip to increase ordecrease the output of the gate turn-on voltage when the voltage of the detection resistor is decreased. The display device can effectively prevent display darkening after long-term use.
Owner:HKC CORP LTD +1

Laterally diffused metal oxide semiconductor field effect transistor with RESURF (reduced surface field) structure

The present invention relates to a laterally diffused metal oxide semiconductor field effect transistor with an RESURF (reduced surface field) structure. The laterally diffused metal oxide semiconductor field effect transistor includes a substrate, a gate, a source, a drain, a body region, a field oxide region which is located between the source and the drain, as well as a first well region and a second well region which are located on the substrate; a plurality of gate doped regions are arranged in the second well region below the gate; the polysilicon gate of the gate is of a multi-section structure; the sections of the polysilicon gate are separated from one another; the gate doped regions are arranged below gaps between the sections of the polysilicon gate; and each gate doped region is electrically connected with one of two sections of the polysilicon gate which are located at two sides of the gate doped region, wherein the one section of the polysilicon gate electrically connected with the gate doped region is adjacent to the source. According to the laterally diffused metal oxide semiconductor field effect transistor with the RESURF structure of the invention, the number of trench electrons is increased, and the electrons are accelerated a plurality of times during a process of flowing from the source to the drain, equivalently, and a trench electric field and trench current can be improved, and therefore, trench resistance is reduced, and on-resistance can be reduced.
Owner:CSMC TECH FAB2 CO LTD
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