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73results about How to "Improve safe work area" patented technology

Accumulation layer controlled insulation gate type bipolar transistor

InactiveCN101393927AIncreased saturation current densityElimination of parasitic thyristor effectsSemiconductor devicesElectron flowParasitic bipolar transistor
Insulated gate bipolar transistors controlled by an accumulation layer belong to the technical field of semiconductor power devices. The transistors include a channel insulated gate bipolar transistor, a plane insulated gate bipolar transistor and a transverse insulated gate bipolar transistor. According to the invention, when a device is in the blocking state, a built-in electric field formed by a P body region (10) and an N base region (4) forms part of an electron barrier which stops electrons flowing from an N source region (9) into the N base region(4) with the voltage-resistance of the device improved; when the device is in the conductive state, the accumulation layer is formed between the N source region (4) and a gate oxide layer (5), and the electrons can flow from the N source region (9) to the N base region (4) through the accumulation layer so as to control the normal operation of the device. With the accumulation layer rather than a P-type base region and an MOS inversion channel of a traditional insulated gate bipolar transistor, the invention can achieve lower conductive voltage drop and greater saturation current density, thereby avoiding parasitic thyristor effect, and ensuring that the safe operating area, the reliability and the high-temperature working characteristics of the device can be greatly promoted.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Process for manufacturing series of intermediate-voltage N-type vertical conduction double-diffused metal oxide semiconductor transistors by using composite epitaxy

The invention discloses a process for manufacturing series of intermediate-voltage N-type vertical conduction double-diffused metal oxide semiconductor (VDMOS) transistors by using composite epitaxy. The process comprises the steps of: batch feeding, first-step epitaxy, second-step epitaxy, third-step epitaxy, fourth-step epitaxy, field oxidation, etching of an active area, high-concentration boron injection and junction depth increasing, phosphorus injection and junction depth increasing, gate oxidation, polycrystalline silicon gate deposition and doping, PWELL boron injection and junction depth increasing, source N+ arsenic injection and junction depth increasing, contact hole etching, aluminum evaporation and corrosion, back thinning evaporation and the like. By a process platform, any additional procedure and operation is avoided, and on-resistance can be lowered by 10 percent on the basis of ensuring withstand voltage; by the VDMOS transistor manufactured by the process, a high-current intense-electric field effect can be effectively suppressed, and the safety working area of a device is enlarged to a certain extent; and the on-resistance is lowered, so that power consumption is greatly reduced, energy sources are saved, and the reliability of a circuit is greatly improved.
Owner:WUXI CRYSTAL SOURCE MICROELECTRONICS CO LTD

Super-junction vertical double-diffused metal oxide semiconductor (VDMOS) capable of effectively preventing charge imbalance

The invention discloses a super-junction vertical double-diffused metal oxide semiconductor (VDMOS) capable of effectively preventing charge imbalance and belongs to the field of power semiconductor devices. Deep energy level impurities are doped in the conventional super-junction VDMOS structure and a columnar region (4) of which the conductive type is opposite to that of an epitaxial region (3), wherein donor impurities such as S, Se or Te are doped in an N-channel device, and acceptor impurities such as In, Ti or Zn are doped in a P-channel device. The deep energy level donor impurities are low in ionization rate at normal temperature, the contribution of the deep energy level donor impurities on the doping concentration of the columnar region (4) can be ignored, and the static load balance of the device is not influenced. When the device is positively conducted and operates under high current, the ionization rate of the deep energy level impurities can be greatly improved along with increase of the temperature of the device, the doping level of the columnar region (4) is relatively reduced, the phenomenon that the avalanche breakdown voltage of the device is reduced caused by load imbalance of the super-junction structure because carriers flow through the epitaxial region (3) is effectively avoided, the operative current range of the device is widened, and the positive safety working area of the device is enlarged.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1

Crosswise heterogeneous electron irradiation method of improving global completion table (GCT) chip safe working area

ActiveCN103065950AMethod for Improving Transverse Non-uniform Electron IrradiationReduce redistribution effectsSemiconductor/solid-state device manufacturingPre irradiationAlloy
Provided is a crosswise heterogeneous electron irradiation method of improving a global completion table (GCT) chip safe working area. The crosswise heterogeneous electron irradiation method of improving the GCT chip safe working area comprises the following steps: (1) carrying out pre-radiation of a GCT chip, and carrying out a primary pre-irradiation to the GCT chip through methods of controlling minority carrier lifetime and pressure drop of the GCT chip, (2) carrying out monitoring of the minority carrier lifetime and pressure drop of the GCT chip after a primary annealing, (3) adopting composite alloy baffles, carrying out a second irradiation and a second annealing to the GCT chip by using heterogeneity of electron irradiation penetrating through the composite alloy baffles, and (4) carrying out the monitoring of the minority carrier lifetime and pressure drop of the GCT chip again. The crosswise heterogeneous electron irradiation method of improving the GCT chip safe working area has the advantages of being simple in principle, and simple and convenient to operate, achieving control of the minority carrier lifetime of parts of the GCT chip, reducing redistribution effect of an electric current in the process of cutoff of GCT by reducing the minority carrier lifetime of far from gate pole slivers, and improving a whole safe working area of the GCT chip and the like.
Owner:ZHUZHOU CRRC TIMES SEMICON CO LTD

Super-junction vertical double-diffusion metal-oxide-semiconductor (VDMOS) device with dynamic charge balance

