The invention discloses a cellular structure of a
silicon carbide MOSFET device. The cellular structure comprises a drift region positioned on a substrate layer, a second conductive type well region and a first
JFET region which are positioned in the drift region, an enhancement region positioned in the surface of the well region, a gate
insulation layer located on the first
conductivity type enhancement region, the well region and the first
JFET region and making contact with the first
conductivity type enhancement region, the well region and the first
JFET region at the same time, a gate on the gate
insulation layer, a source
metal located on the enhancement region, Schottky metals located on the second
conductivity type enhancement region and the drift region, a second JFET region located on the surface of the drift region between the Schottky metals, and a drain
metal. An SBD is integrated in the
silicon carbide MOSFET cellular structure, so opening of a body
diode is restrained, and the reliability of the device is improved; the SBD is integrated between the second
conduction type enhancement regions of the
MOSFET cellular structure, so the overall
power density of the
chip is increased; and Schottky
metal and the second JFET region are arranged at intervals, so a good compromise relationship between the
on resistance and the leakage current is realized.