360results about How to "Thin layer" patented technology

In a method of forming a thin layer for a semiconductor device through an ALD process and a CVD process in the same chamber, a semiconductor substrate is introduced into a processing chamber, and an interval between a showerhead and the substrate is adjusted to a first gap distance. A first layer is formed on the substrate at a first temperature through an ALD process. The interval between the showerhead and the substrate is additionally adjusted to a second gap distance, and a second layer is formed on the first layer at a second temperature through a CVD process. Accordingly, the thin layer has good current characteristics, and the manufacturing throughput of a semiconductor device is improved.

The present invention provides a semiconductor device which can be produced by simple and cheap processes and effectively achieve improved performances and a reduced electric power consumption. Further, the present invention provides a production method thereof and a display device including the semiconductor device or a semiconductor device produced by the production method. The present invention is a semiconductor device including a pixel part and an integrated circuit part on a substrate, the pixel part including a switching element having a gate electrode formed on a semiconductor thin film, the integrated circuit part including a semiconductor layer on a gate electrode, wherein a passivation film is formed on the gate electrode in the pixel part.

A tungsten nucleation film is formed on a surface of a semiconductor substrate by alternatively providing to that surface, reducing gases and tungsten-containing gases. Each cycle of the method provides for one or more monolayers of the tungsten film. The film is conformal and has improved step coverage, even for a high aspect ratio contact hole.

An illumination system includes a plurality of radiation generating sources, such as LED dies. A corresponding plurality of optical waveguides is also provided, with each waveguide having a first and a second end, with each first end being in optical communication with the corresponding LED die. An array of corresponding passive optical elements is interposed between the plurality of LED dies and the corresponding first ends of the plurality of optical waveguides. The illumination system provides for substantially high light coupling efficiency and an incoherent light output that can appear to the human observer as arising from a single point of light. In addition, the light can be output remotely at one or more locations and in one or more directions.

A liquid crystal display panel, in which a first substrate (1) and a second substrate (6) are opposed to each other with a predetermined gap provided therebetween, a liquid crystal layer (25) is sealed in the gap with a sealant (26), pixel portions are formed by electrodes (2, 7), the electrodes being provided on the first substrate (1) and on the second substrate (6) to oppose to each other via the liquid crystal layer (25), and lead electrodes (41) for applying electric signals to the electrodes (2, 7) forming the pixel portions are provided at least on the first substrate (1), wherein a thin film insulating layer (22) being an insulating covering member is provided to cover at least portions of the lead electrodes (41) outside the sealant (26) and overlap with a portion of the second substrate (6).

A method of coating implantable open lattice metallic stent prosthesis is disclosed which includes sequentially applying a plurality of relatively thin outer layers of a coating composition comprising a solvent mixture of uncured polymeric silicone material and crosslinker and finely divided biologically active species, possibly of controlled average particle size, to form a coating on each stent surface. The coatings are cured in situ and the coated, cured prosthesis are sterilized in a step that includes preferred pretreatment with argon gas plasma and exposure to gamma radiation electron beam, ethylene oxide, steam.

A honeycomb structure which includes an inlet end and an outlet end opposing each other and a plurality of cell channels extending along an axis from the inlet end to the outlet end, the cell channels having non-equal, square cross-sections, and an extrusion die for making the same.

A spectroscopy system is provided which operates in the vacuum ultra-violet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. The system may further include the use of an array detector in combination with an imaging spectrometer. In this manner data for multiple wavelengths may be simultaneously collected. Moreover, the multiple wavelengths of data may be collected simultaneously for a two dimensional sample area. The system may further include the use of a fixed diffraction grating and does not require the use of polarizing elements. To ensure accurate and repeatable measurement, the environment of the optical path is controlled. The optical path may include a controlled environmental chamber in which non-absorbing purge gases are present or in which vacuum evacuation techniques are utilized. The controlled environment may further include a separate instrument chamber and a separate sample chamber. The controlled environment limits in a repeatable manner the absorption of VUV photons.

A hydrogen ion-sensitive field effect transistor and a manufacturing method thereof are provided. The hydrogen ion-sensitive field effect transistor includes a semiconductor substrate, an insulating layer, a transistor gate, and a sensing film. A gate area is defined on the semiconductor substrate having a source area and a drain area. The insulating layer is formed within the gate area on the semiconductor substrate. The transistor gate is deposited within the gate area and includes a first gate layer. Further, the first gate layer is an aluminum layer, and a sensing window is defined thereon. The sensing film is an alumina film formed within the sensing window by oxidizing the first gate layer. Thus, the sensing film is formed without any film deposition process, and consequently the manufacturing method is simplified.

The present invention is directed to an expandable stent for implantation in a patient comprising a tubular metal body having open ends and a sidewall structure having openings therein and a coating disposed on a surface of said sidewall structure, said coating comprising a hydrophobic biostable elastomeric material and a biologically active material, wherein said coating continuously conforms to said structure in a manner that preserves said openings.