The invention discloses a super-junction vertical double-diffusion metal-oxide-semiconductor (VDMOS) device with dynamic charge balance and belongs to the field of power semiconductor devices. Deep-energy level impurities (for an N-channel device, a main impurity S, Se or Te; and for a P-channel device, a main impurity In, Ti or Zn) is doped into an epitaxial region (3) of a super junction structure of the conventional super junction VDMOS device. Ionization rates of the deep-energy level impurities are low at room temperature, and the contribution to the dosage concentration of a super-junction center pillar column (4) can be neglected, so that static charge balance of the device is not influenced; when the device is switched in the forward direction and operated under high current, the ionization rates of the deep-energy level impurities are greatly improved along with the raise of the temperature of the device, and equivalently, the doping level of the epitaxial region (3) is improved, so that a phenomenon that avalanche breakdown voltage of the device is dropped caused by the charge unbalance of the super-junction structure when a charge carrier flows by the epitaxial region (3) is avoided; and therefore, the operative current range of the device is widened, and a forward direction safe operation zone of the device is enlarged.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1

Magnetic balanced harmonic elimination reactive compensation device and method

The invention belongs to the field of an intelligent power device and a control device, in particular relates to a magnetic balanced harmonic elimination reactive compensation device and a method. According to the device and the method, three-phase unbalanced data of a circuit is acquired by a detector and is also stored and processed, the state of a load diverter switch on a load circuit is controlled so as to control access states of two branches connected with the detector, wherein one branch is provided with a magnetic balanced harmonic elimination device, the detector controls the load diverter switch to have access to the magnetic balanced harmonic elimination device according to power quality on a detection circuit of the detector when an exception occurs, and the original branch is cut off so as to perform magnetic balanced harmonic elimination. The method and the device have the following advantages that: 1, power supply quality is timely and accurately detected to reach economic operation, and operation loss of the original electromagnetic balanced power saver is effectively reduced; 2, switching in and switching out are convenient so as to guarantee power supply; 3, no-load loss can be effectively reduced; and 4, the device and the method are applicable for a place where a load condition is complicated and harmonic wave of a power grid is high, and power supply reliability is increased.
Owner:山东计保电气有限公司

DMOS device and manufacturing methods thereof

The invention discloses a DMOS device. Lateral impurities in a drift region distribute nonuniformly and drift region impurity concentration of an active region is greater than the drift region impurity concentration under an isolated oxidation layer. The invention discloses a manufacturing method of the DMOS device. The method comprises the following steps: carrying out several times of ion implantation from high energy to low energy in an area of forming the drift region; carrying out silicon etching in the area of forming the isolated oxidation layer; forming the isolated oxidation layer and carrying out heat propulsion to the drift region. The invention discloses another manufacturing method of the DMOS device. The method comprises the following steps: carrying out first ion implantation so as to form a lightly doped drift region and the isolated oxidation layer, and then carrying out the heat propulsion to the lightly doped drift region; carrying out the second ion implantation, wherein injection energy of the second ion implantation is less than the injection energy of the first ion implantation; carrying out impurity heat propulsion. By using the device and the methods of the invention, on-resistance can be reduced; a high injection effect can be decreased; a conduction breakdown voltage can be increased; a cut-off breakdown voltage of the device can be maintained or raised.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Diode and manufacturing method thereof

The invention discloses a diode device and a manufacturing method thereof, and belongs to the technical field of power semiconductor devices. A cellular structure of the device comprises a metal negative electrode, an N+ substrate and an N- epitaxial layer; a trench structure is arranged on the two sides of the top layer of the epitaxial layer; the trench structure comprises a P-type semiconductorregion and a heterogeneous semiconductor from the bottom up; the top layer of the N-epitaxial layer is also provided with a P-type body region, an N+ source region and a P+ contact region; the N+ source region, the P-type body region, a part of the N- epitaxial layer and the heterogeneous semiconductor are in contact through a dielectric layer of the side wall of the trench; the surface of the device is covered with a metal positive electrode; and the heterogeneous semiconductor, the dielectric layer, the source region, the body region and the epitaxial layer form an ultra-potential barrier structure. By virtue of the diode device and the manufacturing method thereof, the problems of high forward opening voltage, poor reverse recovery capability and the like existing in the existing PIN diode device can be solved; and in addition, lower electric leakage and a larger safe working region are achieved on the premise that the withstand voltage is not affected, and the reliability of the device is improved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

A lateral non-uniform electron irradiation method to improve the safe working area of ​​GCT chips

ActiveCN103065950BMethod for Improving Transverse Non-uniform Electron IrradiationReduce redistribution effectsSemiconductor/solid-state device manufacturingPre irradiationAlloy
Provided is a crosswise heterogeneous electron irradiation method of improving a global completion table (GCT) chip safe working area. The crosswise heterogeneous electron irradiation method of improving the GCT chip safe working area comprises the following steps: (1) carrying out pre-radiation of a GCT chip, and carrying out a primary pre-irradiation to the GCT chip through methods of controlling minority carrier lifetime and pressure drop of the GCT chip, (2) carrying out monitoring of the minority carrier lifetime and pressure drop of the GCT chip after a primary annealing, (3) adopting composite alloy baffles, carrying out a second irradiation and a second annealing to the GCT chip by using heterogeneity of electron irradiation penetrating through the composite alloy baffles, and (4) carrying out the monitoring of the minority carrier lifetime and pressure drop of the GCT chip again. The crosswise heterogeneous electron irradiation method of improving the GCT chip safe working area has the advantages of being simple in principle, and simple and convenient to operate, achieving control of the minority carrier lifetime of parts of the GCT chip, reducing redistribution effect of an electric current in the process of cutoff of GCT by reducing the minority carrier lifetime of far from gate pole slivers, and improving a whole safe working area of the GCT chip and the like.
Owner:ZHUZHOU CRRC TIMES SEMICON CO LTD
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