A nanoparticle fluorescence (or upconversion) sensor comprises an electromagnetic source, a sample and a detector. The electromagnetic source emits an excitation. The sample is positioned within the excitation. At least a portion of the sample is associated with a sensory material. The sensory material receives at least a portion of the excitation emitted by the electromagnetic source. The sensory material has a plurality of luminescent nanoparticles luminescing upon receipt of the excitation with luminance emitted by the luminescent nanoparticles changing based on at least one of temperature and pressure. The detector receives at least a portion of the luminance emitted by the luminescent nanoparticles and outputs a luminance signal indicative of such luminance. The luminescence signal is correlated into a signal indicative of the atmosphere adjacent to the sensory material.

A composite tension rod is received in the sleeve portion of a shank that forms part of a terminal fitting, and is spaced from the shank sleeve and connected thereto by a potting resin. The shank sleeve wall tapers out from thin at its distal end to thick at the bury depth of the rod. The rod is tapered outwardly from a point of minimum diameter at its inner end to its full diameter a given distance from the end. The shank sleeve and rod have complementary dual tapering along said length such that as the diameter of the rod along said distance increases, the wall thickness of the shank sleeve decreases. The resin layer and the rod are secured to each other against relative longitudinal movement, as are the resin layer and the shank sleeve.In another aspect of the invention, a tension rod sleeve is fixed to the tension rod and extends over the distal end of the shank sleeve and along all or a majority of the length of the shank sleeve. The rod sleeve is tapered so that its wall thickness decreases to a minimum in the vicinity of the proximal end of the shank sleeve, or the rod sleeve, as it extends along the shank sleeve, is divided, or divides, into two halves or bands which join to form loop extending around a loop-engaging, convex, fiber-turnaround face formed on the terminal fitting. Such face extends transversely from one side to the other of the fitting.

The disclosure relates to a solid glass matrix of polysaccharide, saccharides and polyols as delivery vehicle for preservation and post gastric administration of a probiotic. The delivery vehicle is capable of releasing the probiotic at their site of action. The present invention further includes methods of making and using the solid glass matrix delivery vehicle of the invention.

Synthetic nano-sized crystalline calcium phosphate, particularly hydroxyapatite, having a specific surface area in the range of 150 m2 / g to 300 m2 / g, is described. The nano-sized crystalline calcium phosphate may be in the form of a powder or in the form of a coating on a surface. A method of producing a nano-sized crystalline calcium phosphate powder or coating is also described. The method comprises formation of a liquid crystalline phase in a water solution of calcium, phosphor and a surfactant, placing the phase in an ammonia atmosphere so that nano-sized crystals are formed, followed by either removal of the surfactant with a solvent and recovering the nano-sized crystals to obtain the powder, or diluting the ammonia-treated liquid crystalline phase with a hydrophobic organic solvent to create a microemulsion of the nano-sized crystals in water, dipping an oxide layer-coated surface of an object into the microemulsion, or alternatively saving the step of ammonia treatment of the liquid crystalline phase until after the dipping of the surface of an object into the microemulsion, followed by removal of the organic solvent and the surfactant from the surface to obtain the coating.

An intracorporeal catheter such as a guiding catheter employed for intravascular procedures which generally has an elongated catheter shaft with a polymeric wall with a multistrand reinforcing structure wherein the strands at a plurality of cross point locations of the reinforcing structure are secured together to hold at least part of the braided reinforcing structure in a desired shape for utilization. The strands may be metallic or polymeric or mixtures thereof. The strands can be secured together at the cross points thereof by a variety of ways. In one embodiment a plurality of the strands forming the reinforcing structure are formed of metal and are provided with a coating of solder so that the strands can be secured together by applying heat to the strands at the cross point locations to melt the solder and allow a solidified solder connection between the strands to be formed upon cooling while holding at least the portion of the reinforcing structure having secured cross points while holding the portion of the reinforcing structure in the desire shape. Other embodiment involve other methods of securing the strands at the cross points including welding, brazing, adhesives or mechanical connections.

A nanoparticle fluorescence (or upconversion) sensor comprises an electromagnetic source, a sample and a detector. The electromagnetic source emits an excitation. The sample is positioned within the excitation. At least a portion of the sample is associated with a sensory material. The sensory material receives at least a portion of the excitation emitted by the electromagnetic source. The sensory material has a plurality of luminescent nanoparticles luminescing upon receipt of the excitation with luminance emitted by the luminescent nanoparticles changing based on at least one of temperature and pressure. The detector receives at least a portion of the luminance emitted by the luminescent nanoparticles and outputs a luminance signal indicative of such luminance. The luminescence signal is correlated into a signal indicative of the atmosphere adjacent to the sensory material.

A method for producing a high quality useful layer of semiconductor material on a substrate. The method includes implanting at least two different atomic species into a face of a donor substrate to a controlled mean implantation depth to form a weakened zone therein and to define a useful layer. The implanting step is conducted to minimize low-frequency roughness at the weakened zone. Next, the method includes bonding a support substrate to the face of the donor substrate, and detaching the useful layer from the donor substrate along the weakened zone. A structure is thus formed that includes the useful layer on the support substrate with the useful layer presenting a surface for further processing. The technique also includes thermally treating the structure to minimize high-frequency roughness of the surface of the useful layer. The result is a surface having sufficient smoothness so that chemical mechanical polishing (CMP) is not needed.

A perpendicular magnetic recording write head is formed on the trailing surface of a head carrier or slider that has an air-bearing surface (ABS) oriented generally parallel to the surface of the disk during operation of the disk drive. The write head has a slanted ferromagnetic write pole (WP) that forms an angle between about 5 and 20 degrees from a normal to the ABS. The slanted WP is formed over the generally planar surface of the ferromagnetic main pole and the slanted surface of a support layer located between the ABS and the recessed end of the main pole. A trailing shield (TS) has a slanted face that is generally parallel to and spaced from the slanted WP, with a nonmagnetic gap layer located between the slanted face of the TS and the slanted WP.

A coating material of an electron beam curable type is printed or coated onto a substrate of a heat shrinkable plastic film. Then, the coating material is cured by electron beam irradiation to form a coating layer. As a consequence, a shrinkable film including the substrate and the coating layer disposed thereon is obtained.

The present invention provides a high performance silicon light emitting device. A method and device providing both emission and modulation from a single device is provided, with modulation of the emission characteristics being achieved by application of an electric field across the device, so as to induce quantum confined Stark effects, Franz-Keldysh effects or the like.

The present invention is directed to an expandable stent for implantation in a patient comprising a tubular metal body having open ends and a sidewall structure having openings therein and a coating disposed on a surface of said sidewall structure, said coating comprising a hydrophobic biostable elastomeric material and a biologically active material, wherein said coating continuously conforms to said structure in a manner that preserves said openings.

The disclosure relates to a solid glass matrix of polysaccharide, saccharides and polyols as delivery vehicle for preservation and post gastric administration of a probiotic. The delivery vehicle is capable of releasing the probiotic at their site of action. The present invention further includes methods of making and using the solid glass matrix delivery vehicle of the invention.

A spectroscopy system is provided which operates in the vacuum ultraviolet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. To ensure accurate and repeatable measurement, the environment of the optical path is controlled to limit absorption effects of gases that may be present in the optical path. The VUV reflectometer may be utilized to monitor a wide range of data in a semiconductor processing environment. For example, the techniques may be used for measuring thicknesses, optical properties, composition, porosity and roughness of a film or stack of films. Further, the VUV techniques and apparatus may be used to characterize critical dimensions and other features of a device. The VUV reflectometer system may be utilized as a stand alone tool, or the relatively compact nature of the system may be taken advantage of such that the system is incorporated into other process tools. Thus, for example, the VUV techniques described herein may be incorporated directly into tools used for deposition, etch, photolithography, etc. so that in-line measurements, monitoring and control may be advantageously obtained.

A method for connecting a plurality of solar cells and an improved interconnect is disclosed. The method includes aligning an interconnect to a plurality of solar cells having solder pads, where the interconnect has a main body and tabs extending therefrom, and where each of the tabs has a downward depression, such that the tabs are positioned above the solder pads in between solar cells and pinning the interconnect against a work surface by pressing a hold down pin against the main body of the interconnect such that a lower surface of the interconnect tabs are maintained parallel to an upper surfaces of the solder pads, and such that the depression of each of the tabs flatly contacts the solder pads. The method can also include cantilevered tabs extending downwardly from the main body providing a controlled spring force between the tab lower surface and the solder pad upper surface.

Nano-particle materials including nanometer-scaled particles with a variety of sizes, chemical compositions, and properties may be used to form functional and / or protective media (layers) on a variety of materials and items. Among the items that may be coated and / or protected by nano-particle materials are integrated circuits, printed circuit boards, micro-electro-mechanical systems (MEMS), photonics devices and packages, optical fibers, and displays, as well as various macroscopic structures, such as pipes (tubes), bridges, towers and other civil engineering structures, all kinds of marine vehicles and off-shore structures, aircraft and aerospace structures, cars, etc.

A sliding component, particularly a disk valve plate. The sliding component includes a multi-layer surface structure comprising a strengthening layer harder than the substrate material, and an amorphous diamond top layer.

The invention relates to a display device including a plurality of pixels forming an image, and an optical plate arranged opposite the image and having transparency areas configured to allow the light from the pixels to at least partially pass therethrough. The optical plate further includes at least one array of functional elements corresponding to an electronic and / or mechanical function. The functional elements are inserted between the transparency areas and arranged such that the light emitted by the pixels is directed so as to pass through the transparency areas without intercepting the arrays of functional elements, so as to render the arrays of functional elements invisible or quasi-invisible to an observer of the display device. The invention can be used in any type of display device in which functions other than display itself must be integrated in a visually discreet manner.